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Convergenta tehnologiilor si dezvoltarea unui nou tip de infrastructuri Dan Dascalu, director general, INCD-Microtehnologie.

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Presentation on theme: "Convergenta tehnologiilor si dezvoltarea unui nou tip de infrastructuri Dan Dascalu, director general, INCD-Microtehnologie."— Presentation transcript:

1 Convergenta tehnologiilor si dezvoltarea unui nou tip de infrastructuri Dan Dascalu, director general, INCD-Microtehnologie

2 Convergenta stiintelor si a tehnologiilor in PC7 Convergenta stiintelor? De fapt o cercetare multidisciplinara. Exista de multa vreme biofizica, biochimie, chimie fizica etc. Convergenta tehnologiilor: apar atunci cand anumite tehnologii patrund intr-un nou domeniu de aplicatii, de fapt un domeniu care isi are deja tehnologiile proprii. Convergenta tehnologiilor in PC7. –Micro-nano-bio-info sau micro-nano-bio-cogno. Suprapuneri intre tema ICT (TIC) si NMP, dar si cu tema Health (Sanatate). Aceasta arata interesul exceptional pentru anumite subdomenii.

3 M-N-O-B: Micro-Nano-Opto-Bio N-M-B: Nano-Micro-Bio M-N-O: Micro-Nano-Opto B-O-N: Bio-Opto-Nano M-B-O: Micro-Bio-Opto Input MINOS DATABASES MINOS selection of topics

4 New! Micro-Opto –RF (Microwave, Millimeter Wave) –Opto (Photonics) Two laboratories from IMT (former centres of excellence in RELANSIN and MATNANTECH, respectively) Centre of excellence of EU in RF and Opto MEMS (MIMOMEMS). –Now designed as a common structure: a Centre of excellence of EU in RF and Opto MEMS (MIMOMEMS).

5 MIMOMEMS A new project was invited for negotiation in Brussels European Centre of Excellence in Microwave, Millimetre Wave and Optical Devices, based on Micro-Electro-Mechanical Systems for Advanced Communication Systems and Sensors – MIMOMEMS Capacities - Part 4 - Research Potential. Activity: 4.1.Unlocking and developing the research potential in the EU´s convergence regions and outermost regions (REGPOT ) Cooperation – Theme 3 - Information & Communication Technologies. Challenge 3: Components, systems, engineering The overall aim of the MIMOMEMS project is to bring the research activity in RF and Optical-MEMS at the National Institute for R&D in Microtechnologies (IMT) to the highest European level and create a European Centre of Excellence in Microwave, Millimeter Wave and Optical Devices, based on Micro-Electro-Mechanical Systems (MEMS) for Advanced Communication Systems and Sensors. The Centre of Excellence will be created by developing IMT- Bucharests existing scientific expertise and capacities and collaborating closely with specialist research groups at LAAS-CNRS in Toulouse and FORTH-IESL-MRG in Heraklion.

6 Vector Network Analyzer (VNA) up to 110 GHz and on wafer measurement facilities in order to upgrade the GHz existing on wafer characterization system Frequency synthesiser up to 65GHz Au plating facility for semiconductor wafers White light interferometer- optical profiling system for research applications Near field scanning optical microscope (SNOM) Equipments to be acquired in the MIMOMEMS project MIMOMEMS

7 White light interferometer- optical profiling system for research applications A Sub-nanometer resolution Non-contact measurements by optical interferometry with vertical resolution down to 0.1 nm Fast results Full field 3D measurements in just a few seconds Versatile Reflectivity 1% to 100% : Transparent films (Glass), Silicon, Metal Non-contact measurements All measurements are non destructive, repeatable and require no sample preparation System stability and linearity Measurement are related to wavelength. Highly stable metrology thanks to its design including a capacitive sensor feedback loop in Heraklion.. Examples of different investigations- Fogale – Nanotech web page

8 O perspectiva mai larga Convergenta tehnologiilor –Nu este ceva nou (v. exemple mai departe) –Ridica dificultati suplimentare –Poate duce la convergenta industriilor (v. exemple mai departe) –Un cocktail exploziv: micro-nano-bio –In general – noile materiale si tehnologii pot afecta industriile traditionale

9 Convergenta in tehnologia electronica Ultimul deceniu al secolului trecut: convergenta intre industria comunicatiilor si industria calculatoarelor (de fapt tehnica calculatoarelor digitale (cifrice, numerice) a patruns in tehnica comunicatiilor (initial analogica). Astazi avem TIC = tehnologia informatiei si a comunicatiilor (si industria TIC), dar are loc un alt fenomen: convergenta TIC cu industria media. Un contraexemplu: TIC se aplica si in constructia automobilului (gasim produse TIC in automobil, pe liniile de fabricatie), dar aceasta nu inseamna convergenta tehnologiilor.

10 Care sunt implicatiile? Potentialul este enorm, dar apar si o serie de dificultati Necesitatea unei formatii interdisciplinare a specialistilor (de ex. pentru proiectarea unui microsistem electro-mecanic, MEMS). Abordari diferite (paradigme diferite) care ingreuneaza mult colaborarea. Colective mixte de cercetare – esentiale pentru formare. Sunt interesate firme de diverse calibre, dar ele nu au toate mijloacele necesare (expertiza, dotari) pentru a aborda produse noi cu tehnologii avansate, neconventionale (v. platforma MINAM). Micro-nanofabricatie: accesul firmelor!... Cel mai practic One-stop shop?

11 A new concept for a new era! An open lab is containing various (up-to date) equipments. An equipment may incorporate a immense amount of new knowledge; at the same time it may be seen as a platform for creating, disseminating and using this knowledge (most of it as know-how) –Open to researchers from other labs –Open to researchers from other organizations Laboratory open for companies Loboratory open for education –The so-called knowledge triangle: research, education, innovation

12 RTN-NANOEL: Romanian Technological Network for integration in the European Platform for NANOELectronics (ENIAC) ( ) NANOSCALE-CONV: Network of scientific services for nano-scale structuring and characterization, with applications in the development of convergent technologies ( ) IMT- Bucharest is coordianting 2 Romanian innovative networks acting in nanooelectronic and nanotechnology area, developing andvanced research, providing services for structuring and characterization at nanoscale and hands on training activities The equipments acquisitioned by this networks contributed to the development of a new lab in IMT- Bucharest: NANOSCALE-LAB

13 These Networks, for structuring, scientific research services and characterization at nano-scale bring together well known research institutes and academia, spread all over the country, using in common infrastructures, characterization and manufacturing equipments and complementary skills. The new structuring and characterization facilities were created, to promote the advanced of the fundamental nano-knowledge, to strength the scientific, technological and training excellence. This laboratory will become, in fact, a Centre of nanoscale structuring and characterization, a conglomerate of laboratories with equipments financed from various sources..

14 Specific instruments and equipment available in the lab: Atomic Force Microscope, noncommercial model developed by Twente University (the first AFM in Romania- 1994) Atomic Force Microscopy (AFM) performs high resolution surface morphology investigations Main application consists in 3D surface topography recording and measurement (waviness, roughness, step heights, grains, particles etc) It admits nearly all solid samples, both conductive and nonconductive Professional software for image processing (SPIPTM – Image Metrology) NANOSCALE-LAB Characteristics Maximum scan area: 20 m x 20 m x, y scanner resolution: 5 nm z resolution: 2 nm

15 NANOSCALE-LAB AFM 2D and 3D images of a silicon diffrractive structure. Scan area : 20 m x 20 m Arsenium-dopped single crystal Si surface 20 m x 20 m scan area; RMS roughness S q = 37,3 nm 1 m x 1 m AFM scan of titanium oxide thin film deposited by magnetron sputtering onto silicon. Applications to optical thin films

16 A new Nanolithography Equipment composed of a SEM and EBL Scanning Electron Microscopy TESCAN VEGA 5136 LM Resolution: 3 30 kV, accelerating voltage 200V-30 kV, electron gun source: tungsten filament, magnification : 13X – X, detectors: SE, BSE, LVSTD. PG Elphy Plus from RAITH 6 MHz high-speed pattern generation hardware NANOSCALE-LAB

17 Examples of different investigations and tests using EB Nanolitography Test of nanolitography: Configurations in PMMA resist for manufacturing subwavelength photonic devices (subwavelength hole arrays for photonic cristals) realised for Photonic Lab of IMT Bucharest NANOSCALE-LAB

18 Examples of different investigations and tests using EB Nanolitography Test of nanolitography: Configurations in PMMA resist for manufacturing Fresnel lens, realised for Photonic Lab of IMT Bucharest NANOSCALE-LAB

19 The design transfer on the wafer was performed using a Scanning Electron Microscope equipped with an EBL by direct writing. The result of this process, the nano patterning in PMMA resist 300nm wide and 200 nm high metallic TiAu fingers obtained by lift off technique SAW structures with operating frequencies in the GHz range. The experiments were developed on AlN and GaN thin films with nano-metric lines for the IDT NANOSCALE-LAB Two experimental SAW structures with the two IDTs placed face to face Examples TiAu nanostructures obtained by EBL and lift off process

20 Nanodots (Au on silicon) obtained using EBL and lift-off techniques 50nm diameter nanodots (Au on glass) for nanophotonics applications NANOSCALE-LAB Examples of nanostructuring using EB Nanolitography

21 Example of mix and match lithography: optical lithography and EBL. NANOSCALE-LAB Examples of nanostructuring using EB Nanolitography Structures obtained by classical optical lithography Structures obtained by EBL lithography Details of the EBL structure

22 New Equipments in the NANOSCALE- LAB SPM - Multifunctional Scanning Probe Microscope NTEGRA Aura (NT-MDT) has been recently installed It allows operation in air, liquids, low vacuum (10-2 torr) and controlled gaseous atmosphere. Vacuum operation optimises the resonance frequency or "Q factor" of the cantilever, producing better images for semi-contact AFM modes and increased sensitivity for non-contact modes such as MFM (magnetic force microscopy) and EFM (electrostatic force microscopy). Temperature control of the sample is possible up to 200°C. The special Thermohead provides extremely low thermal drift, which allows long-term measurements to be done in pre-defined points on the specimen surface. NANOSCALE-LAB

23 Characteristics: Maximum scan range: : 100x100x10 µm (up to 150x150x15 µm in DualScan mode) Min Control Resolution XY: nm x, y: Nonlinearity, with closed-loop sensors 0.15% z: Noise level, with sensors: 0.04 nm (typically) Thermal stability to ± 0.005°C (typically). NANOSCALE-LAB Operation modes in air: STM Scanning Tunneling Microscopy/ STS Scanning Tunneling Spectroscopy/contact AFM/ LFM/ ResonantMode (semicontact + noncontact AFM)/ Phase Imaging/ Force Modulation (viscoelasticity)/ MFM/ EFM/ Adhesion Force Imaging/AFM Lithography- Force/Spreading Resistance Imaging (SRI)/AFM Lithography- Voltage/Scanning Capacitance Imaging (SCI)/Scanning Kelvin probe microscopy(SKM)

24 Equipments which will be available very soon! RAITH e-LiNE Nanoengineering System and ultra high resolution electron beam lithography Field emission emitter Laser interferometer stage with 100 mm by 100 mm travel range and 2 nm resolution achieved by closed-loop piezo-positioning 10 MHz DSP -controlled digital pattern generator NANOSCALE-LAB

25 Equipments which will be available soon: EDX- Energy dispersive X-ray microanalysis in SEM- system QUANTAX ( Bruker AXS)- liquid nitrogen free XFlash® silicon drift detector, 135eV resolution, boron detection. NANOIDENTER equipment for nanomechanical testing (mainly based on nanoindentation), for characterization of hardness, modulus, elasticity and viscoelasticity, wear etc at nanoscale. Nanomechanical testing provides a way to analyze materials at very small scales and very high resolution This opens the door for a better understanding of materials and thin films and yields quantitative information for research, development and production NANOSCALE-LAB

26 HIGH RESOLUTION FEG-SEM Ultra high resolution imaging at low kV Ideal for precise boundary, feature, and particle measurements High efficiency EsB detector for compositional information High efficiency In-lens SE detector for high contrast surface imaging BSE imaging at very short working distances - 1mm WD Ultra stable high current mode for X-ray analysis and EBSD applications - 20 nA / 0.2%/h Large five axes motorised eucentric stage Easy operation through Windows® XP based SmartSEM control software Resolution kV kV kV Magnification ,000x in SE mode ,000x with EsB detector EmitterThermal field emission type, stability >0.2%/h Acceleration Voltage kV Probe Current 4 pA - 10 nA (20 nA optional) Standard Detectors EsB detector with filtering grid Filtering grid voltage V High efficiency In-lens SE detector Everhart-Thornley Secondary Electron Detector NANOSCALE-LAB

27 Another example NanoBioLab –Experimenting micro/nano structures (microarrays, lab-on-chip-structures etc.) used for bio-medical applications –Clean room environment –Created by the RO-NANOMED network (open to the other partners in networks and also to the companies) –Extended by using other projects –Basis of a Centre of micro- and nantechnologies for bio-medical applications, inside IMT, open to cooperation

28 The laboratory is installed the technological area of IMT-Bucharest, in the Scientific and Technological Park for Micro and Nanotechnologies MINATECH-RO. NANOBIOLAB is devoted to technological research related to new materials, structures, particles, devices etc., involving biological materials. The activities developed in NANOBIOLAB are mainly dedicated to microarray technologies, with applications in genomics and proteomics, using new specific equipments: Omni Grid Micro Plotter GeneTAC UC4 Scanner. Omni Grid Micro Plotter can dip into a source plate and spot a given volume of sample solution onto a solid surface (e.g. glass slide, silicon substrate) up to 200 consistent spots can be produced from a single dip. The print speed is 10,000 spots/11 slides in less than 3.5 hr. A Control Computer assures the utilization interface. A vacuum wash station ensures active washing in between sample transfers while humidity control minimizes evaporation of precious sample. UC4 Microarray Scanner is the pair of the nano-plotter, used for reading the chips, for DNA detecting and deposition it offers high resolution scanning across the entire surface of standard microarray substrates. The system has two-color lasers - green (532nm) and red (635nm) - coupled with high performance optics optimized to maximize collection of fluorescence signal while minimizing the damage caused by photobleaching. The scanner includes: hardware; powerful and easy-to-use microarray analysis software for fast and reliable imaging, collection and storage of very large data sets and consolidates these data with experimental information. NANOBIOLAB

29 Development of NANOBIOLAB New equipments for nano-biomaterials characterisation: VersaSTAT 3 for: electrochemical impedance spectroscopy (applications in materials selection and performance evaluation, to detect interfacial properties of catalysts and to determine the biological molecular such as protein and DNA or antigen-antibody interactions ); corrosion analysis (for example to study the corrosion susceptibility of metallic biomedical implant). (bio)sensor development: potentiometric sensors (such as ion-selective electrodes) and amperometric sensors (gas sensors, and chemically modified electrodes) Applications: imaging of electroactive surfaces; local pH gradients; study of enzyme activity in biological membranes EIProScan – Electrochemical Probe Scanner for: surface analysis: scanning electrochemical microscopy (SECM) surface structuring: local deposition of metal or conductive polymers in the micrometer/nanometer scale

30 Recent results: Surface Modification for Protein Attachment in Microarray Technology Spot intensity as function of concentration for silicon slides functionnalized with gold after different time of washing Studies of different chemical substrate (glass slides coated with APS, NHS, ALD, poli-L-lysine, gold and silicon slides coated with gold) printed with BSA of different concentrations and marked with CY3 were performed. After printing, the slides were washed with PBS (pH=7,4) after 20, 40 and 60 minutes. Before and after washing the intensity of the spots by scanning the slides and the UV – spectra of the washing residues were analyzed.

31 NANOBIOLAB is a platform of interaction open to all RO-NANOMED participants, but also for cooperation with private companies, universities and other research institutes from Romania and abroad. A close cooperation is developed with two Romanian companies DDS Diagnostic SRL and Dexter Com SRL New activities are foreseen in partnership within the European project INTEGRAM plus : Integrated MNT platforms and services – Service Action, IP coordinated by QinetiQ Ltd, UK. New PN II -PC project: M ulti A lergen Biochip realised by M icro A rray technology General objectives O1. Investigation and studying of the specific processes for technological development of a microarray biochip containing multiallergens for the rapid and noninvasive detection for the allergies with high frequencies in Romania; O2. Investigation of the biohibridic interfaces, with accent on proteins (allergens) on silicon substrate Partners: P1 University of Farmacy and Medicine Carol Davila P2 -University Bucuresti P3 – Telemedica SA P 4- DDS Diagnostic SRL

32 New PN II – IDEI project: 2007 – 2010 Study of silicon-protein type biohybride nanostructured surfaces with applications in bio(nano)senzing Objective 1. Biofunctionalisation of the solid support (Si, nanocrystalline silicon, Au/Si, Au/PS) Objective 2. Protein biodetection Secundary objectives: - increase the knowledge for the development of microdevices with supra-molecular architectures; - optimisation of the Si-biomolecule interface in correlation with specific applications; - the establishment of the input parameters for design a testing platform on a Si chip for biohybrid interfaces for electrical and optical measurements in real time.

33 New PN II project: Silicon based multifunctional nanoparticles for cancer therapy The aim: - development of silicon based nanostructured systems for vectorisation and controled release of the biological active substances of therapeutic interest Impact: The devices which lead the drugs directly to the proximity of affected organ and release them as prescribed doses will improve the medical treatment. A particular effect will have on cancer treatment, because silicon, in nanostructured form, allows the carrying out of cytostatic drugs as well as radioactive ions, and offers, in this simple mode, the possibility of a complete treatment with minimum effort and maximum benefit – the frequently negative secondary effects from classical therapy. iron oxides (Super Paramagnetic Iron Oxide Nanosized Particles -SPION) These systems will consists of superparamagnetic microparticules nanostructured silicon carriering drugs integrated in an organic matrix Partners: National Institute for Biological Science; Institute of Oncology Recent results: Resorbable porous silicon nanocomposite reservoirs for mineral or drug delivery Samples with Fe / PS / Si – n: plan view and cross section of spin-on of a mixing etoxyetanol / Fe(NO 3 ) 3 (b) (a) Samples with Ag / PS / Si – n: plan view and cross section

34 Nanocomposite silicon based membranes for microdevices Two types of Si membranes were designed and fabricated: 1. suspended at the middle Si wafer, in depth; 2. integrated on the Si wafer face PA2, x 100 ~ 30 μm ~ 25 μm Depending of PS membrane morphology specific applications were developed Si nanostructured membrane can be the required elements to assure: proton conduction for miniaturised fuel cell filter and dosing layer in controlled drug delivery device dielectric / sensing layer in capacitive humidity / gas sensor Porosification process: - electrochemical etching in HF based solution The modifications of process parameters allow us to obtain porous silicon layers with different dimensions of pores / Si fibrils Recent results:

35 Department for converging technologies MIMOMEMS –Centre for RF and Opto MEMS (European Centre of Excellence) NanoScaleLab –Centre for structuring and characterization at the nano-scale NanoBioLab –Centre for biomedical applications of micro- and nanotechnologies

36 Contributii din IMT-Microtehnologie Raluca Muller, director de departament Adrian Dinescu, sef laborator Raluca Gavrila Mihaela Miu Multumim pentru atentie! Contact: Dan Dascalu

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