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Permanent-magnet helicon sources for etching, coating, and thrust Francis F. Chen, UCLA Low Temperature Plasma Teleseminar, June 14, 2013; originally prepared for (but not given at): 2013 Workshop on Radiofrequency Discharges, La Badine, La Presqu’ile de Giens, France, 29-31 May 2013

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Helicons are RF plasmas in a magnetic field UCLA Density increase over ICP

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Helicon sources usually use heavy magnets UCLA The MØRI source of Plasma Materials Technologies, Inc.

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UCLA Size of the MØRI source

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UCLA The source has been simplified to this This uses a commercially available 2 x 4 x 0.5 inch NeFeB magnet The discharge is 5 cm high and 5 cm in diameter

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UCLA How did we get here? D. Arnush, Phys. Plasmas 7, 3042 (2000). First, the HELIC code of Arnush

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Examples of HELIC results: P r, P z UCLA

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Most important, RnB: power deposition UCLA

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RnB results organized in matrices UCLA Matrix A: B-field Matrix C: pressure Similar matrices for tube size determined the tube design. After that, there are matices for the experimental results.

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Optimized discharge tube: 5 x 5 cm UCLA 1. Diameter: 2 inches 2. Height: 2 inches 3. Aluminum top 4. Material: quartz 5. “Skirt” to prevent eddy currents canceling the antenna current The antenna is a simple loop, 3 turns for 13 MHz, 1 turn for 27 MHz. The antenna must be as close to the exit aperture as possible. Antenna: 1/8” diam tube, water-cooled

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Design of matching circuit (1) UCLA

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Design of 50 matching circuit (2) UCLA Let the load be R L + jX L : R and X have first to be transformed by cable length k = R 0 C, R 0 = 50

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Forbidden regions of L, R, and Z (N = 8) UCLA

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Instead, we can use annular PMs UCLA NdFeB ring magnet 3” ID, 5” OD, 1” high Stagnation point Put plasma here or here, to adjust B-field The far-field is fairly uniform PM Permanent magnet

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Experimental chamber UCLA Langmuir probes at three ports The magnet height is set for optimum B- field

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UCLA Optimization of the B-field Peak density in Port 2 vs. B and Prf @ 27 MHz 30-60 G is best

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UCLA Typical scan of “Low-field peak”

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UCLA Density of ejected plasma

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Vertical probe for inside plasma UCLA

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Axial density profile inside the tube Density inside the tube is low (<1013 cm-3) because plasma is efficiently ejected.

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UCLA Downstream density: 6 x 10 11 cm -3 Density increase over ICP

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UCLA Port 2 density is higher at 13 MHz This was a surprise and is contrary to theory.

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Cause and location of the “double layer” F.F. Chen, Phys. Plasmas 13, 034502 (2006) Maxwellian electrons Bohm sheath criterion A sheath must form here Single layer forms where r has increased 28%

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UCLA Where a diffuse “double layer” would occur

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Ion energy distribution by Impedans SEMion UCLA

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IEDFs vs. P rf in Port 1 UCLA VsVs

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Conditions at Port 1 (r = 0) at 400W UCLA TeTe eV s iV s n 11 2.1415.9274.21 Plasma potential

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Mach probe (in Port 2) UCLA Hutchinson: Result: This seems very low. It should be much higher in Port 1

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UCLA helicon ARRAY sources MEDUSAMEDUSA 1

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The Medusa 2 large-area array UCLA

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An array source for roll-to-roll processing UCLA Probe ports Aluminum sheet Height can be adjusted electrically if desired The source requires only 6” of vertical space above the process chamber. Two of 8 tubes are shown. Z1 Z2

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Top view of Medusa 2 Possible positions shown for 8 tubes. Substrate motion

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Two arrangements of the array Staggered array Covers large area uniformly for substrates moving in the y-direction Compact array Gives higher density, but uniformity suffers from end effects.

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Operation with cables and wooden magnet tray It’s best to have at least 3200W (400W per tube) to get all tubes lit equally.

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Details of distributor and discharge tube UCLA The top gas feed did not improve operation.

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A rectangular 50 transmission line 50- line with ¼” diam Cu pipe for cooled center conductor

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Operation with rectangular transmission line

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Radial profile at Z2 across rows

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Density profiles with staggered array Staggered configuration, 2kW Bottom probe array Argon

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UCLA Density profiles with compact array Compact configuration, 3kW Bottom probe array Data by Humberto Torreblanca, Ph.D. thesis, UCLA, 2008.

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Plans for an 8-tube array for round substrates UCLA No center tube is necessary!

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