1. An integrated modular service for microfluidics and mixed technologies
microBUILDER
An integrated modular service for microfluidics and mixed technologies
”Roadshow” presentation
Chapter 1 Introduction

2. microBUILDER is ...
A collaboration of 9 European companies, R&D institutes and universities on microsystem foundry services, focusing on microfluidic applications
Part of the EUROPRACTICE network
Supported by the European Union within the Information Society Technology (IST) thematic priority of the 6th Framework program
Providing a complete service package for the development and production of new products
based on mixed technologies
with a focus on microfluidics applications

3. The Mission
Increase the commercial success and competitiveness of European industry
Simple and cost-efficient access to mixed technology development and manufacturing through
Design & engineering services
Prototyping and manufacturing services
Specific CoventorWare software modules
Training
Demonstration of technological capabilities by sample devices
SME User club
Advises the microBUILDER partners
First-hand access to information
Open for interested SMEs

4. Mixed Technology
Combination and interaction of different technologies and competences
Moulding of plastics
Silicon and glass micromachining
Packaging and system integration
Actuators
Electronics
Surface functionalisation and modification
All technologies and competences are available within the microBUILDER network

5. Microfluidics Handling of small amounts of liquids and gases
Key enabling technology for different application areas:
Diagnostics and analytics
Drug discovery
Drug delivery
Medical devices
Fuel cells
Process control
Machinery and automation
Microfluidic devices and systems:
Lab-on-chip
Valves and pumps
Flow and gas sensors
Chemical micro-reactors

6. The Offer
Complete service package from the first idea to a final product
Design and engineering services
Silicon prototyping and series production
Prototyping and series production of polymer parts
CoventorWare software modules
Training and education
Technologies and processes are documented in a design handbook
Easy access to services through one single customer interface

7. Design & Engineering Services
Custom-tailored development services
Feasibility and concept studies
Proof of principle investigations
Design, modelling and simulation
Prototyping
Test and characterisation
Based on a portfolio of validated methods, processes and technologies
Design Handbook
Specifications of the available technologies and processes
Design rules
Examples of validated designs
Enables experienced users to design their own device

8. CoventorWare Process Access Kits
Library of microBuilder specific process emulation files
Specific material property databases
Library of parametric elements for system-level and component design
Layout template file incl. DRC
Materials’ Properties
Process Parameters
Fabrication
@ MicroBuilder
(SensoNor, Tronics etc.)
System and
MEMS Co-design
Layout
3D Model
FEM/BEM
Analysis
Target Process

9. MPW Services at Infineon Technologies SensoNor
Bulk micromachining of Si and glass
Minimum feature size: 2 µm
High-volume approach to production
High-precision membrane definition by etch stop against pn-junctions
High aspect ratio RIE
High stability piezoresistors for sensing elements
Triple-stack Glass/Si/Glass anodically bonded
Hermetically sealed cavities with electrical feed-throughs
Thermal excitation / Piezoresistive detection

10. MPW and manufacturing services at TRONICS Microsystems
Industrialization and manufacturing of Si/Glass products
Advancing concepts into reliable products
Building supply chains for custom products
Prototyping on MPW and semi-custom runs:
SOI-HARM (High Aspect Ratio Micromachining)
Si-DRIE/Glass under development

11. Polymer technology
Full service: From design and construction to mass production
Microfludic design Service
Check for mass production
Ultra precision milling
Quick prototyping
Small volume production
Mass production by high precision moulding
Advanced quality service
Add on processes, e.g. hydrophilic coating
Micro assembly

12. Microfluidic Construction Kit
The idea: modular concept as an intermediate step
on the way to integrated systems
Lab on a Chip
Microfluidic
Functions
Concept = Kit

13. Microfluidic Construction Kit
The product:
Assembly platform and microfluidic connectors
Library of standard slides: pumps, mixers, splitters
Customer specific microfluidic slides by high precision moulding
Application field examples:
Fuel cells
Environmental monitoring
Biological assay development
Pharmaceutical formulation
Drug synthesis on demand

14. Add-on processes – bioactive layers
Functional surfaces for attachment of:
proteins (antibodies)
single stranded oligo-nucleotides
glucose molecules …
Au or NiCr/Au films on silicon
Commercial or customers’ own biochemistry
To be combined with lab-on-chip systems
K.W. Wee et al. 2005

15. Add-on processes – hydrophobic surfaces
Functional surfaces for inhibiting fluids or for driving fluids through designated areas
Teflon (C4F8) or SiO2 on silicon as hydrophobic and hydrophilic surfaces
Attractive for making valves and for metering (hydrophobic) and for pumps (hydrophilic)
To be combined with lab-on-chip systems
Photo: SINTEF
Hydrophobic surface
Photo: SINTEF
Hydrophobic surface utilized to inhibit fluid flow in a channel

16. Add-on processes – optimizing lab-on-chip systems
Au films or piezoresistors for local heating
On-chip temperature measurements
Sample separation, enrichment and cleaning by electric fields (using e.g. Au thin film electrodes)
Avoid inhibition of biochemistry reactions by means of surface coatings
Infineon SensoNor process

17. Add-on processes – piezoelectric thin films
Photo: MASCOT
Functional surfaces for resonating elements (cantilevers or diaphragms) or for pumps and actuators
Attractive for chemical and biochemical sensors
Piezorelectric film (PZT) on silicon
To be used as stand-alone or to be combined with lab-on-chip systems
Prototype acoustic gas sensor in a ceramic package
Frequency characteristics of the prototype acoustic gas sensor in CO2 at room temperature

18. Training
Short courses: 1 to 2 days introduction to the microBUILDER foundry processes
2-4 days hands-on training courses: Design training for the microBUILDER foundry processes using state-of-the-art design tools like CoventorWare
Web-based distant learning with animation presentation
Master level university course with MEMS and microfluidics basics, introduction to microBUILDER foundry processes and hands-on design with design tools

19. Application Areas Life sciences research
Medical diagnostics and analysis
Drug discovery
Drug delivery
Environmental monitoring
Process control e.g. oil industry and food industry
Food analysis
Security devices e.g. detection of explosives
Energy technology including fuel cells
Photo: SINTEF/Stanford

20. microBUILDER partners