1. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 1 International Students Summer School Nanotechnologies in materials engineering Warszawa-Koszalin 2006 Fundamentals of vacuum plasma technology for thin films deposition (some aspects)

2. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 2 HV (50)=2600 How the unvisible becomes visible MONO-LAYER MULTILAYER HV (50)=4800 HV (50) = 2800

3. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 3 DETAILS OF MULTILAYER STRUCTURE

4. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 4

5. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 5

6. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 6 Film Substrate Steel ball Substrate Film

7. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 7 CALOTEST

8. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 8

9. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 9

10. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 10

11. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 11

12. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 12

13. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 13 IDEA OF CVD PROCESS

14. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 14 IDEA OF PVD PROCESS

15. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 15 Zasilacz wysokiego napięcia Plazma Pompa Zasilacz łuku Zasilacz polaryzacji podłoży Podłoże Powłoka Pompa Zasilacz elektrody wnękowej Zasilacz polaryzacji podłoży Podłoże Powłoka Pompa Plazma Zasilacz polaryzacji podłoży Podłoże Powłoka Pompa Plazma Zasilacz wysoko- prądowy Zasilacz polaryzacji podłoży Podłoże Powłoka a) b) c) d) Plazma DIFFERENT PVD METHODS

16. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 16 Sposoby trawienia jonowego: a) katodowe, b) z pomocniczą anodą, c) w plazmie metalicznej wyładowania magnetronowego lub łukowego, d) trawienie wspomagane wyładowaniem łukowym, e) z emiterem plazmowym, f) wiązką jonów. ION CLEANING

17. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 17

18. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 18

19. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 19

20. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 20 ARC GUN WITH MECHANICAL IGNITION

21. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 21

22. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 22

23. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 23

24. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 24

25. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 25

26. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 26

27. International Students Summer School Nanotechnologies in Materials Engineering Warsaw - Koszalin 2006 Jan Staśkiewicz jan@vttkoszalin.pl 27