1. Rutherford Backscattering Spectrometry
拉塞福回向散射儀
Advisor:吳坤憲
Number:4990h003
Student:張有成

2. Outline
History
Structure
Application
Conclusion
References

3. History
Ernest Rutherford, 1st Baron Rutherford of Nelson,  (30 August 1871 – 19 October 1937) was a New Zealand-born physicist who became known as the father of nuclear physics .

4. What is Backscattering

5. What is Rutherford Backscattering Spectrometry
Rutherford backscattering spectrometry (RBS) is used to determine the structure and composition of materials by measuring the backscattering of a beam of high energy ions impinging on a sample.

6. Structure

7. Structure

8. Application The Rutherford Backscattering Spectrometry can be used in：
(a) Measure the film thickness.
(b) Measure the doping profiling.
(c) Determined the composition ratio of the elements.
(d) Observation the material cause migration phenomenon

9. Application

10. Conclusion A sample measuring only spend to 10-20 min.
RBS can measured the film thickness and doping profiling.
Can be measured Au,As,Mo volume in Si semiconductor.
The computer software can simulate the RBS spectra.

11. Shortcoming The equipment is expensive.
Don’t measuring the light element.
If the value K is too close to be measuring of the heavy element.

12. References E-mail: instr@my.nthu.edu.tw
拉塞福背向散射:
材料分析 主編:汪建民
Applying ion beam analysis:
維基百科-Ernest Rutherford :
SUPPORT OF PUBLIC AND INDUSTRIAL RESEARCH USING ION BEAM TECHNOLOGY:
清華大學加速器實驗室
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