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Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films Richard Sandberg Shannon Lunt, Elke Jackson, Kristi Adamson, Ross Robinson, Guillermo Acosta,

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Presentation on theme: "Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films Richard Sandberg Shannon Lunt, Elke Jackson, Kristi Adamson, Ross Robinson, Guillermo Acosta,"— Presentation transcript:

1 Cleaning of Hydrocarbon Buildup on Metallic-oxide Thin-Films Richard Sandberg Shannon Lunt, Elke Jackson, Kristi Adamson, Ross Robinson, Guillermo Acosta, Nick Webb, Mike Dheil, Luke Bissell

2 Purpose: Will the Opticlean polymer remove hydrocarbon? Does this cleaning process damage our thin films? Outline 1. Sample Creation &Contamination rate 2. Effects of hydrocarbon “goo” buildup 3. Opticlean Process 4. Opticlean Residue 5. Damage to thin films 6. Removing Opticlean Residue 7. Conclusions

3 Sample Creation & Contamination Rate  Creation in vaccum chamber RF Sputtering Evaporation  Rates Goo Thickness (Ǻ) Action Performed Elapsed Time (Hrs) 21Open Air Touch fingersInstantaneous 10Dipped in WaterInstantaneous

4 Reflectivity Effects With Goo Thickness

5 Opticlean Process Opticlean Residue Opticlean significantly removes goo, but leaves a residue Ellipsometric Results Goo thickness on two runs: 1.17 Anstroms Anstroms

6 Thin Film Damage  Scanning Electron Microscope with EDAX showed no thin film damage  X-Ray Photoelectric Spectroscopy found no metal traces

7 Scanning Electron Microscope with EDAX

8 X-Ray Photoelectric Spectroscopy

9 Conclusions Subsequent removal of Opticlean residue with plasma etch Conclusion: Opiclean a very effective way to remove hydrocarbon buildup 1.Sufficiently removes goo 2.Does not damage the surface of thin film samples


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