1. Comparative Study of Diamond- like Carbon Films Deposited from Different Hydrocarbon Sources Se Jun Park, Kwang-Ryeol Lee Future Technology Research Division Korea Institute of Science and Technology 2006 춘계 학술대회

2. Various Applications of DLC Film

3. Hydrocarbon Source for DLC Film CH 4 (Alkane) C 6 H 6 (Arene) C 6 H 14 (Alkane) C 2 H 2 (Alkyne)

4. Previous Works A. Grill et al. DRM (1993) 2 1519 High mean ion energy High free H to C ratio High Stress acetylene methane cyclohexane acetylene

5. Impact Energy (eV) 1 10 100 1000 Hydrocarbon Source Dense Hydro- Carbon Polymer Like Carbon Plasma Polymers Energy Ion Source Cold Substrate Dependence of DLC Film on Ion Energy

6. Previous Works A. Grill et al. DRM (1993) 2 1519 High mean ion energy High free H to C ratio High Stress acetylene methane cyclohexane acetylene

7. Previous Works K.-R. Lee et al. Diamon.Rel.Mater. 1994(3) 1230 Methane (CH 4 ) Benzene (C 6 H 6 ) CH 4 : CH 5 + or C 2 H 5 + C 6 H 6 : C 6 H 6 + Difference of ion energy / C atom

8. Hydrocarbon Source for DLC Film CH 4 (Alkane) C 6 H 6 (Arene) C 6 H 14 (Alkane) C 2 H 2 (Alkyne)

9. Purposes of Present Work Characterization of DLC films from the hydrocarbon source of the different structure Hexane (C 6 H 14 ) : Alkane structure Benzene (C 6 H 6 ) : Arene structure To find the relationship between the properties of DLC films and the structure of hydrocarbon source

10. Deposition Condition RF PACVD(13.56 MHz) Precursor Gas : C 6 H 6, C 6 H 14 Deposition Pressure : 1.33 Pa Bias Voltage : - 200 - 800 V b Substrate : P-type (100) Si-wafer Film Thickness : 500 nm

11. Growth Rate of DLC Films

12. Mechanical Properties of DLC Films from Hexane and Benzene Residual Stress Hardness

13. G-Peak Position of DLC Films

14. FT-IR Spectra of DLC Films Benzene Hexane sp 1 C-H sp 2 C-H sp 3 C-H sp 1 C-H sp 3 C-H sp 2 C=C

15. Binding Energy of Alkanes C 6 H 14 355 KJ/mole 420 KJ/mole

16. Binding Energy of Benzene 464 KJ/mole

17. Mass Spectra of Positive Ions in a rf Discharge Ch. Wild et al. JVST A. 5 (1987) 2227

18. Dependence of properties of DLC film on precursor gases Methane (CH 4 ) Hexane (C 6 H 14 ),Benzene (C 6 H 6 ) K.-R. Lee et al. Diamon.Rel.Mater. 1994(3) 1230

19. Conclusions  The structure and properties of DLC films were strongly dependent on the precursor gases. Energy per mass of ion was the main factor to determine the properties and structure of DLC films As mean ion energy increased, properties of DLC film deposited from the hydrocarbon sources in same functional group showed similar tendency.

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