Presentation is loading. Please wait.

Presentation is loading. Please wait.

Who are we? Charged Particle Optics Group. What we want 1. pattern dimensions: nm-scale single atom! 2. any material.

Similar presentations


Presentation on theme: "Who are we? Charged Particle Optics Group. What we want 1. pattern dimensions: nm-scale single atom! 2. any material."— Presentation transcript:

1 Who are we? Charged Particle Optics Group

2 What we want 1. pattern dimensions: nm-scale single atom! 2. any material

3 Electron beam induced deposition

4 Muller, 1971 Urban 1997 Koops What do people do with EBID? Intel, 2005

5 Our approach (nm-sized patterns & any material) simulation EBID experiments surface science Rutgers Univ. Howard Fairbrother, Johns Hopkins Univ.

6 Our approach (nm-sized patterns & any material) modelling EBID experiments surface science Rutgers Univ. Howard Fairbrother, Johns Hopkins Univ. our simulation: <1 nm! literature: >15 nm EBID resolution transmission electron microscope

7 W(CO) 6 dr. Peter Crozier, Arizona State University

8 Results of 9 Smallest dots: 0.7 nm in diameter

9

10 Poisson distributions Deposit mass distributions Volume per λ: 0.4 nm 3 Volume of W(CO) 6 molecule: 0.22 nm 3

11 Our approach (nm-sized patterns & any material) modelling EBID experiments surface science Rutgers Univ. Howard Fairbrother, Johns Hopkins Univ. our simulation: <1 nm! literature: 15 nm EBID resolution transmission electron microscope TPD experiments XPS, RAIRS, MS Better understanding: dissociation mechanism

12 methylcyclopentadienyl – platinum - trimethyl

13 Step 1. Cool Au sample to ~120 K and expose to precursor gas. gas nozzle Step 2. Heat in front of QMS while the QMS monitors m/z = 289

14 Step 1. Cool Au sample to ~120 K and expose to precursor gas. gas nozzle Step 2. Heat in front of QMS while the QMS monitors m/z = 289

15 Step 1. Cool Au sample to ~120 K and expose to precursor gas. gas nozzle Step 3. Heat in front of QMS while the QMS monitors m/z = 289 Step 2. Irradiate with electrons (broad beam) e-gun

16 Dissociative electron attachment Dipolar dissociation Direct ionization

17 Thanks!


Download ppt "Who are we? Charged Particle Optics Group. What we want 1. pattern dimensions: nm-scale single atom! 2. any material."

Similar presentations


Ads by Google