2. Nanoscience, Nanotechnology and Nanomanufacturing Exciting new science and technology for the 21st century

3. Nanotechnology Is a broad, interdisciplinary topic involving physics, chemistry, biology and engineering It has potential impact in electronics, health, energy, materials, and a wide variety of other application areas.

4. How small are nanostructures? Single Hair Width = 0.1 mm = 100 micrometers = 100,000 nanometers ! 1 nanometer = one billionth (10 -9 ) meter

5. Smaller still Hair. Red blood cell 6,000 nanometers DNA 3 nanometers

6. How do we make nanostructures? How do we see nanostructures?

7. First, how do we make nanostructures? Lithography Self-assembly - physical or chemical

8. Lithography Mark Tuominen Mark Tuominen Mark Tuominen

9. Making a microscopic mask Silicon crystal Polymer film Electron Beam Nanoscopic Mask !

10. Lithography IBM Copper Wiring On a Computer Chip Patterned Several Times

11. SELF ASSEMBLY Block A Block B 10% A 30% A 50% A 70% A 90% A ~10 nm Ordered Phases PMMA PS Scale set by molecular size Diblock Copolymer

12. BASIC NANOPOROUS TEMPLATE PROCESS APPLICATIONS Deposition Template Etching Mask Nanoporous Membrane Remove polymer block within cylinders (UV or ebeam exposure; Acetic acid rinse) A versatile, self-assembling, nanoscale lithographic system

13. SEM IMAGE OF NANOPOROUS POLYMER TEMPLATE Array Period = 24 nm Pore Diameter = 14 nm MW = 42,000 PS/PMMA

14. NIRT UMass Amherst FUNCTIONAL NANOARRAYS Glass Pillars Patterned Media Copolymer Template Separations & Sensors Template Transfer Nanowires Devices

15. NANOWIRE ARRAYS using ELECTRODEPOSITION 1.2 trillion wires/in 2 200 nm 20 nm 100 nm silicon gold electrodeposited cobalt nanowires unfilled polymer template cobalt nanowires ULTRA-HIGH DENSITY MAGNETIC DATA STORAGE 1 0 1 1 0

16. unexposed region of copolymer film patterned nanowire array vertically-oriented diblock copolymer film patterned nanoporous polymer template LATERALLY-PATTERNED MEDIA HOLES NO HOLES

17. How do we see nanostructures? A light microscope? An electron microscope! A scanning probe microscope!

18. Television Set eye electron beam TV screen Light ! electron source

19. Electron Microscope SAMPLE Electron Beam DETECTOR

20. Scanning probe microscope Surface Vibrating Cantilever

21. Image of Nickel Atoms

22. Pushing Atoms Around

23. The New UMass Nano Center Hierarchical?

24. Example: google maps Earth -- countries -- states -- cities -- blocks -- houses -- rooms Hierarchical Structures

25. Examples in Nano: Biological Cell and Computer Chip Hierarchical Structures In nanomanufacturing we are integrating "bottom up" self-assembly with "top down" lithography Hierarchical Manufacturing!