Presentation on theme: "McGill Nanotools Microfab Facility: MCRF Site Visit"— Presentation transcript:
1McGill Nanotools Microfab Facility: MCRF Site Visit Peter GrutterAcademic DirectorSeptember 2011
2McGill Nanotools Microfab Facility 3300sq.ft. facility, 1000 sq.ft. clean room space.$13 million capital investment, $615K/year operating budgetIn 2010:87 individual projects42 principal investigators38% users external to McGillInternal users from 5 faculties10 corporate users91 students/PDFs trainedAt least 63 peer reviewed papers, 6 patents, 52 thesis0.7um features
3Outline - Selection Criteria Accreditation:Character of the facilityEfficient use of the facilityQuality of the nanotechnology research programAccessibility:UsersBenefits for QuebecIntegration and promotionDevelopment plan
41. Characteristics of the Facility Facility: over the past 10 years over 13M$ capital equipment invested by Quebec, CFI and NSERCEquipment enables R&D and training in:NanoelectronicsNanobiologyNEMS/MEMSNanophotonicsProviding leadership within QNI:integrating fabs of 4 major universities in Quebec:Training: NSERC CREATE ISS (2009)Infrastructure support: NSERC MRS (2011, in prep.)Section C contains a list of our equipment
51. Characteristics of the Facility Equipment:Complete NEMS/MEMS fab facility (see section F for details).Complementarity with the global QNI offer (see Section C of application).Unique character of McGill Nanotools Microfab:Ecosphere of integrated training and world-class R&D in terms of processing know-how and established collaborations along 2 major axes:fundamental – industrialinterdisciplinary (medicine – biology – chemistry – physics – ECE – materials science – tissue eng.)Section F contains a list of all of our equipment. Science& engineering -> commercialization and companies
6Unique Ecosphere: Green Technology Growing, understanding, processing and integrating InN for energy and sensing applicationsUniversity:Z. Mi (ECE), G. Gervais (Physics), P. Kambhampati (Chemistry), T. Szkopek (ECE), A. Kirk (ECE), Lennox (Chemistry), R. Sladek (Genomics)Companies:ICP Solar Technologies, Future Lightning Solutions, Silonex Inc.DNA Landmarks (St. Jean-sur-Richelieu, QC), BASFGovernment and Crown Corporations:IREQ (Hydro Quebec), DRDC (Val Cartier, QC), Canadian Space Agency (Brossard, QC)
7Unique Ecosphere: Green Technology MBE growth of GaN nanowires (Z. Mi)Closed loop growth-fabrication-characterization-application Proximity to fab crucial!McGill leads the pack in nanoscale nitride semiconductors. Only nitride MBE system in Canada.Vol. 11, 1919 (2011).World’s most efficient phosphor-free white light LEDs:Devices grown in McGill MBE lab and fabricated in McGill Nanotools Microfab.: $ 667,500 MDEIE for commercialization (wafer scale demonstration)!
8Fabrication of Optical Ring Resonators Zetian Mi, ECE, McGillGaAs SubstrateIntegrated tube lasers waveguides on SiOSA Optics Express 19, (2011)
9Unique Ecosphere: SiCSiC Micromachining compatible with CMOS technologiesUniversity:Mourad el-Gamal (ECE, McGill), Srikar Vengallatore (Mechanical, McGill)Companies:MEMS-Vision (Montreal), Thales Inc., Boston Microsystems
10The Vision + = Very small, for portable devices … Batch fabrication, for very low costEndless functionalitiesMuch less battery consumptionMEMS(Micro Electro-Mechanical Systems)MicroMechanicalSensors &Actuators+=
11State-of-the-Art in MEMS Integration MEMS TechnologyConnectionsIC TechnologyAt least three manufacturing or assembly facilities are neededMEMSConnectionsIC
12Challenges: Incompatible temperatures, materials, and chemicals. Objective: “Growing” the mechanical devices “on top of” the electronics using IC compatible technologiesChallenges: Incompatible temperatures, materials, and chemicals.
13A Breakthrough Material ? - High elastic modulus- High acoustic velocity- High fracture strength- Sustains higher temp.- Inert surfaces- Resists corrosion,erosion, and radiation- BiocompatibleMetalsIC & MEMSBefore New Inventions:- Difficult to deposit- High temp. processing- Not compatible with ICmanufacturing- High residual stresses- Difficult & slow etchingand depositionSiC is routinely used in the manufacturing of CMOS electronics, for example in some of today’s state-of-the-art and very high-end microprocessors.
15Problems Solved - MoSiC™ MEMS Processing and materials know-how key! Many have tried, all others have failed!Stress ControlHigh YieldFrechette & Vengallatore with GM:Understanding internal damping of materials enables efficient energy harvesting.- Small gaps(high sensitivity)- High initialsensors accuracies< 50 MPa of stress
16Unique Ecosphere: Nanobiotech & Health NanofluidicsMicrofluidic systemsSculpting the energy landscape of polymers and DNA.DNA melting assay.3D microfluidic probe:Shear free gradient at the stagnation point for cell chemotaxis studies.Juncker et al.,Nature Commun (2011)nanochannelSi pins for multi-spotting proteins.System used to identify 6 relevant markers for breast cancer. Developing protein chip.Pla-Roca et al. Mol. Cell. Prot. (under review)100 nmReisner et al., PNAS (2010)Myoblast response to RGD Peptide Gradient (MNI)
17Concept: Nanopore-Nanochannel Device Conventional NanoporeNanopore Nanochannelnanopore in 20nm thick SiNx membrane (made via TEM milling)reservoirsnanoporenanochannelReisner (Physics, McGill)reservoirsnanoporenanochannelnanopore in 20nm thick SiNx membrane(made via TEM milling)reservoirsnanoporenanochannelnanopore in 20nm thick SiNx membrane(made via TEM milling)reservoirsnanoporenanochannelnanopore in 20nm thick SiNx membrane(made via TEM milling)reservoirsnanoporenanochannelnanopore in 20nm thick SiNx membrane(made via TEM milling)
18Nanopore-Nanochannel: Device Fabrication loadingmicrochannelnanochannelMembrane(50x50μm)10μmnanoporeInterdisciplinary – spanning physics, chemistry, genomics, biomed. engineering, ECE and neuroscience:Nano/microfluidics (Gervais, Reisner, Grutter, Lennox, Barrett, Sladek, Juncker, Kirk, Kennedy, Colman, deKoninck)TEM image of nanoporeembedded in nanochannel100nm
19Other concrete example of interdisciplinary interactions Gold nanorods100 nmRead-outcartridgeCompleted chipPlasmonic Micro-array BiosensorLow cost 24,000 element plasmonic sensing array based on patterned, functionalized self assembled gold nano rods. Read-out: absorption spectrum shift. Integrated system demonstrated. Currently being tested with leishmania (protozoan infection common in northern Asia), in collaboration with B. Ward (Fac. of Medicine)Kirk (ECE), Lennox (Chem.) and Reven (Chem.)Cantilever based biochemical sensingFunctionalized microfabricated cantilevers transduct electrochemical signal (Lennox (Chem.), Sladek (Genomics) & Grutter (Physics)).Systems integration in collaboration with A. Boisen (DTU) and M. Roukes (Cal Tech).Transfer of fundamental insights to nanowire sensors: Si nanowires (M. Reed, Yale) and InN nanowires (Z. Mi (ECE) and DNA Landmarks Inc.).Sealing of cantilever chip: PDMS technology from ReisnerOnly one person each on these 2 examples accesses the fab. But enables many interactions!
20Unique Ecosphere Micro/NanoSystems 10 nmLight off Light onCuPc:PTCDI deposited on KBrStencil development: Sherbrooke-McGill collaboration, use FIB at Ecole: enables bridging of length scalesPTCDA on KBr(001)Grutter (Physics, McGill), Guo (Physics, McGill), Silva (Chemistry UdM), Beerens (ECE, Sherbrooke)Microelectronic Engineering 87, 652 (2010)Advanced Materials 21, 2029 (2009) (including cover page)J. Phys.: Condens. Matter 21, (2009) (invited topical review)Phys. Rev. Lett. 100, (2008)
21Unique Ecosphere Micro/NanoSystems Molecular electronics, OPV, CNT, graphene, nanowires for topological quantum computing, ...T. Szkopek (ECE, McGill), R. Martel (Chem., UdM)M. Siaj, (Chem. UQAM)Z. Mi (ECE), T. Szkopek (ECE, McGill), G. Gervais (Physics, McGill)SNSA. Champagne (Concordia)SNS device fabricated at Nanotools by Mi, Szkopek and Gervais. SIZE???graphene FET memory cellsSuspended bridge CNT device
223. Quality of Nanotechnology Research Programs From NanoQuebec’s website:Conclusion: world class research program enabled in Nanotechnology (as defined by NanoQuebec)
23Unique Ecosphere Training: New type of students: Sébastien Ricoult: neuroengineering PhD with extensive fab experience. Industry needs such people!Michael Ménard: ECE McGill -> Cornell -> UQAMFrédéric Nabki: ECE McGill -> UQAM (NanoQAM)NSERC CREATEs: ($900k p.a. total)Integrated Sensor systems (2009); PI KirkNeuroengineering (2010); PI LennoxNanobiomachines (2010); PI GehringNanobiotechnology Microfab Course: Hands-on course, organized by D. Juncker 4th year in 2011, attracted 26 participants (national, international and industry).
242. Efficient operationOur guiding principle is to fund operating costs (including maintenance/repairs) from user fees.Keeping the Microfab ‘ready for use’ requires dedicated and highly trained personnel – which is financed by a combination of other contributions.Responsive, transparent management structure.User drivenRegular user meetings to dessiminate information, obtain feedback, decide on new/obsolete equipment.
254. Usage 60% increase in 2 years 50% of evaluation weight: Accessibility: usage, benefits, integration, development plan.Source: annual McGill Nanotools Microfab reports
264. Usage 40% of PIs hired since 2005 45% increase in processing tool capital investment: 3M$ new equipment in 2009/10 (ebeam, DRIE, spray coater, PECVD, evaporator, sputtering)60% increase in 2 yearsExpect 75% increase in total hours per year:Expect to be able to offer better and more services to outside users (both academic and non-academic).Need to run longer hours.Expect to increase access by bio and med. researchers.50% of evaluation weight: Accessibility: usage, benefits, integration, development plan.
27NanoQuebec funding 1. Increase capacity of McGill Nanotools Microfab Requests by users for extended hours. This is a result of 50 new faculty since inception and hands-on component of NSERC CREATE programs.Customer services for the life sciences: large number of untapped biomed users (2 CREATE, 1 CIHR Systems Biology Training grant).2. Develop active industrial outreach‘From academia to industry’. Coordinate disperse academic know-how that solves real-world problems for industry and facilitate the creation of start-ups. Complimentary to NQ outreach coordinator.3. Enable sustainable funding model
285. Benefits to QuebecEmpirical observation: most companies access microfabs through collaboration with academic research groups. They value the expertise and access to world class facilities of academic researchers; very few companies have the need or interest to directly access the fab.In 2010, direct, funded collaborations with more than 10 companies from Quebec in key economic sectors (see p.29 of 34 for list).In 2010 NEW contracts/grants worth 2.7M$ p.a. were obtained (2009: 1.3M$). These grants are often multi-year and fund HQP, R&D as well as fab access.50% of evaluation weight
296. Integration and Promotion within the QNI Integration & Leadership:Founding member of NQ (2000)NSERC CREATE ISS (2009)NSERC MRS QNI (to be submitted 2011)Increased international visibility:In 2010 McGill nano researchers have signed MOUs and started exchanging researchers with:RIKEN (Japan): green chemistry, nanoelectronicsIIT Mumbai (India): micro and nanofabrication trainingIoP CAS (Beijing): nanoelectronics and photonicGoogle ‘microfab’: ranks nr. 2 !!!50% of evaluation weight
307. Development plan for the facility Development and upgrade plans for the McGill Nanotools Microfab are driven by its users and coordinated with other facilities.In upcoming CFI call VII the McGill Nanotools Microfab facility will replace, upgrade and expand equipment necessary for:Fabrication, including material deposition and growthPackaging and assemblyCharacterizationIn particular we are planning to establish a rapid prototyping facility suitable for bio/medical applications50% of evaluation weight
31SummaryUnique R&D and training ecosystem: from fundamental to applied, across all disciplines.Broad user base and efficient management – NanoQuebec and partners finance ‘ready for business’ status; users pay for operation.Close interactions of Science & Eng. with biomed R&D unique among all NanoQuebec supported fabs. By increasing fab manpower we will capitalize on this opportunity.New outreach and industrial coordinator to facilitate knowledge transfer and the creation of start-ups.NanoQuebec funding to partially replace unsustainable current bridge funding from MIAM.50% of evaluation weight
32What will 300k$ from NanoQuebec enable? Extended operation hours needed due to usage increase.Incorporation of unique R&D ecosphere within NQ – from fundamental to applications.Grow and nurture emerging applications in bio med.In-reach coordinator to take advantage of academic know-how and facilitate transfer to industry.
33Budget details: Expenses (see p 14 of 34 for overview)
35Budget details: Revenues (*) CREATE: cash from McGill support of ISS, Neuroeng. and Nanobiomachines for help with facilitating internships as a result of Business Development person.Users are covering a bit more than operating expenses ($142,000, projected $240,000)(see p. 14 of 34 for overview)
36Budget details: Revenues Current (past): (partial) FTE to bridge funding shortfall and establish well functioning infrastructure.Future: Equivalent in cash, frees up the previously used manpower to support intensified R&D and training at CMP.Note: Increased MIAM funds will directly benefit fab – training, networking, characterization facility support (e.g. SEM, TEM).100k$ of university funding unsecured right now. Conditioned on successful NQ funding. Reallocation of 200k$ to some of the other 8M$ MDEIE funded recent investments to get them up and running and organized as competitive facilities. (3 years ago our facility was not funded by NQ). The 300k$ of past McGill contribution was a stop-gap measure. The question you have to ask yourselves too is what would NQ loose if this facility would have to shut down or strongly reduce operational capabilities due to a lack of funding and thus not be able to capitalize on its capabilities and investmens.
37Complementarity with other microfabs Toolset (in particular spray coater, wafer bonder)Processing know-how (SiC, nitrides, microfluidic systems)LeadershipTraining
38Statistiques d'utilisation des QNI User fee / total budget = 31% (this proposal)Source: RQMP annual report (2011)