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FeRAM Roadmap, April 2001 FeRAM Roadmap Heres a newcomer… April 2001 FEP & PIDS WG (Japan) S. Kawamura (Japan FEP)

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Presentation on theme: "FeRAM Roadmap, April 2001 FeRAM Roadmap Heres a newcomer… April 2001 FEP & PIDS WG (Japan) S. Kawamura (Japan FEP)"— Presentation transcript:

1 FeRAM Roadmap, April 2001 FeRAM Roadmap Heres a newcomer… April 2001 FEP & PIDS WG (Japan) S. Kawamura (Japan FEP)

2 FeRAM Roadmap, April 2001 FeRAM Roadmap (version 5.0)

3 FeRAM Roadmap, April 2001 Assumptions 1 Feature Size: 0.35 m expected to be available in early 2002, 0.25 m in x0.7 every 2-3 year. Memory Capacity: Intend to be aggressive to establish FeRAM market. x4 every 2-3 year.

4 FeRAM Roadmap, April 2001 Assumptions 2 Cell Size: planar stack (40% reduction), 2T2C 1T1C (40% reduction). Switching Charge Qsw: Constant V bitline =140mV for sensing. Qsw=C bitline x V bitline. (Stack) Plate Ferro. Film Storage Node (Planar) Storage Node Ferro. Film Plate

5 FeRAM Roadmap, April 2001 FeRAM vs. DRAM Year Capacity (Mb) 3D 1T1C Giga scale integration will be available with a 3D capacitor. Plate Ferro. Film Storage Node

6 FeRAM Roadmap, April 2001 V bitline Estimation Based on DRAM roadmap, V bitline estimated to be 140mV.

7 FeRAM Roadmap, April 2001 Qsw and Capacitor Structure Qsw/2Pr=Required Capacitor Area> Projected Capacitor Size 3D.

8 FeRAM Roadmap, April 2001 In order to enjoy The Silence of the (other) RAMs, Reliability comes first to be focused on. *Ferroelectric materials: Should be stable under thermal budgets. *Fatigue: Some 1E+15 is required to compete with SRAM and DRAM. Issues 1

9 FeRAM Roadmap, April 2001 Application: Limited to small capacity embedded memory. Some killer applications should appear to establish FeRAM market. Cost: Not competitive due to large cell size. 1T1C and 3D capacitor are mandatory to reduce cost. Issues 2

10 FeRAM Roadmap, April 2001 Acknowledgements FEP & PIDS WG (Japan) would like to thank many researchers in this field in Japan: for the basic information and comments to draw up the roadmap, and the United States and Europe: for their useful comments to it.


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