Overview MLD: Technology and principle Opportunities and challenges Applications Summary 2
MLD: Technology and principle (1/2) In short: ALD, but with molecules (Generally) self-limiting reactions Solution-based and gaseous phase techniques Hybrid technology with ALD to create ALD-MLD films 3
MLD: Technology and principle (2/2) Basic cycle: Fill chamber with inert gas to purge atmosphere of foreign particles Replace with desired gaseous reactant Substrate surface will react with gaseous reactant until all of surface is covered One layer of desired material is deposited Repeat from the top, changing reactants for different materials 4  p.534
Opportunities and challenges Organic component increases flexibility, decreases density and can reduce cost Structural benefits from hollow/cavernous structures for catalysts (after removing organic constituent) Wide range of possibilities (metal + organic molecule) Issues with even growth per cycle, due to molecule geometry 5 : p.539
Applications Widest research area so far: metalcones (metal+alcohol) Al, Zn, Zr, Hf, Mg, Sn, In, Ti, V, Mn are all viable metals for metalcones Organic component: Ethylene glycol, Glycerol, Hydroquinone Zincones can be used for flexible transparent conductive displays Titanicone structures can be utilized in solar cells Porous films can act as catalysts or sensors (Sn, In, V, Mn) MLD also used to coat fine particles (passive or active) 6
Summary MLD: In essence ALD, but with organic molecules Self-limiting surface reactions Stackable with ALD for organic-inorganic composite films Main benefits in flexible and lightweight structures Tuneable thin-film structural composition 7
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