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Capacitive-Resistive Spacers by ALD Jeffrey Elam, Qing Peng, Anil Mane, Joe Libera Argonne National Laboratory May 4, 2010
Capacitive-Resistive Spacers 2 Spacers C and R are provided by spacers between detector elements
ALD spacers 3 Use Incom capillary array as substrate for ALD – high surface area to achieve high capacitance start with small disc of Incom array D=5 mm (e.g.)
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