Presentation on theme: "PART III: METALORGANIC CHEMICAL VAPOR DEPOSITION"— Presentation transcript:
1PART III: METALORGANIC CHEMICAL VAPOR DEPOSITION Description of the MOCVD equipmentAnalysis of the MOCVD growth processGrowth modes in MOCVD
2Metalorgenic Chemical Vapor Deposition (MOCVD) [Metalorganic Vapor Phase Epitaxy (MOVPE), OMCVD, OMVPE]One of the premier techniques for epitaxial growth of thin layer structures (semiconductors, oxides, superconductors)Introduced around 25 years ago as the most versatile technique for growing semiconductor films.Wide application for devices such Lasers, LEDs, solar cells, photodetectors, HBTs, FETs.Principle of operation: transport of precursor molecules (group-III metalorganics + group-V hydrides or alkyls) by a carrier gas (H2, N2) onto a heated substrate; surface chemical reactions.Complex transport phenomena and reactions, complicated models to determine reactor designs,growth modes and rates.In-situ diagnostics less common than in MBE.
3Description of the MOCVD equipment R. L. Moon and Y.-M. Houng, in Chemical vapor deposition - Principles and applications, edited by M. L. Hitchman and K. F. Jensen (Academic Press, London, 1993).G. B. Stringfellow, Organometallic vapor phase epitaxy: theory and practice (Academic Press, Boston, 1989).
4MOCVD Facility, horizontal reactor Gas handlingReactorGlove boxResearch system (left): AIX 2001X2” wafer capacityProduction system (right): AIX 2600Up to 5X10” wafer capacity (AIX 3000)
5Schematics of a MOCVD system Gas handling systemMaterial sourcesCarrier gasIn-situ diagnosticsNO electron beam probes!ReflectanceEllipsometryRASExhaust systemReactorSafety system
6Gas handling systemThe function of gas handling system is mixing and metering of the gas that will enter the reactor. Timing and composition of the gas entering the reactor will determine the epilayer structure.Leak-tight of the gas panel is essential, because the oxygen contamination will degrade the growing films’ properties.Fast switch of valve system is very important for thin film and abrupt interface structure growth,Accurate control of flow rate, pressure and temperature can ensure stability and repeatability.
7Carrier gas“Inert” carrier gas constitutes about 90 % of the gas phase stringent purity requirements.H2 traditionally used, simple to purify by being passed through a palladium foil heated to 400 °C. Problem: H2 is highly explosive in contact with O2 high safety costs.Alternative precursor : N2: safer, recently with similar purity, more effective in cracking precursor molecules (heavier).High flux fast change of vapor phase composition. Regulation: mass flow controllerP ~ mbarMass flow controllers
8Material sourcesVolatile precursor molecules transported by the carrier gasGrowth of III-V semiconductors:Group III: generally metalorganic molecules (trimethyl- or triethyl- species)Group V: generally toxic hydrides (AsH3; PH3 flammable as well); alternative: alkyls (TBAs, TBP).
9Hidrides and dopantsForm: gases from high pressure cylindersMixed into the carrier gas lineFlow control: valve + mass flow controller (MFC)
10BubblersMetalorganicsLiquid (or finely divided solid – TMIn) contained in a stainess steel bubbler.Vapor pressure fixed by constant temperature in a thermal bath; T ≈ -20oC ÷ 40oC; DT = ±1oC.Controlled H2 flow through the bubbler saturated stream; composition depends on H2 flow rate adjustment through MFCP ressure controller (PC) to keep a fixed pressure in the bubbler and throttles the resulting mixture of H2 and MO down to the reactor pressure.H2, N2To reactorBubblerPCMFCValve NCValve NOThermal bathTo reactor
11Metalorganic compounds Optimal thermal decomposition temperature between 300 and 500°C availability of transported reactant at the substrate surface.The vapor pressure of the MO source is an important consideration in MOCVD, since it determines the concentration of source material in the reactor and the deposition rate. Too low a vapor pressure makes it difficult to transport the source into the deposition zone and to achieve reasonable growth rates. Too high a vapor pressure may raise safety concerns if the compound is toxic.Vapor pressures of Metalorganic compounds are calculated in terms of the expressionLog(p)=B-A/T
12Vapor pressure of most common MO compounds P at 298 K(torr)ABMelt point(oC)(Al(CH3)3)2TMAl14.2278010.4815Al(C2H5)3TEAl0.041362510.78-52.5Ga(CH3)3TMGa23818258.50-15.8Ga(C2H5)3TEGa4.7925309.19-82.5In(CH3)3TMIn1.7528309.7488In(C2H5)3TEIn0.3128158.94-32Zn(C2H5)2DEZn8.5321908.28-28Mg(C5H5)2Cp2Mg0.05355610.56175Log(p)=B-A/T
13Flow rate of MO sources Ideal gas equation MO flux QMO PMO(Tbub) = equilibrium vapor pressure of the metalorganic componentTbub = bubbler temperatureQB = carrier gas flux at standard atmospherePstandard = standard atmospherePB = regulated bubbler pressure(Rolf Engelhardt, Ph.D. Thesis, TU Berlin, 2000,
14Partial pressure of MO sources PMO-reactor = partial pressure of the metalorganic components in the reactorPMO(Tbub) = equilibrium vapor pressure of the metalorganic componentQB = carrier gas fluxPstandard = standard atmospherePB = regulated bubbler pressureQtot = total gas flux(Rolf Engelhardt, Ph.D. Thesis, TU Berlin, 2000,
15MOCVD reactorsDifferent orientations and geometries.Most common:Horizontal reactors: gases inserted laterally with respect to sample standing horizontally on a slowly- rotating (~60RPM) susceptor plate.Vertical reactors: gases enter from top, sample mounted horizontally on a fast-rotating (~ RPM) susceptor plate.
16Horizontal reactors Primary vendors: AIXTRON (Germany). The substrate rests on a graphite susceptor heated by RF induction or by IR lamps.Quartz liner tube, generally rectangularGas flow is horizontal, parallel to the sample.Rotation ~ 60RPM for uniformity by H2 flux below the sample holder.
17Horizontal reactors Advantages Common reactor high experience. Uniform epitaxial growth provided the gas velocity is large enough, and attention is paid to hydrodynamic flow.Small height above the wafer the effect of natural convection is minimized.Quite large gas velocity very rapid changes in the gas phase composition.DisadvantagesUniformity can either be achieved by very high gas flow, ( inefficient deposition), or by implementing rotation, which is tricky in this type of design.Throughput: difficult to scale this design up to accommodate large volume production.
18Planetary reactors Primary vendors: AIXTRON. Derived from horizontal reactor.Material: stainless steelVery widespread now for production, and can achieve very good wafer uniformities.Uniformity: rotation of the main disk + individual satellites.Up to 5X10” wafer capacity (AIX 3000, see photo)
19Vertical reactors Primary vendors: Veeco (former Emcore (USA)). Gas flow generally normal to the wafer.Temperature gradients buoyancy induced convection high residence time of the gases degradation of heterostructure compositional abruptness.Solution: rotation of susceptor at high angular velocities (centrifugal “pumping action” to suppress convection and obtain more efficient use of precursors.Simulated streamlines in a vertical spinning cylinder reactor for MOCVD of GaAs from TMGa, AsH3, H2. Gases enter at 600K through the top plane and react at the flat top surface of the spinning inside cylinder. The rotation rate is 1000rpm and the deposition surface temperature is 900K(http://www.cs.sandia.gov/CRF/MPSalsa/ )
20Vertical reactors Features All stainless construction MBE vacuum technologySafety (no glass)Electrical resistance heatingGate valve, and antechamber for minimizing O2/H2O contamination.AdvantagesHigh precursor utilization efficiencyScaling to very large wafers/ multiple wafers.Multiple wafer capacity: Up to 3 x 8", 5 x 6", 12 x 4", and 20 x 3"Disadvantages:Very high speed rotation, up to 1200 rpm.Possible memory effects.
21Reflectance anisotropy spectroscopy (Reflectance difference spectroscopy) Linear polarized light source directed on the sample.Light is reflected from the sample.The reflection is monochromatized and a spectrum is detected.Only requirement for the system: transparent ambient and a window above the sample. easily fulfilled for MOVPE and MBEBulk: isotropic signalSurface: reconstruction anisotropy in two directions (with square lattices)RAS signal: normalized change of polarization along two axes.Markus Pristovsek, Ph.D. Thesis, TU Berlin, 2001,
22RAS spectra of a c(4x4) and a ß2(2x4) reconstruction on a GaAs Reflectance anisotropy spectroscopy (Reflectance difference spectroscopy)A RAS spectrum can be used to identify a surface, by comparing it to spectra measured on well-ordered reference surfaces with known reconstruction (measured at the same time, e.g., by RHEED in MBE).RAS spectra of a c(4x4) and a ß2(2x4) reconstruction on a GaAs(001) surface. Grey spectra are the spectra of a 33%c(4x4) /66%ß2(2x4) and66%c(4x4) /33%ß2(2x4).(Markus Pristovsek, Ph.D. Thesis, TU Berlin, 2001,
23Exhaust system Pump and pressure controller Low pressure growth: mechanic pump and pressure controller control of growth pressure. The pump should be designed to handle large gas load (rotary pump).Waste gas treatment systemThe treatment of exhaust gas is a matter of safety concern.GaAs and InP: toxic materials like AsH3 and PH3. The exhaust gases still contain some not reacted AsH3 and PH3, Normally, the toxic gas need to be removed by using chemical scrubber.For GaN system, it is not a problem.AIXTOX system
24Safety issues Concerns: Flammable gases (H2) Toxic gases (AsH3, PH3) Safety measures:Lab underpressurization.Design of hydrides cylinders.Extensive gas monitoring systems placed in different locations, able to detect the presence of gas as small as parts per billion.Alarms located in different parts of the buildings + beeper calls to operators.Immediate shut down of the system to a failsafe condition in case of leakages and other severe failures.Alternatives: use of alternate gasesN2 carrierTBAs, TBP (toxic but liquid low vaopr pressure)
26MBE versus MOCVD growth rate Ballistic transportStickingcoefficient = 1Tcell Pv(T)r = r (T)MOCVDFlow ratef (total flow F, totalpressure P, vapor pressure Pv)r = r (F, P, Pv,mass transport,reaction kinetics)Diffusive mass transportChemicalreaction kinetics
27Growth steps in (MO)CVD Flow of reactant (precursors) to reactor tube, either by:Mixing in gas handling manifold, then enter the reactorSeparate until the reactor (no premature side reactions)In the reactor: establishment of gas layers governing transport of mass, energy and momentum: entry effects and possibly achievement of steady-state condition.At the same time: chemical reactions homogeneous, heterogeneous (parasitic deposit) reduction of reactant concentration, shift in alloy composition, reduced growth rate, epitaxial surface roughening.(Partially decomposed) precursor diffusion to the surface reaction to form the desired material.Simultaneous desorption of reaction products (hydrocarbons), surface diffusion of material to lattice sites.R. L. Moon and Y.-M. Houng, in Chemical vapor deposition - Principles and applications, edited by M. L. Hitchman and K. F. Jensen (Academic Press, London, 1993).
28Reactive-flow conservation equations (Crosslight Procom User’s manual) The state of the gas phase in a reactor can be completely described by the continuum mass density r, the individual chemical species number density ni, the momentum density rv, and the energy density E. The basic partial differential conservation equations are:total mass (continuity equation)individual species (precursors, intermediate species…)momentum (Navier-Stokes equation)energy (heat conduction equation)Total energy densityNumber density of species iFluid velocityNumber of chemical species presentPressure tensorChemical production rate of species iHeat fluxRadiative heat fluxDiffusion velocity of species iFluid mass density
29Simplified model of (MO)CVD reaction kinetics Simplified deposition process of a film, starting from a molecule AB in the gas phase (L. Vescan, in Handbook of thin film process technology, edited by D. A. Glocker and S. I. Shah (Institute of Physics Publishing, Bristol, 1995), p. B1.4:1) AB(g) A(s) + B(g)J1: molecular flux from the gas phase to the substrate surface, J2: consumption flux of AB corresponding to the surface reaction: J1 ≈ hG (CG – CS) (~supersaturation) J2 ≈ kSCS with hG = gas diffusion rate constant, CG = gas-phase concentration of AB, CS = surface concentration of AB, kS = heterogeneous rate constantJ1J2
30Simplified model of (MO)CVD reaction kinetics Steady-state conditions:Growth rate r = J0 (with 0 = unit volume of the crystal) r mole fraction of the species AB in the gas phase, and determined by the smaller of the rate constants hG, kS.Limiting cases: r ≈ kS CG W0 surface kinetics control r ≈ hG CG W0 mass transport control
31Interpretation in terms of supersaturation Driving force: supersaturation (chemical potential difference between gas phase and solid) out-of-equilibrium process; equilibrium at the vapor-solid interfaceThe relative importance of surface kinetics and mass transport can be interpreted as a function of the chemical potential dependence on the reaction coordinate. If most of the chemical potential drop occurs in the boundary layer (red line), the growth is controlled by mass transport; if it occurs at the interface (green line), the growth is kinetically limitedInput gasphaseBoundarylayerInterfaceSolidChemical potentialReaction coordinateMasstransportReactionkineticsR. L. Moon and Y.-M. Houng, in Chemical vapor deposition - Principles and applications, edited by M. L. Hitchman and K. F. Jensen (Academic Press, London, 1993).
32Mass transport Fundamental and very complex aspect in reactor design Factors influencing gas flow in a reactor:temperatureconcentration and momentum gradientsgravity ( convection)homogeneous, heterogeneous chemical reactions ( parasitic nucleation)Simplified (2 regions) picture in a horizontal reactor:Upper region: turbulence or vorticity good mixing and heat transferClose to the susceptor: region of laminar flow (boundary or stagnant layer) molecular diffusional transport to the hot substrate, where the transverse velocity is zero.
33Mass transportAssuming a gas velocity U = U in the bulk gas phase, and U = 0 at the growth surface calculation of boundary layer width (D. W. Kisker and T. F. Kuech, in Handbook of crystal growth, edited by D. T. J. Hurle (Elsevier Science, Amsterdam, 1994), Vol. 3, p. 93) d ~ (PU)-1/2, where P is the total reactor pressure.If the molecular transport in the boundary layer proceeds by diffusion alone, the rate constant hG can be written as where D ~ P-1 is the diffusion coefficient mass-transport-limited growth rate where CG ~ pAB = AB partial pressure growth rate is practically independent of the growth temperature, and depends linearly on the species partial pressure.
34Reaction kinetics Two kinds of thermally-activated reactions Reactions in the gas phase (homogeneous reactions)Reactions at the surface (heterogeneous reactions)Forward and reverse rates are characterized by rate constants that can be expressed in an Arrhenius form: k = A exp (-E/kBT), where E is the activation energy for the process.Surface kinetics are poorly known processes, in which a number of sub-processes can be identified. Among them:adsorption of reactant species,heterogeneous decomposition reactions,surface migration,incorporation and desorption of products.
35Reaction kineticsIn the most simplified picture, the chemistry of heterogeneous reactions can be modeled by taking into account only adsorption and desorption:where is a vacant surface site, A is an adsorbed state, kads and kdes are the adsorption and desorption rate constantsAssumptions: no interaction between absorbed species; equivalence among all the adsorption sites.G. B. Stringfellow, Organometallic vapor phase epitaxy: theory and practice (Academic Press, Boston, 1989).
36Reaction kineticsSteady state (adsorption rate = desorption rate): adsorption coefficient with Q = fraction of occupied lattice sitesQ assumes the form of a Langmuir isotherm:G. B. Stringfellow, Organometallic vapor phase epitaxy: theory and practice (Academic Press, Boston, 1989).
37Reaction kineticsMOCVD of binary compound semiconductors: two molecules AB and CD are transported to the surface, and are adsorbed on cation and anion sites, respectively.For this noncompetitive process, the growth rate of the bimolecular reaction is proportional to the anion and cation surface coverages (Langmuir-Hinshelwood isotherm):III-V semiconductors: tipically V/III ratio ~ 100 QAB << 1; QCD ≈ 1 r K’ pAB, with K’ a typical rate constant for the process, temperature-dependent. growth rate depends only on temperature and on the group-III precursor partial pressure, and not on the group-V one.
38Reaction kinetics for GaAs Overall reactions:TMGa + AsH3: AsH3 + Ga (CH3)3 → GaAs + 3CH4↑TEGa + AsH3: AsH3 + Ga (C2H5)3 → GaAs + 3C2H4↑ + 3H2 ↑Lower activation energies for decomposition for TEGa than for TMGa ~200K lower temperature for 50% decomposition.(Markus Pristovsek, Ph.D. Thesis, TU Berlin, 2001,
39Reaction kinetics for GaAs Overall reactions:TMGa + AsH3: AsH3 + Ga (CH3)3 → GaAs + 3CH4↑TEGa + AsH3: AsH3 + Ga (C2H5)3 → GaAs + 3C2H4↑ + 3H2 ↑TMGa decomposition is strongly enhanced at the onset of the AsH3 de-composition.This is most likely due to hydrogen radicals produced by AsH3 decomposition.(Markus Pristovsek, Ph.D. Thesis, TU Berlin, 2001,
40Reaction kinetics for GaAs Proposed mechanisms (TMGa + AsH3):Complex series of decomposition steps in the gas phase and on the surface, each with its own characteristic reaction constant and activation energy.K. F. Jensen, Adv. Chem. Ser. 245, 397 (1995)
42Growth mode: studies on GaAs from TMGa and AsH3 Effect of substrate temperatureStudies for atmospheric pressure (AP = 105Pa = 1000mbar) and for low pressure (LP = 104Pa = 100mbar), and different surface orientations.Three regimes:Low T: kinetically limited growth strong T dependence, low P dependence (r K’ pTMGa), with K’ dependent on T.Mid T: mass transport-limited growth r does not depend appreciably on T and surface orientation, but increases with decreasing P (r pTMGa P-1/2 ).High T: increasingly low growth rates, probably due to homogeneous reactions in the gas phase, causing a depletion of reactants, or surface re-evaporation.G. B. Stringfellow, Organometallic vapor phase epitaxy: theory and practice (Academic Press, Boston, 1989).
43Growth mode: studies on GaAs from TMGa and AsH3 Effect of reactor pressureStudies for T = 650°C and V/III ratio ≈ 100Two regimes:P > 100mbar, growth is limited by mass transport, and r ~ P-1/2After a transition region, at P < 20mbar, the growth rate becomes independent on P, and growth becomes kinetically limited.G. B. Stringfellow, Organometallic vapor phase epitaxy: theory and practice (Academic Press, Boston, 1989).
44Growth mode: studies on GaAs from TMGa and AsH3 Effect of TMGa partial pressureStudies for different T and substrate orientationsThree regimes:T = 700oC: r pTMGa at all TMGa pressures and substrate orientations (mass transport limited)T = 500oC: r saturates for high TMGa pressures and depends on orientation (kinetically limited). Evidence for (orientation-dependent) incomplete AsH3 decomposition (with TMGa completely pyrolized).T = 1000oC: decreased growth rate: gas-phase reactions ( reduction of gas-phase nutrients) and surface desorption ( orientation dependence)500°C700°C1000°CR. L. Moon and Y.-M. Houng, in Chemical vapor deposition - Principles and applications, edited by M. L. Hitchman and K. F. Jensen (Academic Press, London, 1993).