1. The removal of surface atoms due to energetic particle bombardment
Sputtering
The removal of surface atoms due to energetic particle bombardment

2. Sputtering

3. Sputtering First observations of cathode erosion in gas discharges
W.R. Grove 1853

4. Sputtering
Removal of surface material as a result of energetic particle bombardment.
First observations: W.R. Grove 1853, J.P. Gassiot and M. Faraday 1854, J. Plücker Useful for thin film coating?
First systematic studies: W. Crookes 1891, G. Granquist Independent of target temperature.
J. Stark 1908, Hot spots? Binary elastic collisions?
Cosine emission distribution R. Seeliger Rules out the collision theory?
Crystal structure effects, G.K. Wehner Collisions back in. Sputtering yields always decrease at high energy : 1/E.
Linear collision cascades, relation to nuclear stopping power, J. Lindhard et al. 1963, J. Davies et al P. Sigmund
BCA Monte Carlo, MARLOWE, TRIM. M.T. Robinson 1974, J. Biersack and J.F. Ziegler 1974
Applications in semiconductor industry, coating industry, surface analysis, fusion plasma physics and and space physics

5. Sputter deposition
DC- and RF sputter deposition is a convenient and inexpensive coating
Technique.

6. Sputter deposition
Magnetron sputter deposition is very widely used and allows low pressure
discharge, high coating quality and fast deposition

7. Secondary Ion Mass Spectrometry (SIMS)

8. Secondary Ion Mass Spectrometry (SIMS)
JET divertor
Elemental mapping by static SIMS
J.P. Coad et al.
J. Nucl. Mater
(2007)

9. Sputtering

10. Sputtering yield measurements

11. Sputtering yield measurements

12. Sputtering yield measurements
Yield energy dependence.
Ejection angle distribution,
B. Emmoth, H. Bergsåker et al 1989, 1990

13. Sputtering
Velocity distribution of sputtered atoms, measured by laser induced fluoresence.
W. Husinsky et al. 1986

14. Sputtering Energy distribution of sputtered
Tungsten atoms and tungsten
clusters.
G. Staudenmaier 1984

15. Crystal structure effect in Sputtering
Single crystal effects in sputtering, G. K. Wehner, Phys. Rev. 102(1956)

16. Non linear Sputtering yield with heavy ions
evidence of spikes . H.H. Andersen and H. Bay 1974

17. Three different regimes for theory
Single knock-on regime
Linear cascade regime
Spike regime

18. Nuclear stopping power

19. Electronic stopping power

20. Results from linear cascade theory
The linear cascade regime theory got its semi-final form from
P. Sigmund, 1969

21. Monte Carlo calculations
TRIM , J.P. Biersack and W. Eckstein MARLOWE

22. Monte Carlo calculations
Molecular dynamics, C. Erginsoy et al 1964

23. Monte Carlo calculations
TRIM

24. A simple plasma impurity model

25. Sputtering in fusion devices

26. Sputtering in fusion devices
Impurity fluxes in TEXTOR
I. Gudowska, H. Bergsåker et al.
J. Nucl. Mater (1990)363

27. Conclusions
Sputtering by particle bombartment has been observed since 150 years. Apart from being a nuisance in many technical systems it alöso has a wide range of useful applications.
Physical sputtering is well understood today, especially in the linear cascade regime. Monte-Carlo methods are very useful in the single-knockon regime and with special boundary conditions.
Physical sputtering is a central physical phenomenon in fusion devices. For plasma modeling Monte Carlo codes and semi-empirical fits are used and give satisfactory results.