2. 1 FEEDBACK CONTROL OF A MICRO MANIPULATOR ALARM LAB

3. 2 On 3 stages: 300  m (fine / PZT) Total displacement = 25mm (coarse / micrometer) 300  m (fine / PZT) 100nm Resolution= 100nm (Joystick) knob Z y x

4. 3 ALARM LAB PZT flexure Pipette (8  m diameter)

5. 4 Application of the micro-manipulator Micro-injection (ICSI ) Micro-dissection Zona penetration Zona Taking out the dissected membrane Zona Penetration Sperm injection Capturing the X chromosome Dissecting Taking the dissected part out Storing the dissected chromosome ALARM LAB

6. 5 MOTIVATION Motion Control of the tip 100nm is not enough for many sub-micron biological applications Dynamic Modeling The uncertainties are causing very low success rates in biological applications ALARM LAB

7. 6 PiezzoDrill control Manipulator control Current Feedback CURRENT SETUP

8. 7 ALARM LAB Control card ROBUST CONTROL LOGIC Feedback Control signal

9. 8 ALARM LAB Present work Analyical model of the manipulator (excluding the pipette). Experimental set-up and tests on the same. Comparison of the experimental and analytical results. Experiments (including the pipette) with Hg in the pipette and without.

10. 9 Dynamic model M2M2 X2X2 M1M1 X1X1 F Spring (K i ) Damper (C i ) PZT force (F) Equivalent mass (M i ) F M3M3 X3X3 Input : F; measured output X 3 ALARM LAB

11. 10 00.0020.0040.0060.0080.01 -1.5 -0.5 0 0.5 1 1.5 Time (sec) Displacement (um) X 3 displacement comparison (the experiments vs. dynamic model) ALARM LAB

12. 11 00.511.522.5 x 10 4 0 0.005 0.01 0.015 0.02 0.025 Frequency (Hz) Displacement(um) FFT comparison (the experiments vs. dynamic model) ALARM LAB

13. 12 Tip Photonic probe Nano level displacement measurement setup ALARM LAB

14. 13 Working principle of photonic probe Light source Output (V) Distance (  m) Probe to target distance ALARM LAB Resolution = 2.5nm

15. 14 ALARM LAB Experimental procedure Photonic sensor Gap Read out (V) Voltage Time

16. 15 ALARM LAB 0123456 -150 -100 -50 0 50 100 Time (sec) Displacement (nm) Joystick control

17. 16 without Mercury Setup for ICSI experiment without Mercury Voltage Time ALARM LAB Read out (V) Pipette dia. < 8 

18. 17 ALARM LAB with Mercury Setup for ICSI experiment with Mercury Voltage Time Mercury Read out (V)

19. 18 00.0020.0040.0060.0080.010.0120.0140.0160.0180.02 -0.25 -0.2 -0.15 -0.1 -0.05 0 0.05 0.1 0.15 0.2 0.25 Time (sec) X 3 Displacement (um) without mercury with mercury X 3 displacement comparison ALARM LAB

20. 19 00.511.522.5 x 10 4 0 0.002 0.004 0.006 0.008 0.01 0.012 0.014 Frequency (Hz) Displacement (um) without mercury with mercury FFT comparison ALARM LAB

21. 20 Observations The key is at the micro-dynamics of the pipette tip. The pipette holder does not feel the presence of Hg. Robust control is possible at 10nm of resolution Obstacles Extreme flexibility at the tip (glass acts like fiber). Displacement sensing (in 2-D) at the pipette tip Complex visco-elastic interface between the Hg and the pipette. ALARM LAB