Nanoscience, Nanotechnology and Nanomanufacturing Exciting new science and technology for the 21st century
Nanotechnology Is a broad, interdisciplinary topic involving physics, chemistry, biology and engineering It has potential impact in electronics, health, energy, materials, and a wide variety of other application areas.
How small are nanostructures? Single Hair Width = 0.1 mm = 100 micrometers = 100,000 nanometers ! 1 nanometer = one billionth (10 -9 ) meter
Smaller still Hair. Red blood cell 6,000 nanometers DNA 3 nanometers
How do we make nanostructures? How do we see nanostructures?
First, how do we make nanostructures? Lithography Self-assembly - physical or chemical
Lithography Mark Tuominen Mark Tuominen Mark Tuominen
Making a microscopic mask Silicon crystal Polymer film Electron Beam Nanoscopic Mask !
Lithography IBM Copper Wiring On a Computer Chip Patterned Several Times
SELF ASSEMBLY Block A Block B 10% A 30% A 50% A 70% A 90% A ~10 nm Ordered Phases PMMA PS Scale set by molecular size Diblock Copolymer
BASIC NANOPOROUS TEMPLATE PROCESS APPLICATIONS Deposition Template Etching Mask Nanoporous Membrane Remove polymer block within cylinders (UV or ebeam exposure; Acetic acid rinse) A versatile, self-assembling, nanoscale lithographic system
SEM IMAGE OF NANOPOROUS POLYMER TEMPLATE Array Period = 24 nm Pore Diameter = 14 nm MW = 42,000 PS/PMMA
NIRT UMass Amherst FUNCTIONAL NANOARRAYS Glass Pillars Patterned Media Copolymer Template Separations & Sensors Template Transfer Nanowires Devices
NANOWIRE ARRAYS using ELECTRODEPOSITION 1.2 trillion wires/in 2 200 nm 20 nm 100 nm silicon gold electrodeposited cobalt nanowires unfilled polymer template cobalt nanowires ULTRA-HIGH DENSITY MAGNETIC DATA STORAGE 1 0 1 1 0
unexposed region of copolymer film patterned nanowire array vertically-oriented diblock copolymer film patterned nanoporous polymer template LATERALLY-PATTERNED MEDIA HOLES NO HOLES
How do we see nanostructures? A light microscope? An electron microscope! A scanning probe microscope!
Television Set eye electron beam TV screen Light ! electron source
Electron Microscope SAMPLE Electron Beam DETECTOR
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