Presentation is loading. Please wait.

Presentation is loading. Please wait.

RMS VISION SYSTEMS Innovative Solutions for the Semiconductor Industry Application Note: CD Measurement for FET Features NGS 3500 Advanced Metrology System.

Similar presentations


Presentation on theme: "RMS VISION SYSTEMS Innovative Solutions for the Semiconductor Industry Application Note: CD Measurement for FET Features NGS 3500 Advanced Metrology System."— Presentation transcript:

1 RMS VISION SYSTEMS Innovative Solutions for the Semiconductor Industry Application Note: CD Measurement for FET Features NGS 3500 Advanced Metrology System

2 RMS VISION SYSTEMS Innovative Solutions for the Semiconductor Industry CONFIDENTIAL CD Measurements

3 RMS VISION SYSTEMS Innovative Solutions for the Semiconductor Industry CONFIDENTIAL Image Data Set Notes:  20 High Resolution Images of the same site were used in the repeatability test  Wafer was slightly moved between measurement to create realistic positional and focus variation  No vibration isolation or special fixture was used in the test

4 RMS VISION SYSTEMS Innovative Solutions for the Semiconductor Industry CONFIDENTIAL Data Summary – CD Measurement Notes: Gate Width was calibrated as 0.5 um. Other measurements were not calibrated. Optics: 100x Objective (FOV ~ 90um x 75 um) Camera: High-Res. Color camera with um/ pixel n < 0.01 micron Repeatability n 4 seconds Processing Time (80 measurements)

5 RMS VISION SYSTEMS Innovative Solutions for the Semiconductor Industry CONFIDENTIAL Chromatic Edge Contrast Technology * * Patent Pending  This technology based on wavelength detection enables much better resolution for optical CD measurement. Resolutions below 10 nm are possible with standard optical microscopy.  The edges are very sharp based on wavelength contrast. Due to optical resolution limit, the same edge is blurred with noise and low contrast when light intensity (B&W) information is used.


Download ppt "RMS VISION SYSTEMS Innovative Solutions for the Semiconductor Industry Application Note: CD Measurement for FET Features NGS 3500 Advanced Metrology System."

Similar presentations


Ads by Google