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Ge 116 Module 1: Scanning Electron Microscopy Part 1: Electron optics, beam- specimen interactions & imaging
What is an SEM? Parts of an SEM: Vacuum chamber and pumps Electron source Electron column: High Voltage Optics Scan coils Stage Detectors Analog or digital display
Electron sources: Filament
Electron sources: Field Emission
Electron sources: Comparison SourceBrightness (A/cm 2 sr) LifetimeSource Size Beam Stability W filament10 5 <100 h >30 m 1% LaB <1000 h >5 m 1% Field Emission 10 8 >1000 h< 30 nm2%
Electron optics Condenser Lenses Apertures Stigmators Scan Coils Objective Lens
Electron Beam Limits Minimum beam diameter ~1 Spherical Aberration Coefficient, ~2 cm Electon DeBroglie wavelength, ~9 pm Probe current Source Brightness
Electron Beam Limits
Beam-Specimen Interactions Elastic –Back-scattered electrons Inelastic –Secondary electrons –Bremsstrahlung X-rays –Characteristic X-rays –Auger electrons Other –Cathodoluminescence –Specimen current
Beam-Specimen Interaction Volume
Increased backscatter yield for inclined specimen surface Horizontal spread of backscatter emission for normal and inclined specimens Locations of secondary electron emission
(b is specimen current image)
Scanning Electron Microscope (SEM) Major components: 1. Vacuum system 2. Electron beam generation system 3. Electron beam manipulation system 4. Beam specimen.
SEM- Schematic Overview. Electron Detection Tungsten Filament Electron Source.
SEM microscope By: Doug, Holly & Oleg. Scanning Electron Microscope vs. Optical Microscope Advantages Continuously variable magnification High resolution.
Electron Microscopy Lab Introduction to scanning electron microscopy The aims of this course are: ● to introduce the principles of scanning electron microscopy.
Lecture-4 Scanning Electron Microscopy What is SEM? Working principles of SEM Major components and their functions Electron beam - specimen interactions.
Optical Microscopy vs Scanning Electron Microscopy m OM SEM Small depth of field Low resolution Large depth of field High resolution radiolarian
Lecture-3 Scanning Electron Microscopy What is SEM? Working principles of SEM Major components and their functions Electron beam - specimen interactions.
Short description Beam parameters influence on image e - gun components filaments lenses Beam-sample interaction electron scattering Image formation Scanning.
The Transmission Electron Microscope Bob Ashley
MENA3100 Scanning Electron Microscopy (SEM) Anders Werner Bredvei Skilbred Harald Fjeld.
Introduction to Electron Microscopy Fundamental concepts in electron microscopy The construction of transmission and scanning electron microscopes Sample.
BY SANTANU PRAMANIK(09369) HITESH KUMAR GUPTA(09320) CHANDAN SINGH(09260) SCANNING ELECTRON MICROSCOPE MATERIAL SCIENCE ASSIGNMENT.
NANO 230 Micro/Nano Characterization Scanning Electron Microscopes 1.
Scanning Transmission Electron Microscope. Outline History Interactions of Electrons Background STEM Components Specimen Preparation Mode Image formation.
Goutam Koley Scanning capacitance microscopy Scanning capacitance technique actually measures the dC/dV signal which is inversely proportional to doping.
Electron Optics Two essential components: 1)Electron source (gun) 2)Focusing system (lenses) Add scanning apparatus for imaging Electron gun Cathode Anode.
Groups: WA 2,4,5,7. History The electron microscope was first invented by a team of German engineers headed by Max Knoll and physicist Ernst Ruska in.
Theory and Operation of a Scanning Electron Microscope Equipped with an Energy Dispersive Spectrometer Scott Chumbley Materials Science and Engineering.
Do it with electrons !. Microscopy Structure determines properties We have discussed crystal structure (x-ray diffraction) But consider now different.
Diffraction methods and electron microscopy Outline and Introduction to FYS4340 and FYS9340.
Confidential Quantrainx50 Module 3.1 Electron Optics place photo here.
SEM Scanning Electron Microscope. Type of electron microscope that produces images of a sample by scanning it with a focused beam of electrons. electron.
Electron Probe Microanalysis EPMA Electron Optical Column UW- Madison Geology 777.
Transmission Electron Microscopy David Stokes 2 DX Workshop University of Washington 8/15-8/19/2011.
Lab meetings Week of 6 October We will use the FEI Quanta FEG-SEM MEB 1555b Objectives –Learn “knobology” of FEI tools –Learn new detectors SSBSE.
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