1. Ch. 12 Filter Installation Leak Testing

2. HEPA test Manufacturer's factory and packed  OK Unpacked and fitted into the filter housings  maybe damage Leakage problems –casing –housing Testing : artificial test aerosol

3. Leakage areas in a HEPA filter A - filter paper-to-case cement areaC- gasket D - frame joints.B - filter paper (often at the paper fold)

4. Gasket leaks from filters inserted down from ceiling Gasket and casing leaks from filter inserted up from cleanroom

5. Figure 12.4 Filter-housing gel seal method

6. Artificial Smoke and Particle Test Cold-generated oils –Di-octyl phthalate (DOP) 鄰苯二甲酸二辛酯 oily liquid, potentially toxic effects, no longer used –Di-octylsebacate (DOS) 葵二酸二辛酯 常用 –poly alpha olefin (PAO) 聚烯茎油 常用

7. Cold-generated oil Test Laskin nozzle air (high pressure) oil Air+ oil particle 0.5  m Air pump

8. Hot generated smokes Evaporation chamber inert gas: CO 2 oil oil smoke aerosol condense vaporize 0.3  m

9. Hot oil smoke generator

10. Semiconductor manufacturing 'outgassing' chemical products harmful to filter 使用 Polystyrene Latex Spheres (PLSs) 聚苯乙烯乳膠球 (0.1 ~ 1  m)

11. Apparatus for Measuring Smoke Penetration Photometer 光度計 –28 1/min (1 ft3/min) of airborne particles –particles refract the light –electrical signal –concentration: between 0.0001 μg/1 and 100 μg/1.

12. Single particle counters –sample a volume of air and this is collected in a set time

13. Methods of Testing Filters and Filter Housings Scanning methods –a probe with a photometer, or single particle counter, –Scan speed : not more than 5cm/s –leaks : media, filter case, its housing –The most common leaks: around the periphery of the filter the casing-to-housing seal, the casing joints

14. Repair of leaks Filter media leak –at the fold of the paper –repaired on site with silicon replaced replaced