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TMS Co., Ltd 2014. 07. 18.. Vacuum GAUGE Vacuum Gauge Selection.

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Presentation on theme: "TMS Co., Ltd 2014. 07. 18.. Vacuum GAUGE Vacuum Gauge Selection."— Presentation transcript:

1 TMS Co., Ltd

2 Vacuum GAUGE

3 Vacuum Gauge Selection

4 Digital Vacuum Gauge Controller (for 345) Digital Vacuum Gauge Controller (for 345) 1.0 x to 100 Torr PIRANI GAUGE Set Point Response : 150 msec maximum Output Voltage: 0.20 to 3.25 VDC, buffered analog, 1kW maximum output impedance Standard Pirani SensorConvection Pirani Sensor 1.0 x to 1.0 x Torr Analog Output 0.33 to 5.63 VDC, buffered analog 1kΩ maximum output impedance

5 MICROPIRANI™ / PIEZO LOADLOCK TRANSDUCER Measuring Range-절대값, 차압 모두 측정 -- Loadlock chamber에 사용가능 Absolute 1.0 x 10-5 Torr to 1500 Torr Differential -760 to +760 Torr Analog Output 1~9VDC RS232/485통신 Series 901P PIRANI GAUGE 925 MICROPIRANI™ TRANSDUCER ;Mems thermal conductivity 측정영역: from 10-5 Torr to atmosphere Analog output 1~9VDC RS232/485통신 일반 측정용 피라니 게이지 Foreline, Roughing펌핑라인에 사용 Gas backfilling 측정/제어 Pirani Sensor-통신,analog output

6 Cold Cathode Gauge Series 903 측정Range: 3.0 x to 5.0 x 10-3 Torr 1 relay set point 있음. Linearized analog output : 1.5 to 8.7 VDC INVERTED MAGNETRON TRANSDUCER COLD CATHODE SENSOR 943 Controller 측정 Range :1.0 x to 1.0 x 10-2 Torr 두개의 독립적 set point 421 sensor UHV use 동작온도 : 0~125도 423 I-Mag® Sensor 저가형 산업용 등 동작온도: 0~70도

7 937B, 317, 422 UHV Vacuum Gauges for Accelerator Physics(가속기) 937B Digital Combination Vacuum Gauge system 6개 sensor까지 장착 Cold cathode, Hot cathode standard Pirani(345), Convection Pirani (317) Baratron Capacitance manometer, abs Piezo sensor(902) 317 ATM ~ 1×10 -3 Torr 250도까지 Bakeout Radiation resistant 422 Inverted magnetron ~ Torr 250도까지 Bakeout (동작중에) Radiation resistant optional field emitter for improved UHV starting times LEMO connector for easy interchange of cables

8 High Accuracy Gauge in High Vacuum SPINNING ROTOR GAUGE SYSTEM SRG-3 높은 정확도 장기간 안정성


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