1. Advanced Lithography Soft lithography Imprint lithography
SPM lithography
3D lithography

2. Soft Lithography
Douglas B. Weibel, Willow R. DiLuzio and George M. Whitesides
Nature Reviews Microbiology 5, (March 2007)

3. Contact printing: Patterning of rounded surfaces
Article from IBM J. Res. and Dev.

4. Patterning organic single-crystal transistor arrays
Alejandro L. Briseno, Stefan C. B. Mannsfeld, Mang M. Ling, Shuhong Liu, Ricky J. Tseng, Colin Reese,
Mark E. Roberts, Yang Yang, Fred Wudl and Zhenan Bao Nature 444, (14 December 2006)
OTS: octadecyltriethoxysilane
Organic single crystals on substrates patterned by microcontact printing. The printing uses PDMS stamps with relief features that are inked with a thick OTS film and then pressed onto the substrates. Patterned single-crystal arrays of different organic semiconductor materials.

5. Soft Lithography
Douglas B. Weibel, Willow R. DiLuzio and George M. Whitesides
Nature Reviews Microbiology 5, (March 2007)

6. Micro-Transfer Molding
3-D structures using TM

7. Nano-Imprint Lithography (NIL)
Hot embossing
UV-curable
~20 nm holes
Imprint of sub-25 nm vias and trenches in polymers
Chou, S.Y. (Dept. of Electr. Eng., Minnesota Univ., Minneapolis, MN, USA); Krauss, P.R.; Renstrom, P.J. Source: Applied Physics Letters, v 67, n 21, 20 Nov. 1995,

8. Nano-Imprint Lithography - UV curable
Patterned polyset epoxy siloxane using UV-NIL

9. Fabrication of NIL template

10. AFM Lithography - Scratching
Scratching
Tip is scanned over substrate with strong loading force, leaving behind trenches
Direct patterning of substrate or patterning of resist
Scratch lithography on blood cell
Scratch lithography on polycarbonate

11. AFM Lithography - Dynamic Plowing
Indenting of surface with vibrating tip
Surface is machined in three dimensions
Poem writtenn in PMMA using dynamic plowing. Storage capacity greater than a compact disk

12. AFM Lithography - Anodic Oxidation
Anodic Oxidation
Applying voltage between tip and metallic surface in wet environment
Tip and the surface interact electrochemically as anode and cathode correspondingly.
Oxide will grow on the point right under the tip
AFM image of a Ti/TiOx barrier. The image shows the 70nm wide metallic wire(black), defined by AFM induced oxide, and the barrier.
Local Anodic Oxidation (LAO) of perovskite oxides

13. AFM Lithography - STM Lithography
STM Lithography
Pulsing current causes sample to melt and evaporate under tip
STM lithography on Langmuir-Blodgett film