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01 06 02901 06 029 300mm 300mm 1.Why IGS must be used ? 2. 3.Kinetics 4.Benkan 5.Fujikin 6.Flow Path 7.Seal Type 8. : / DL Integrated Gas Box System(IGS)

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Presentation on theme: "01 06 02901 06 029 300mm 300mm 1.Why IGS must be used ? 2. 3.Kinetics 4.Benkan 5.Fujikin 6.Flow Path 7.Seal Type 8. : / DL Integrated Gas Box System(IGS)"— Presentation transcript:

1 mm 300mm 1.Why IGS must be used ? 2. 3.Kinetics 4.Benkan 5.Fujikin 6.Flow Path 7.Seal Type 8. : / DL Integrated Gas Box System(IGS)

2 Benkan,,, Line-Heating, Kinetics Smaller Reduces gas systems footprint by up to 50% Better Improves reliability, maintainability, leak integrity and dry-down time Faster Reduces assembly time by 50% Cheaper Saves up to 33% in installation Cost of facility gas systems 1. Why IGS must be used ? Improve Basic Technology Safety and Clean Technology Miniaturization Use of UPG & W-Seal Technology Reduce Size of Actuator( 35mm to 25mm) Increase Reliability Use of UPG & W-Seal Technology Simple to Make & Maintain All Top Mount Components Uniform Connections Easier to Heat Promote Standardization Full Line-up of Standard Components Standardize Design & Assembly with Flexibility Reduce Leadtime with Standard Parts Cost Reduction Reduced Overall Cost Through Standardization, Increased Reliability, and Ease of Assembly. Fujikin What is the difference between "modular," "topmount" or "surface mount" gas systems? The words "topmount" and "modular" and "surface mount" have slightly different meanings but, in common usage when referring to semiconductor gas systems, they all refer to the same type of system. The most common usage is either "modular surface-mount" (MSM) or "topmount."

3 VALVE 1. Maker KineticsBenkanFujikin Base Plate Block Sealing Valve (Component) Valve(Component) *. Valve Maker IGS *. :(2 Type) - Bolt 4 - Valve :Benkan(Center Lock System) Sealing *. Valve Block Point *. Maker - Kinetics : C-seal - Fujikin : B-seal - Benkan : VCR-Type( ) Block *. Valve Valve. - *. Heating Point Base Plate *. Block

4 2. Kinetics IGS K1S IGS : Integrated Gas System(UNIT ) K1S : IGS 45% Shrink Block Gasket C-Seal

5 3. Benkan BIS BIS-f BIS : Benkan Insert System BIS-f : New version VCR-Type Gasket -. Only Benkan Valve -. Needs Special Valve Fixing Tool -. Valve -. Cross Connecting : -. MFC VCR Gasket

6 4. Fujikin Why choose the Fujikin W-Seal and IGS? 100% Top-Mounting Reduced Number of Sealing Points Highly Configurable Only One W-Seal Gasket Type Required

7 5. Flow Path Kinetics (K1S) Fugikin (IGS) Benkan(BIS)

8 Kinetics (K1S) Fugikin (IGS) Benkan(BIS) 6. Seal Type -. Dead Space

9 7. IGS


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