Presentation on theme: "Pre-stresses Influence on a Micro Mirror Structure."— Presentation transcript:
Pre-stresses Influence on a Micro Mirror Structure
Introduction The purpose of the model is to exemplify the use of pre- stresses in plated metal layers in order to create a desired lift-off of a MEMS structure The model shows the use of the Initial Stresses feature in the Structural Mechanics Module
Model Geometry Cantilever beams as support Two-layers of plating Mirror
Problem Definition Loads: –Pre-stresses of different signs but equal in magnitude for the upper and lower layer of the cantilevers Constraints: –Cantilevers constrained in all directions at the free end surfaces Materials –Alternative 1: Aluminum for both mirror and beams –Alternative 2: Aluminum for beams, stainless steel for mirror
Conclusions The model shows that the curvature of the mirror and the lift-off from the substrate is substantially larger for aluminum Steel gives a flatter mirror surface The model can be quickly set-up and solve the COMSOL Multiphysics’ Structural Mechanics Module
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