1. 2015/6/111 Sequential parylene lift-off process for selective patterning of biological materials Advisor: Cheng-Hsien Liu Reporter: Y. S. Lin Date: 2007/4/18 K. Kuribayashi, Y. Hiratsuka, T. Yamamura and S. Takeuchi Institute of Industrial Science, The University of Tokyo MEMS 2007 p501~504

2. 2015/6/112 Outline Introduction Fabrication Results & Discussion Conclusion

3. 2015/6/113 Introduction Multiple patterning of various types of biological material on the same substrate is an important technical challenge to realize high-throughput and high-sensitive bio- chemical analysis

4. 2015/6/114 Introduction (cont ’ ) Parylene(poly(para-xylylene)) 1.with organic solvents 2.produce arrays on large area with high resolution using standard photolithography 3.easily peel off from the substrate 4.it ’ s transparency

5. 2015/6/115 Fabrication

6. 2015/6/116 Results & Discussion 1 st patterned red dyed lipid was dissolved by the 2 nd organic solution with green dyed lipid and diffused under the parylene sheet due to low adhesion between the parylene sheet and the substrate

7. 2015/6/117 Results & Discussion 1 st patterned red dyed lipid was dissolved by the 2 nd organic solution with green dyed lipid and diffused under the parylene sheet due to low adhesion between the parylene sheet and the substrate

8. 2015/6/118 Results & Discussion

9. 2015/6/119 Results & Discussion

10. 2015/6/1110 Results & Discussion 10μm thick(20mm×20mm)

11. 2015/6/1111 Results & Discussion 10μm thick(20mm×20mm)

12. 2015/6/1112 Results & Discussion Feasibility of Intermediate layer

13. 2015/6/1113 Conclusion This sequential parylene lift-off process provides an efficient and economical method for selective patterning of various types of biological materials The biological materials such as lipid and proteins were patterned on the same substrate in both 2D and 3D configurations