1. Joe Novak

2.  What Is An MZI?  How Does It Work?  Application In Biosensing  Device Production  Thoughts on Research

3.  Mach-Zehnder Interferometer Light based detection via interference

4.  Power split into two equal beams Reference beam Sample Beam  Interference produces power at detector one(constructive) and no power at detector two(destructive)  Introduction of sample causes change in phase of sample beam, resulting in power differences at outputs

5.  Output reduced to a single detector  Light paths of same length  Medium consisting of waveguide materials Power splitter Power combiner Phase shift reference arm  s L Bio-sensing arm

6.  Several factors determine structure size Device Functionality  Mode Selection  Sensitivity Ease of Production  Lithography  Deposition/Etching Si h H W W = 3 μm H = 250 nm H = 20 nm SiO2

7.  Selected materials attach to biological handles  Presence of material changes effective refractive index of sample arm  Phase shift occurs in sample beam Waveguide Surface Functionalization Evanescent Wave

8.  Recombination of sample beam with reference beam reduces power based on amount of phase shift  Observed output capable of inferring the presence of minute amounts of material

9.  Pros Detection by output power rather than fringe patterns Simple production, no moving parts High theoretical sensitivity  Cons Coupling misalignment introduces error Larger waveguide structure increases sensing area but introduces higher order modes

10.  Sensors created on SOI(Silicon On Insulator) wafers  Various Etching, Photolithography, and Deposition steps  Processes utilizing Silicon and Silicon Dioxide have been researched for decades

11. (1) PR application (2) development (3) silicon etching (5) silicon dioxide deposition (6) PR application and development Silicon dioxide silicon PR (4) strip PR (7) silicon dioxide etch

13.  Multidisciplinary benefits Insights and different viewpoints are invaluable  Research Process Simulation and research during design can save months  Determination and endurance Nothing is perfect, setbacks provide experience