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Published byQuinten Craton Modified about 1 year ago

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1 Granite table 1000×1500×500, 2.2tons CFRP SUS Channel 100x50 → 150x75 Level Jack < 5000kg Dec. 04,’03 KEK H. Yamaoka

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2 FEM Model ・ Thermal Effect(±1 ℃ ) ・ Deformation due to self-weight ・ Resonant frequency ・ P.S.D

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3 Thermal Effect(±1 ℃ ) CFRP SUS Granite SUS SUS Granite CFRP Young’s modulus(kg/mm 2 ) : 2.1× × ×10 4 Density(×10 -6 kg/mm 3 ) : Thermal expansion coeff.(×10 -6 / ℃ ):

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4 P2 = -6 m P1 P2 P1-P2 = 0.23 m Self-weight P1 P2 P2 = +11 m P1-P2 = 4.3 m Self-weight + +1 ℃ P2 = -23 m P1-P2 = 3.8 m Self-weight + -1 ℃ CFRP SUS Granite SUS P2 = +16 m P1-P2 = 4.1 m P1 P2 +1 ℃ P2 = -16 m P1-P2 = 4.1 m -1 ℃

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5 CFRP→ GFRP or Alumina(Ceramics) SUS Granite SUS → GFRP or Alumina(Ceramics) GFRP Alumina Granite Young’s modulus(kg/mm 2 ) : 4.5× × ×10 4 Density(×10 -6 kg/mm 3 ) : Thermal expansion coeff.(×10 -6 / ℃ ): 7, Alumina ceramics, most widely used material among fine ceramics, has same sintered crystal structure (Al 2 O 3 ) as Sapphire and Ruby. Its application is widely used due to its superb properties such as high insulation, high strength, high wear-resistance and chemical resistance.

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6 Difference(P1-P2) Side plate SUS Granite Base plate Ref. bar Unit: m P1P2

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7 P2 = -4.5 m P1P2 P1-P2 = 0.18 m P2 = +13 m P1-P2 = 0.09 m P2 = +9 m P1-P2 = 0.3 m Self-weight +1 ℃ Self-weight + +1 ℃ P2 = -18 m P1-P2 = 0.1 m Self-weight + -1 ℃ P2 = -13 m P1-P2 = 0.09 m -1 ℃ Alumina SUS Granite Alumina

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8 Resonant Frequencies 2nd: 110Hz 3rd: 143Hz 4th: 239Hz 1st: 88Hz CFRP SUS Granite SUS

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9 L C R Z Y X Fixed 0.5nm/Hz 1/2 0.03nm/Hz 1/2 0.3nm/Hz 1/2 X-direction Y-direction Z-direction

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