1. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III THE NEXUS TECHNOLOGY ROADMAP FOR MICROSYSTEMS 1st Report issued in August 2000 The NEXUS Roadmap Task Group Helmut Zinner, DaimlerChrysler/EADS (Roadmap Co-ordinator) Ayman ElFatatry, BAE Systems (NEXUS Vice Chairman)

2. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III Content Roadmaps for selected MST applications technologies components infrastructure existing products/markets new products/markets horizon  2005 Benefits: Strategic guidance for users, manufacturers, equipment suppliers Identify new research topics Assist funding authorities in defining the scope of new projects Assist partnerships for research projects

3. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III Structure Approach:Application-oriented Baseline:NEXUS Market analysis (1998) Multimed. & Peripherals (Bio-)Medic. (Bio-)Chem. Instrument. Process Ctr. Aerospace/ Aeronautics Automotive Household Appliances Tele- communic. Communic./ Information Comfort/ Conven. Safety/ Security Chassis/ Body Power- train MAP MAF Cyl. Press.... Generic Technologies: CAD, Simulation, Si-µ-Machining, LIGA, Thin Film,..... Accel. Gyro Example:

4. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III Methodology 1. Identification of functional trends and requirements by the User-Supplier Clubs (USCs) 2. Identification of relevant MST devices 3.Forecast of device development trends 4.Technological developments necessary to achieve the desired functionality 20002010 2005 Functional trends Functionality/customer benefit 20002010 2005 Component trends Functionality/performance func. 1 func. 2 func. x device 1 device x.... device 1 device 2 device x technology 1 technology x....

5. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III adaptive cruise control advanc. cruise control 20002010 2005 Reverse, parking assistant Distance sensor (mm, IR) Vision + distance sensor spin off Example: Automotive, active, safety systems 3d imaging sensor short range (20 m) 3d imaging sensor long range (100 m) stop&go automate lane departure warning Optical (VIS) sensor night vision Uncooled IR imager collision warning collision avoid. x-by-wire Autono- mous vehicles? Functionality/customer benefit

6. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III ? Number of pixels Pixel pitch NETD cost 320x240 50 µ 50 mK ferroelectr. 2-10 K$ 320x240 50 µ 50 mK bolometer 2-10 K$ 25 µ 10 mK ? $ 800 2 ferroelectr. ~120 100 µ 150 mK thermopiles  100 $ 20002010 2005 Surface µ-mach. thin film depos. Hybrid integr on ROIC. 640x480 50-25 µ 10-50 mK ferroelectr. 0.1-2 K$ Monolithic thin film depos. of ferroelectr. 640x480  30 µ 50 mK bolometer 0,1-2 K$ New materials (a-Si, poly-Si,..) Example: Trends uncooled IR FPAs for night vision

7. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III EVOLUTION OF MOBILE SYSTEMS & RELATED MST/MEMS TECHNOLOGIES GPRS General Packet Radio Data Service GSM EDGE UMTS; WCDMA 2nd Generation UMTS TD CDMA UMTS Satellite Authentication, diagnostic, video and recognition sensors Biometric recognition Tagging, position location & GPS Immersive / Virtual Large Displays Colour displays Projection Displays Batteries & Power sources Miniaturised RF & Antennas Microsystems based Scanners, printers …. etc Standards Bit Rates Memory Characteristics 4 Mbytes 40 Mbytes 9.6kb/s, 64kb/s - 17 kb/s 115kb/s - 384kb/s>200kb/s - 2 Mb/s GLOBALCOVERAGE 1999200020012002200320042005 Timescales WAP-mobiles MEMS for Optical links for Base-stations MEMS for Optical IP Networks

8. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III OTHER RF MEMS ANTENNAS (Arrays) RF SWITCHES AUTOMOTIVE MOBILE PHONES HOUSEHOLD APPLIANCES INTELLIGENT HOMES SMART CARDS & TAGS QUANTITIESCOMPLEXITY 10,000M 1000M 100M 2000200120022003200420052006 ROADMAP for RF MEMS in TELECOMMUNICATIONS & DATA Transfer Applications Products (Components) Applications (Systems) MEDICAL OFFICE APPLICATIONS RF SYSTEMS

9. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III 200020022004200620082010 System Capacity Giga-bits/s 10 Giga-bits/s 100 Giga-bits/s Tera-bits/s WDM Optical add-drop MUX OADM Optical Cross- Connect OXC Optical Routers SOLITON Systems Real-time images, video, simulation & VR Enabling MEMS/MOEMS Couplers WDM Alignment Switches Amplifiers Modulators Polarizers Sensors Actuators Displays Mass-Storage All-optical Systems OPTICAL SYSTEMS

10. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III 20002010 2005 Focal plane elements Passive optics µ-optics & gratings µ-mirrors & µ-mirror arrays Active optics Deformable mirrors µ-lasers & waveguides CMOS readout Adaptive wavefront corrector Actively controlled large aperture IR imaging instrum. Multi-object & integral field spectrometers Hi-res VIS/NIR imaging instruments multiple wave- length sensors µ-spectrometers super-resolution CCD TFA APS-detector arrays µ-bolometer arrays Roadmap: Optical Instrumentation for Space applications

11. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III 20002010 2005 sensors & actuators higher-level integration integrated vision systems accelero- meter electro-mech. sensors electro-optical sensors electro-mech. actuators chemo-mech. actuators intelligent attitude & orbit determination systems µ-GPS systems GPS combined AO sensors, processors & actuators autonomous attitude & orbit control systems µ-valves for ion beam thrusters pyro-electric µ-thrusters combined GPS, vision & angular rate sensors angular rate sensor APS active pixel sensor multiple wave- length sensor IR active pixel sensor integrated Sun-Earth- star-sensor Roadmap: Optical Instrumentation for Space applications

12. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III MEMS CAD road map 1999 2000 2001 2002 2003 2004 Global MEMS simulation platform as offered by MEMSCAP MENTOR CADENCE, MEMSCAP IP’s Pressure Accelerometers Inductors RLC filters Tuneable capacitors Microswitches Gyros cross section 3D viewer Wafer assy IC’s simulator FEM ANSYS... Process simulator Vibration Microtransfos Dedicated simulation tools: RF Noice Damping Parameters extraction

13. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III Results of Phase I

14. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III Cross-Fertilisation Matrix

15. NEXUS ! Network of Excellence in Multifunctional Microsystems Funded by EC DG III Conclusions Information for the Roadmaps is currently based on the present composition, expertise and intuition available from within the NEXUS USCs and Task Group Difficulty in obtaining information on component trends Significant differences between fields of application: -production quantities -price per item -complexity/functionality -time scale of product / innovation cycle Little generic trends identified; no standardisation - so far ! The distinction between drivers & followers is not too clear.