1. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 1 Chapter VIIIa Microcrystalline Silicon Solar Cells June 21, 2015June 21, 2015June 21, 2015

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5. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 5 10~20nm nanocrystals

6. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 6 Increasing in silane concentration

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10. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 10 Optical properties Urbach tail

11. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 11 Electronic Transport Properties

12. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 12 I c /(I c + I a )

13. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 13 Doped Layers

14. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 14 Requires a much longer growth time than a-Si:H. Difference between a-Si:H and mc-Si:H

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21. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 21 Optimization of TCO

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25. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 25 Increase in defect density in i layer

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27. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 27 Effect of Oxygen or Dopant contamination on the I layer

28. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 28 Efficiency of a micromorph

29. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 29 Micromorph Tandem Solar Cell

30. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 30 To cope with the degradation of top cell, one can design a cell where the J sc is lower in the microcrystalline bottom cell than in the amorphous top cell.

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32. Department of Aeronautics and Astronautics NCKU Nano and MEMS Technology LAB. 32 Or one can design a thinner top cell to reduce the degradation effect, but adding ZnO layer in between to increase light trapping of the top cell and increase J sc.