Oxford Instruments Oxford Instruments is a global company operating since 1959 with offices and manufacturing sites in over 25 locations. Oxford Instruments Head Office Tubney Woods, Abingdon, Oxfordshire, OX13 5QX, UK.
Picosun Picosun is an international equipment manufacturer with a world-wide sales and service organization. Has continuously designed ALD systems since Headquarter: Picosun Oy Tietotie 3 FI Espoo Finland
Beneq Beneq was established in May 2005 Activity is focused on equipment and technology for functional coatings Main office: Beneq Oy P.O. Box 262 FI Vantaa Finland
Supplier: Beneq Oy Close partnership Long experience with their equipement in our clean room Our old ALDs don’t have a standard PEALD option Easy communication Easy delivery = lower costs
Beneq TFS 200 for research Direct and remote PEALD Growth of various films possible Price 303,600 € for TaN growth
Budget TFS 200 system for TaN growth: 303,600 € Vacuum pump, other appliances and installation costs: 30 k€ Additional sources: 6900 – € each Operating costs: 20 k€ / year