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W09 Array 8x8 position in the wafer A1 B1 B5 C1 A2 B2 B6 C2 A3 B3 C3 B7 A4 B4 B8 C4

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**Array 8x8 Position in the cavity plates**

B2 B3 B1 B4 B5 B6 B7 B8

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**Array 8x8 Position in the cavity plates**

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**Array 8x8 position in the wafer**

B1 B5 C1 A2 B2 B6 C2 A3 B3 C3 B7 A4 B4 B8 C4

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**Array 8x8 position in the wafer**

B1 B5 C1 A2 B2 B6 C2 A3 B3 C3 B7 A4 B4 B8 C4

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**Array 8x8 position in the wafer**

B1 B5 C1 A2 B2 B6 C2 A3 B3 C3 B7 A4 B4 B8 C4

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**Array 8x8 position in the wafer**

B1 B5 C1 A2 B2 B6 C2 A3 B3 C3 B7 A4 B4 B8 C4

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**Linear array 1×8 position in the wafer**

COL.1 COL.2 COL.3 COL.4 1 2 3 4

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**W14 Array 1x8 Position in the cavity plates COL.1 COL.1 COL.1 Array 1**

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**W14 Array 1x8 Position in the cavity plates COL.3 COL.3 COL.3 Array 1**

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**Devices position in the wafer**

B1 B5 C1 A2 B2 B6 C2 A3 B3 C3 B7 A4 B4 B8 C4

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SINTEF Wafers We studied two wafers. Wafer #24 and one oxygenated wafer.

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