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McGill Nanotools Microfab Facility: MCRF Site Visit Peter Grutter Academic Director September 2011.

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Presentation on theme: "McGill Nanotools Microfab Facility: MCRF Site Visit Peter Grutter Academic Director September 2011."— Presentation transcript:

1 McGill Nanotools Microfab Facility: MCRF Site Visit Peter Grutter Academic Director September 2011

2 McGill Nanotools Microfab Facility 3300sq.ft. facility, 1000 sq.ft. clean room space. $13 million capital investment, $615K/year operating budget In 2010: – 87 individual projects – 42 principal investigators – 38% users external to McGill – Internal users from 5 faculties – 10 corporate users – 91 students/PDFs trained – At least 63 peer reviewed papers, 6 patents, 52 thesis 0.7um features

3 Outline - Selection Criteria Accreditation: 1.Character of the facility 2.Efficient use of the facility 3.Quality of the nanotechnology research program Accessibility: 4.Users 5.Benefits for Quebec 6.Integration and promotion 7.Development plan 3

4 1. Characteristics of the Facility Facility: over the past 10 years over 13M$ capital equipment invested by Quebec, CFI and NSERC Equipment enables R&D and training in: 1.Nanoelectronics 2.Nanobiology 3.NEMS/MEMS 4.Nanophotonics Providing leadership within QNI: – integrating fabs of 4 major universities in Quebec: – Training: NSERC CREATE ISS (2009) – Infrastructure support: NSERC MRS (2011, in prep.) 4

5 1. Characteristics of the Facility Equipment: Complete NEMS/MEMS fab facility (see section F for details). Complementarity with the global QNI offer (see Section C of application). Unique character of McGill Nanotools Microfab: Ecosphere of integrated training and world-class R&D in terms of processing know-how and established collaborations along 2 major axes: – fundamental – industrial – interdisciplinary (medicine – biology – chemistry – physics – ECE – materials science – tissue eng.) 5

6 Unique Ecosphere: Green Technology 6 Growing, understanding, processing and integrating InN for energy and sensing applications University: Z. Mi (ECE), G. Gervais (Physics), P. Kambhampati (Chemistry), T. Szkopek (ECE), A. Kirk (ECE), Lennox (Chemistry), R. Sladek (Genomics) Companies: ICP Solar Technologies, Future Lightning Solutions, Silonex Inc. DNA Landmarks (St. Jean-sur-Richelieu, QC), BASF Government and Crown Corporations: IREQ (Hydro Quebec), DRDC (Val Cartier, QC), Canadian Space Agency (Brossard, QC)

7 Unique Ecosphere: Green Technology MBE growth of GaN nanowires (Z. Mi) Closed loop growth-fabrication-characterization- application Proximity to fab crucial! 7 Worlds most efficient phosphor-free white light LEDs: Devices grown in McGill MBE lab and fabricated in McGill Nanotools Microfab. 17.8.2011: $ 667,500 MDEIE for commercialization (wafer scale demonstration)! McGill leads the pack in nanoscale nitride semiconductors. Only nitride MBE system in Canada. Vol. 11, 1919 (2011).

8 GaAs Substrate Zetian Mi, ECE, McGill Integrated tube lasers waveguides on Si OSA Optics Express 19, 12164 (2011) Fabrication of Optical Ring Resonators 8

9 Unique Ecosphere: SiC 9 SiC Micromachining compatible with CMOS technologies University: Mourad el-Gamal (ECE, McGill), Srikar Vengallatore (Mechanical, McGill) Companies: MEMS-Vision (Montreal), Thales Inc., Boston Microsystems

10 The Vision Very small, for portable devices … Batch fabrication, for very low cost Endless functionalities Much less battery consumption 10 + Micro Mechanical Sensors & Actuators = MEMS (Micro Electro-Mechanical Systems)

11 State-of-the-Art in MEMS Integration 11 MEMS Technology Connections IC Technology MEMS Connections IC At least three manufacturing or assembly facilities are needed

12 Objective: Growing the mechanical devices on top of the electronics using IC compatible technologies 12 Challenges: Incompatible temperatures, materials, and chemicals.

13 - High elastic modulus - High acoustic velocity - High fracture strength - Sustains higher temp. - Inert surfaces - Resists corrosion, erosion, and radiation - Biocompatible A Breakthrough Material ? 13 Before New Inventions: - Difficult to deposit - High temp. processing - Not compatible with IC manufacturing - High residual stresses - Difficult & slow etching and deposition SiC is routinely used in the manufacturing of CMOS electronics, for example in some of todays state-of-the-art and very high-end microprocessors. Metals IC & MEMS

14 Problems Solved - MoSiC MEMS (El-Gamal, McGill) patented, published, commercialization venture started – MEMS Vision Inc. Harp-like Vibration SensorsMicro Beam ResonatorsPressure Sensors Input Isolation Micro Switches InputOutput Actuation Isolation Output Input Square ResonatorsTunable Capacitors Input Output 14

15 Stress Control < 50 MPa of stress - Small gaps (high sensitivity) - High initial sensors accuracies High Yield Problems Solved - MoSiC MEMS Processing and materials know-how key! Many have tried, all others have failed! 15

16 Unique Ecosphere: Nanobiotech & Health Nanofluidics Microfluidic systems 16 3D microfluidic probe: Shear free gradient at the stagnation point for cell chemotaxis studies. Juncker et al., Nature Commun. 2 465 (2011) nanochannel 100 nm Reisner et al., PNAS (2010) Sculpting the energy landscape of polymers and DNA. DNA melting assay. Si pins for multi-spotting proteins. System used to identify 6 relevant markers for breast cancer. Developing protein chip. Pla-Roca et al. Mol. Cell. Prot. (under review) Myoblast response to RGD Peptide Gradient (MNI)

17 reservoirs nanopore nanochannel nanopore in 20nm thick SiN x membrane (made via TEM milling) reservoirs nanopore nanochannel nanopore in 20nm thick SiN x membrane (made via TEM milling) reservoirs nanopore nanochannel nanopore in 20nm thick SiN x membrane (made via TEM milling) reservoirs nanopore nanochannel nanopore in 20nm thick SiN x membrane (made via TEM milling) nanopore in 20nm thick SiN x membrane (made via TEM milling) Conventional NanoporeNanopore Nanochannel Concept: Nanopore-Nanochannel Device reservoirs nanopore nanochannel Reisner (Physics, McGill) 17

18 Nanopore-Nanochannel: Device Fabrication loading microchannel Membrane (50x50μm) nanochannel 10μm nanopore TEM image of nanopore embedded in nanochannel 100nm 18

19 Other concrete example of interdisciplinary interactions Plasmonic Micro-array Biosensor Low cost 24,000 element plasmonic sensing array based on patterned, functionalized self assembled gold nano rods. Read-out: absorption spectrum shift. Integrated system demonstrated. Currently being tested with leishmania (protozoan infection common in northern Asia), in collaboration with B. Ward (Fac. of Medicine) Kirk (ECE), Lennox (Chem.) and Reven (Chem.) 19 Gold nanorods 100 nm Read-out cartridge Completed chip Cantilever based biochemical sensing Functionalized microfabricated cantilevers transduct electrochemical signal (Lennox (Chem.), Sladek (Genomics) & Grutter (Physics)). Systems integration in collaboration with A. Boisen (DTU) and M. Roukes (Cal Tech). Transfer of fundamental insights to nanowire sensors: Si nanowires (M. Reed, Yale) and InN nanowires (Z. Mi (ECE) and DNA Landmarks Inc.).

20 Unique Ecosphere Micro/NanoSystems 20 10 nm Grutter (Physics, McGill), Guo (Physics, McGill), Silva (Chemistry UdM), Beerens (ECE, Sherbrooke) Microelectronic Engineering 87, 652 (2010) Advanced Materials 21, 2029 (2009) (including cover page) J. Phys.: Condens. Matter 21, 423101 (2009) (invited topical review) Phys. Rev. Lett. 100, 186104 (2008) Light off Light on CuPc:PTCDI deposited on KBr PTCDA on KBr(001)

21 Unique Ecosphere Micro/NanoSystems Molecular electronics, OPV, CNT, graphene, nanowires for topological quantum computing,... 21 graphene FET memory cells T. Szkopek (ECE, McGill), R. Martel (Chem., UdM) M. Siaj, (Chem. UQAM) A. Champagne (Concordia) SNS Z. Mi (ECE), T. Szkopek (ECE, McGill), G. Gervais (Physics, McGill) Suspended bridge CNT device

22 3. Quality of Nanotechnology Research Programs 22 From NanoQuebecs website:

23 Unique Ecosphere Training: New type of students: – Sébastien Ricoult: neuroengineering PhD with extensive fab experience. Industry needs such people! – Michael Ménard: ECE McGill -> Cornell -> UQAM – Frédéric Nabki: ECE McGill -> UQAM (NanoQAM) NSERC CREATEs: ($900k p.a. total) – Integrated Sensor systems (2009); PI Kirk – Neuroengineering (2010); PI Lennox – Nanobiomachines (2010); PI Gehring Nanobiotechnology Microfab Course: Hands-on course, organized by D. Juncker 4 th year in 2011, attracted 26 participants (national, international and industry). 23

24 2. Efficient operation Our guiding principle is to fund operating costs (including maintenance/repairs) from user fees. Keeping the Microfab ready for use requires dedicated and highly trained personnel – which is financed by a combination of other contributions. Responsive, transparent management structure. User driven 24

25 4. Usage 25 Source: annual McGill Nanotools Microfab reports 60% increase in 2 years

26 4. Usage 26 60% increase in 2 years Expect 75% increase in total hours per year: Expect to be able to offer better and more services to outside users (both academic and non-academic). Need to run longer hours. Expect to increase access by bio and med. researchers. 40% of PIs hired since 2005 45% increase in processing tool capital investment: 3M$ new equipment in 2009/10 (ebeam, DRIE, spray coater, PECVD, evaporator, sputtering)

27 NanoQuebec funding 1. Increase capacity of McGill Nanotools Microfab Requests by users for extended hours. This is a result of 50 new faculty since inception and hands-on component of NSERC CREATE programs. Customer services for the life sciences: large number of untapped biomed users (2 CREATE, 1 CIHR Systems Biology Training grant). 2. Develop active industrial outreach From academia to industry. Coordinate disperse academic know-how that solves real-world problems for industry and facilitate the creation of start-ups. Complimentary to NQ outreach coordinator. 3. Enable sustainable funding model 27

28 5. Benefits to Quebec Empirical observation: most companies access microfabs through collaboration with academic research groups. They value the expertise and access to world class facilities of academic researchers; very few companies have the need or interest to directly access the fab. In 2010, direct, funded collaborations with more than 10 companies from Quebec in key economic sectors (see p.29 of 34 for list). In 2010 NEW contracts/grants worth 2.7M$ p.a. were obtained (2009: 1.3M$). These grants are often multi-year and fund HQP, R&D as well as fab access. 28

29 6. Integration and Promotion within the QNI Integration & Leadership: Founding member of NQ (2000) NSERC CREATE ISS (2009) NSERC MRS QNI (to be submitted 2011) Increased international visibility: In 2010 McGill nano researchers have signed MOUs and started exchanging researchers with: – RIKEN (Japan): green chemistry, nanoelectronics – IIT Mumbai (India): micro and nanofabrication training – IoP CAS (Beijing): nanoelectronics and photonic 29 Google microfab: ranks nr. 2 !!!

30 7. Development plan for the facility Development and upgrade plans for the McGill Nanotools Microfab are driven by its users and coordinated with other facilities. In upcoming CFI call VII the McGill Nanotools Microfab facility will replace, upgrade and expand equipment necessary for: – Fabrication, including material deposition and growth – Packaging and assembly – Characterization In particular we are planning to establish a rapid prototyping facility suitable for bio/medical applications 30

31 Summary Unique R&D and training ecosystem: from fundamental to applied, across all disciplines. Broad user base and efficient management – NanoQuebec and partners finance ready for business status; users pay for operation. Close interactions of Science & Eng. with biomed R&D unique among all NanoQuebec supported fabs. By increasing fab manpower we will capitalize on this opportunity. New outreach and industrial coordinator to facilitate knowledge transfer and the creation of start-ups. NanoQuebec funding to partially replace unsustainable current bridge funding from MIAM. 31

32 What will 300k$ from NanoQuebec enable? Extended operation hours needed due to usage increase. Incorporation of unique R&D ecosphere within NQ – from fundamental to applications. Grow and nurture emerging applications in bio med. In-reach coordinator to take advantage of academic know-how and facilitate transfer to industry. 32

33 Budget details: Expenses 33 (see p 14 of 34 for overview)

34 Budget details: Expenses 34 Future:

35 Budget details: Revenues 35 (*) CREATE: cash from McGill support of ISS, Neuroeng. and Nanobiomachines for help with facilitating internships as a result of Business Development person. (see p. 14 of 34 for overview)

36 Budget details: Revenues 36 Current (past): (partial) FTE to bridge funding shortfall and establish well functioning infrastructure. Future: Equivalent in cash, frees up the previously used manpower to support intensified R&D and training at CMP. Note: Increased MIAM funds will directly benefit fab – training, networking, characterization facility support (e.g. SEM, TEM).

37 Complementarity with other microfabs 37 Toolset (in particular spray coater, wafer bonder) Processing know-how (SiC, nitrides, microfluidic systems) Leadership Training

38 Statistiques d'utilisation des QNI 38 Source: RQMP annual report (2011)

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