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FAB VALARIE WELSH CO-OP PRESENTATION FOR KODAK ISS.

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Presentation on theme: "FAB VALARIE WELSH CO-OP PRESENTATION FOR KODAK ISS."— Presentation transcript:

1 FAB VALARIE WELSH CO-OP PRESENTATION FOR KODAK ISS

2 PROJECTS START UP OF SVG 1 IDLE TIME STUDY FILTER FLOW EXP (DOE) DI SUPPLY DIAGRAMS OTHER

3 START UP OF SVG1 EXPLORE TRACK MECHANISM IDENTIFY PARTICLE ISSUE EXPERIENCE POINTS TO IDLE TIME IDLE TIME EXP

4 SVG TRACK PARTICLES PR CRATERS RESIST RESIDUE ADD ON PARTICLES SCRATCHES OVAL/CIRCLES

5 IDLE TIME EXP RESULTS

6 CONCLUSIONS ABOUT IDLE TIME

7 TRACK PARTICLE ELIMINATION IS NOT JUST A FUNC OF IDLE TIME MINIMAL IDLE TIME IS DESIRED TRACK SHOULD PURGE AFTER 1 HOUR

8 SVG1 STARTUP BEGAN WITH NON CRIT LEVEL EXP ECN AND GREW TO FULL PROCESS CAPABILITY IN ONE ROOM INCREASED WORKCENTER CAPACITY BY 33 LOTS PER DAY ALL LITH PROCESSING STEPS ON THE FIRST FLOOR

9 RINSE EXPERIMENT BASED ON DEFECTS CONCLUDE RESIST DAMAGE EXPERIENCE ISOLATES RINSE MECHANISM EXPLORE FACTORS AFFECTING RINSE

10 POSSIBLE FACTORS: WAFER TEMP BOWL COVER O/F BAKE COVERS O/F DEV DISP. TIME DI DISP. TIME SPIN SPEEDS DEV DISP. POS. DI DISP. POS. BACKSIDE RINSE O/F DI DISP. PRESSURE TRACK IDLE TIME IMPACT POINT BUFFER WAFERS HISTORICAL DATA ELIMINATED SOME FACTORS OTHERS COULD NOT BE RIGOROUSLY MEASURED SOME COULD NOT BE CONTROLED

11 FACTOR CHOICES THEORY THAT RESIST DAMAGE IS PURELY MECHANICAL S1 : 6.2 S5: 5.9 S1: 2.1 S5:

12 FACTORS STUDIED DI DISP. TIME DI DISP. HEIGHT IMPACT POINT RINSE SPIN SPEED DI DISP. FLOW*

13 CONCLUSIONS ABOUT RINSE THESE ARE STATISTICALLY DISPUTABLE: IMPACT POINT IS SIGNIFICANT FACTOR FLOW IS ALSO A SIGNIFICANT FACTOR ALTHOUGH NOT STUDIED

14 DI SUPPLY DIAGRAMS POTENTIAL CONTAMINATION SOURCES DOCUMENTATION COMPARISON

15 SVG 1 DI SUPPLY COMPONENTS

16 SVG 1 & 2*

17 OTHER PROJECTS CHANGED DI DISP POS. ON SVG2 DATA COLLECTION FOR J ANDRUS PROCESS SUPPORT THROUGH SVG 5 “CRISIS” RESPONSIBILITY FOR DAILY QUAL

18 SUMMARY START UP OF SVG 1 IDLE TIME STUDY FILTER FLOW EXP (DOE) DI SUPPLY DIAGRAMS OTHER

19 ACKNOWLEDGEMENTS OPERATIONS STAFF IN LITH WORKCENTERS BRIAN HANDEL JOE SUMMA & ENGINEERS DAN FULLERTON & BRIAN HARDING ERIC PREY ANDREW WELSH


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