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Exploring 3D Power Distribution Network Physics Xiang Hu 1, Peng Du 2, and Chung-Kuan Cheng 2 1 ECE Dept., 2 CSE Dept., University of California, San Diego 10/25/2011

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Page 2 Outline Introduction 3D power distribution network (PDN) model –Circuit model –Current model 3D PDN analysis flow Experimental results –On-chip Current Distribution –Resonance phenomena Noise reduction techniques –Larger decap around TSVs –Reduce Tier to tier impedance Conclusions

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Page 3 Introduction Power delivery issues in 3D ICs –More tiers => More current –Same footprint on package –TSVs and µbumps between tiers Coarse power grid models –Missed detailed metal layer information –Current source models Detailed 3D PDN analysis –Frequency domain: resonance behavior –Time domain: worst-case noise

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Page 4 3D PDN Circuit and Current Models Circuit Model –Lump model: Two-port model for chip between tiers –Fine grid model: all metal layers: m1+ Current Model –Power law –Phase in f domain

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Page 5 3D PDN Distributed Model[1] Power grid –Structure: M1, M3, M6, RDL –Each layer extracted in Q3D T2T: TSV+μbump –Modeled as an RLC element Package: C4 bump based RLC model [1] X. Hu et al., “Exploring the Rogue Wave Phenomenon in 3D Power Distribution Networks,” IEEE 19th Conf. on Electrical Performance of Electronic Packaging and Systems, Oct. 2010, pp. 57–60.

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Page 6 Frequency-Domain Current Stimulus Model Noise depends on the current model Rents rule power law: –P : power consumption –A : area –k : constant number –γ : exponent of the power law Current configurations –γ =0 : single current load –0< γ <1 : taper-shaped current distribution –γ =1 : uniform current distribution –In f domain, we can tune the phase

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Page 7 3D PDN Analysis Flow

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Page 8 Experiment Base Setup –Two-tier PDN –TSV setup: 3x4 TSVs connected to M1 and AP on both side –5nF/mm 2 decap on T1; 50nF/mm 2 decap on T2 –2x2 C4 on T1 AP Per bump inductance: 210pH Per bump resistance: 18.7mΩ M1M3M6APTSV T1T2 Pitch (um) Width (um) Pitch (um) Width (um) Pitch (um) Width (um) Pitch (um) Width (um) Pitch (um) Width (um) X step Y step

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Page 9 Current Model: Input on T1 Two-tier PDN + VRM, board, and package –Decap: 5nF/mm 50nF/mm –Current: T1; distr.( γ=0, 0.5, 1 ) Probe –A: T1 TSVs –B: T1 between TSVs –C: T2 Observation –Smaller γ => larger noise –Resonance at non-TSVs, but not at TSVs VRM-brd brd-pkg T1-T2

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Page 10 Current Model: Noise Map w/ Input on T1 T1 T2 γ=0γ=0 γ= 0.05 γ=1

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Page 11 Current Model: Input on T2 Two-tier PDN + VRM, board, and package –Decap: 5nF/mm 50nF/mm –Current: T2; distr.( γ=0, 0.5, 1 ) Probe –A: T1 TSV location –B: T1 non-TSV location –C: T2 Observation –Smaller γ => larger noise

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Page 12 Current Model: Noise Map w/ (1GHz) T1 T2 γ=0γ=0 γ= 0.05 γ=1

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Page 13 Resonance Phenomena Decap: 5nF/mm 50nF/mm Current: T1 or T2, unif. (γ=1) Observation: resonance vary with decap configurations Global mid-freq resonance non-TSV locations. From lumped model: No resonance TSV locations No mid-freq resonance peak due to “R m1 ” Probe: T1 Current: T1 Probe: T2 Current: T2

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Page 14 Decap: Larger Decap Around TSVs Decap: 50nF/mm 5nF/mm –Case 1: uniform –Case 2: half of decap at Observation: Case 2 is better Probe: T1 between TSVs Current: T1 unif. Probe: T2 Current: T2, unif Probe: T2 Current: T1 unif

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Page 15 Tier to Tier Impedance: Number of TSVs SetupCase 1Case 2Case 3 TSV X step (M1 segments) TSV Y step (M3 segments) # TSV41232 TSV Setup

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Page 16 Tier to Tier Impedance: Number of TSVs TSV(Xpitch,Ypitch) –Case 1: (40, 100) –Case 2: (20, 40) –Case 3: (15, 18) Current: T1, unif. ( γ=1 ) Probes –A: T1 TSV –B: T1 between TSVs –C: T2 Observation –noise drops as #TSV increases –resonance f drops as #TSV increases As T2T impedance becomes smaller, resonance frequency is determined by both C d1 and C d2 Resonant f determined by C d1

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Page 17 Conclusion On-chip power network model Current distribution model –Power law current distribution model reflects the current-area relation Decap: Various on-chip resonances Techniques of reducing 3D PDN noise –Larger decap around TSV area –Small tier to tier impedance

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Page 18 Thank You! Q & A

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