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TECHNISCHE FAKULTÄT DER CHRISTIAN-ALBRECHTS-UNIVERSITÄT ZU KIEL Not necessary but nice All comments will appear in this cloud.

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Presentation on theme: "TECHNISCHE FAKULTÄT DER CHRISTIAN-ALBRECHTS-UNIVERSITÄT ZU KIEL Not necessary but nice All comments will appear in this cloud."— Presentation transcript:

1 TECHNISCHE FAKULTÄT DER CHRISTIAN-ALBRECHTS-UNIVERSITÄT ZU KIEL Not necessary but nice All comments will appear in this cloud

2 In-Situ Assessment of Macropore Growth in Low-Doped n-Type Silicon J. Carstensen, A. Cojocaru, M. Leisner, and H. Föll University Kiel; Germany 2. Persistent Pore Problems 3. Multi-Mode in-situ FFT IS 4. Theory and Results 1. Introduction 5. Conclusions What In-Situ Multi-Mode FFT Impedance Spectroscopy Can Do for You Good

3 In-Situ Assessment of Macropore Growth in Low-Doped n-Type Silicon J. Carstensen, A. Cojocaru, M. Leisner, and H. Föll University Kiel; Germany 2. Persistent Pore Problems 3. Multi-Mode in-situ FFT IS 4. Theory and Results 1. Introduction 5. Conclusions What In-Situ Multi-Mode FFT Impedance Spectroscopy Can Do for You Not so good! Note change in title!

4 1. Introduction 1990 Lehmann and Föll: Discovery of “n-macro(aqu, fsi) pores” (while trying to characterize solar Si) “SCR theory” Lehmann Model n-macro(fsi. aqu) “Pores” This picture started it all! Good

5 1. Introduction 1990 Lehmann and Föll: Discovery of “n-macro(aqu, fsi) pores” (while trying to characterize solar Si) “SCR theory” Lehmann Model n-macro(fsi. aqu) “Pores” This picture started it all! Not so good

6 1. Introduction 1990 Lehmann and Föll: Discovery of “n-macro(aqu, fsi) pores” “SCR theory” Prediction: n-macro(aqu, bsi, litho) pores Lehmann model works !!! First Si Macropores Note trick with “veiled” text from before and full picture from before

7 1. Introduction 1990 Lehmann and Föll: Discovery of “n-macro(aqu, fsi) pores” “SCR theory” Lehmann model works?? 532 µm 325 min Only up to a point „Mode Transition“ Talk „Fast Pore Growth“ Talk n-macro(aq, bsi) pores Lead up to the high point!

8 1. Introduction Lehmann Model: Main parameter for pore growth is hole supply Limitations:Model does not address: Chemistry:n-macro(org. electrolytes) n-macro(HAc. Electrolyte) Crystallography: and Pores “Curro” Pores Mode Transitions:Crysto - Curro transition Self-Organization:Diameter oscillations Current response: Diameter, transitions Depth(t):Growth mode transitions Here going point by point makes sense- Leads up to major point at the end

9 1. Introduction Lehmann Model: Main parameter for pore growth is hole supply Limitations:Model does not address: Chemistry:n-macro(org. electrolytes) n-macro(HAc. Electrolyte) Crystallography: and Pores “Curro” Pores Mode Transitions:Crysto - Curro transition Self-Organization:Diameter oscillations Current response: Diameter, transitions Depth(t):Growth mode transitions Too much now, because you are spending time on each item. You will now loose your audience. They are all trying to figure out what all the text might mean.

10 Where are the promised products ? 2. The Problems Electrodes for Micro Fuel Cells Lead filaments X-ray filter Note change in color in the title part. Takes up the color from introduction. Not important, but helps to organize your thoughts. Provoke! See how annoying these “moving-in” options are?

11 5. Conclusion Multi-Mode in-situ FFT IS works Modelling allows to extract a wealth of data relevant for pore growth Scrutinizing and interpreting these data will lead to a better understanding of pore growth in semiconductors Conclusion = The Message!


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