Gas delivery diagram interpretationgas panel 2 First work out the I/Os; Then work out the main process gas flow route including the choking valves; See next slide for results Chamber Pump
Gas delivery diagram interpretation Process chamber V5 MFC 2 V20 V22 Hand valve Gas 2 supply MFC 4 V40 V42 Hand valve Gas4 supply V4 PSH3
Gas delivery diagram interpretationgas panel 2 Now we will deal with the side branches. But we will Map it out more symmetrically Around the I/Os. See next Slide Chamber Pump
Gas delivery diagram interpretationgas panel 2 MFC N2 pump V4 V1 V2 V3 V85 outlet inlet V42V41 PSH9 PSH2 Forward purging: V4 and V1 open, V41, V42 open, all others closed. Reverse purging: V2 and V3 open, V41, V42 open, all others closed, V85 is the pump ballast valvedummy load for the pump when chamber iso valve is closed.