Presentation on theme: "Comparative Study of Diamond- like Carbon Films Deposited from Different Hydrocarbon Sources Se Jun Park, Kwang-Ryeol Lee Future Technology Research Division."— Presentation transcript:
Comparative Study of Diamond- like Carbon Films Deposited from Different Hydrocarbon Sources Se Jun Park, Kwang-Ryeol Lee Future Technology Research Division Korea Institute of Science and Technology The International Conference On Metallurgical Coatings And Thin films ICMCTF 2006
Impact Energy (eV) 1 10 100 1000 Hydrocarbon Source Dense Hydro- Carbon PolymerLikeCarbon Plasma Polymers Energy Ion Source Cold Substrate The Effect of Ion Energy on the Structure of DLC Films Graphitic Carbon
Hydrocarbon Source for DLC Film CH 4 (Alkane) C 6 H 6 (Aromatic) C 6 H 14 (Alkane) C 2 H 2 (Alkyne)
Previous Works A. Grill et al. DRM (1993) 2 1519 High mean ion energy High free H to C ratio High Stress acetylene methane cyclohexane acetylene
Previous Works K.-R. Lee et al. Diamon.Rel.Mater. 1994(3) 1230 Methane (CH 4 ) Benzene (C 6 H 6 ) CH 4 : CH 5 + or C 2 H 5 + C 6 H 6 : C 6 H 6 + Difference of
Motivation C 6 H 6 (Aromatic) C 6 H 14 (Alkane) Same carbon atom numbers Different hydrocarbon structure ?
Purposes of Present Work To characterize DLC films from the hydrocarbon source of the different structure Hexane (C 6 H 14 ) : Alkane structure Benzene (C 6 H 6 ) : Aromatic structure To find the relation between the properties of DLC films and the structure of hydrocarbon source
Deposition Condition RF PACVD(13.56 MHz) Precursor Gas : C 6 H 6, C 6 H 14 Deposition Pressure : 1.33 Pa Bias Voltage : - 200 - 800 V Substrate : P-type (100) Si-wafer Film Thickness : 500 nm
Dependence of properties of DLC film on precursor gases Methane (CH 4 ) K.-R. Lee et al. Diamon.Rel.Mater. 1994(3) 1230 Hexane (C 6 H 14 ),Benzene (C 6 H 6 )
Conclusions The structure and properties of DLC films were strongly dependent on the precursor gases. Energy per mass of ion was the main factor to determine the properties and structure of DLC films As the average ion energy increased, properties of DLC film deposited from the hydrocarbon sources in same functional group showed similar dependence on ion energy.