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McGill Nanotools Microfab Facility: MCRF Site Visit

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Presentation on theme: "McGill Nanotools Microfab Facility: MCRF Site Visit"— Presentation transcript:

1 McGill Nanotools Microfab Facility: MCRF Site Visit
Peter Grutter Academic Director September 2011

2 McGill Nanotools Microfab Facility
3300sq.ft. facility, 1000 sq.ft. clean room space. $13 million capital investment, $615K/year operating budget In 2010: 87 individual projects 42 principal investigators 38% users external to McGill Internal users from 5 faculties 10 corporate users 91 students/PDFs trained At least 63 peer reviewed papers, 6 patents, 52 thesis 0.7um features

3 Outline - Selection Criteria
Accreditation: Character of the facility Efficient use of the facility Quality of the nanotechnology research program Accessibility: Users Benefits for Quebec Integration and promotion Development plan

4 1. Characteristics of the Facility
Facility: over the past 10 years over 13M$ capital equipment invested by Quebec, CFI and NSERC Equipment enables R&D and training in: Nanoelectronics Nanobiology NEMS/MEMS Nanophotonics Providing leadership within QNI: integrating fabs of 4 major universities in Quebec: Training: NSERC CREATE ISS (2009) Infrastructure support: NSERC MRS (2011, in prep.) Section C contains a list of our equipment

5 1. Characteristics of the Facility
Equipment: Complete NEMS/MEMS fab facility (see section F for details). Complementarity with the global QNI offer (see Section C of application). Unique character of McGill Nanotools Microfab: Ecosphere of integrated training and world-class R&D in terms of processing know-how and established collaborations along 2 major axes: fundamental – industrial interdisciplinary (medicine – biology – chemistry – physics – ECE – materials science – tissue eng.) Section F contains a list of all of our equipment. Science& engineering -> commercialization and companies

6 Unique Ecosphere: Green Technology
Growing, understanding, processing and integrating InN for energy and sensing applications University: Z. Mi (ECE), G. Gervais (Physics), P. Kambhampati (Chemistry), T. Szkopek (ECE), A. Kirk (ECE), Lennox (Chemistry), R. Sladek (Genomics) Companies: ICP Solar Technologies, Future Lightning Solutions, Silonex Inc. DNA Landmarks (St. Jean-sur-Richelieu, QC), BASF Government and Crown Corporations: IREQ (Hydro Quebec), DRDC (Val Cartier, QC), Canadian Space Agency (Brossard, QC)

7 Unique Ecosphere: Green Technology
MBE growth of GaN nanowires (Z. Mi) Closed loop growth-fabrication-characterization-application  Proximity to fab crucial! McGill leads the pack in nanoscale nitride semiconductors. Only nitride MBE system in Canada. Vol. 11, 1919 (2011). World’s most efficient phosphor-free white light LEDs: Devices grown in McGill MBE lab and fabricated in McGill Nanotools Microfab. : $ 667,500 MDEIE for commercialization (wafer scale demonstration)!

8 Fabrication of Optical Ring Resonators
Zetian Mi, ECE, McGill GaAs Substrate Integrated tube lasers waveguides on Si OSA Optics Express 19, (2011)

9 Unique Ecosphere: SiC SiC Micromachining compatible with CMOS technologies University: Mourad el-Gamal (ECE, McGill), Srikar Vengallatore (Mechanical, McGill) Companies: MEMS-Vision (Montreal), Thales Inc., Boston Microsystems

10 The Vision + = Very small, for portable devices …
Batch fabrication, for very low cost Endless functionalities Much less battery consumption MEMS (Micro Electro-Mechanical Systems) Micro Mechanical Sensors & Actuators + =

11 State-of-the-Art in MEMS Integration
MEMS Technology Connections IC Technology At least three manufacturing or assembly facilities are needed MEMS Connections IC

12 Challenges: Incompatible temperatures, materials, and chemicals.
Objective: “Growing” the mechanical devices “on top of” the electronics using IC compatible technologies Challenges: Incompatible temperatures, materials, and chemicals.

13 A Breakthrough Material ?
- High elastic modulus - High acoustic velocity - High fracture strength - Sustains higher temp. - Inert surfaces - Resists corrosion, erosion, and radiation - Biocompatible Metals IC & MEMS Before New Inventions: - Difficult to deposit - High temp. processing - Not compatible with IC manufacturing - High residual stresses - Difficult & slow etching and deposition SiC is routinely used in the manufacturing of CMOS electronics, for example in some of today’s state-of-the-art and very high-end microprocessors.

14 Problems Solved - MoSiC™ MEMS (El-Gamal, McGill)
patented, published, commercialization venture started – MEMS Vision Inc. Harp-like Vibration Sensors Micro Beam Resonators Pressure Sensors Input Isolation Micro Switches Output Actuation Square Resonators Tunable Capacitors

15 Problems Solved - MoSiC™ MEMS
Processing and materials know-how key! Many have tried, all others have failed! Stress Control High Yield Frechette & Vengallatore with GM: Understanding internal damping of materials enables efficient energy harvesting. - Small gaps (high sensitivity) - High initial sensors accuracies < 50 MPa of stress

16 Unique Ecosphere: Nanobiotech & Health
Nanofluidics Microfluidic systems Sculpting the energy landscape of polymers and DNA. DNA melting assay. 3D microfluidic probe: Shear free gradient at the stagnation point for cell chemotaxis studies. Juncker et al., Nature Commun (2011) nanochannel Si pins for multi-spotting proteins. System used to identify 6 relevant markers for breast cancer. Developing protein chip. Pla-Roca et al. Mol. Cell. Prot. (under review) 100 nm Reisner et al., PNAS (2010) Myoblast response to RGD Peptide Gradient (MNI)

17 Concept: Nanopore-Nanochannel Device
Conventional Nanopore Nanopore Nanochannel nanopore in 20nm thick SiNx membrane (made via TEM milling) reservoirs nanopore nanochannel Reisner (Physics, McGill) reservoirs nanopore nanochannel nanopore in 20nm thick SiNx membrane (made via TEM milling) reservoirs nanopore nanochannel nanopore in 20nm thick SiNx membrane (made via TEM milling) reservoirs nanopore nanochannel nanopore in 20nm thick SiNx membrane (made via TEM milling) reservoirs nanopore nanochannel nanopore in 20nm thick SiNx membrane (made via TEM milling)

18 Nanopore-Nanochannel: Device Fabrication
loading microchannel nanochannel Membrane (50x50μm) 10μm nanopore Interdisciplinary – spanning physics, chemistry, genomics, biomed. engineering, ECE and neuroscience: Nano/microfluidics (Gervais, Reisner, Grutter, Lennox, Barrett, Sladek, Juncker, Kirk, Kennedy, Colman, deKoninck) TEM image of nanopore embedded in nanochannel 100nm

19 Other concrete example of interdisciplinary interactions
Gold nanorods 100 nm Read-out cartridge Completed chip Plasmonic Micro-array Biosensor Low cost 24,000 element plasmonic sensing array based on patterned, functionalized self assembled gold nano rods. Read-out: absorption spectrum shift. Integrated system demonstrated. Currently being tested with leishmania (protozoan infection common in northern Asia), in collaboration with B. Ward (Fac. of Medicine) Kirk (ECE), Lennox (Chem.) and Reven (Chem.) Cantilever based biochemical sensing Functionalized microfabricated cantilevers transduct electrochemical signal (Lennox (Chem.), Sladek (Genomics) & Grutter (Physics)). Systems integration in collaboration with A. Boisen (DTU) and M. Roukes (Cal Tech). Transfer of fundamental insights to nanowire sensors: Si nanowires (M. Reed, Yale) and InN nanowires (Z. Mi (ECE) and DNA Landmarks Inc.). Sealing of cantilever chip: PDMS technology from Reisner Only one person each on these 2 examples accesses the fab. But enables many interactions!

20 Unique Ecosphere Micro/NanoSystems
10 nm Light off Light on CuPc:PTCDI deposited on KBr Stencil development: Sherbrooke-McGill collaboration, use FIB at Ecole: enables bridging of length scales PTCDA on KBr(001) Grutter (Physics, McGill), Guo (Physics, McGill), Silva (Chemistry UdM), Beerens (ECE, Sherbrooke) Microelectronic Engineering 87, 652 (2010) Advanced Materials 21, 2029 (2009) (including cover page) J. Phys.: Condens. Matter 21, (2009) (invited topical review) Phys. Rev. Lett. 100, (2008)

21 Unique Ecosphere Micro/NanoSystems
Molecular electronics, OPV, CNT, graphene, nanowires for topological quantum computing, ... T. Szkopek (ECE, McGill), R. Martel (Chem., UdM) M. Siaj, (Chem. UQAM) Z. Mi (ECE), T. Szkopek (ECE, McGill), G. Gervais (Physics, McGill) SNS A. Champagne (Concordia) SNS device fabricated at Nanotools by Mi, Szkopek and Gervais. SIZE??? graphene FET memory cells Suspended bridge CNT device

22 3. Quality of Nanotechnology Research Programs
From NanoQuebec’s website: Conclusion: world class research program enabled in Nanotechnology (as defined by NanoQuebec)

23 Unique Ecosphere Training: New type of students:
Sébastien Ricoult: neuroengineering PhD with extensive fab experience. Industry needs such people! Michael Ménard: ECE McGill -> Cornell -> UQAM Frédéric Nabki: ECE McGill -> UQAM (NanoQAM) NSERC CREATEs: ($900k p.a. total) Integrated Sensor systems (2009); PI Kirk Neuroengineering (2010); PI Lennox Nanobiomachines (2010); PI Gehring Nanobiotechnology Microfab Course: Hands-on course, organized by D. Juncker 4th year in 2011, attracted 26 participants (national, international and industry).

24 2. Efficient operation Our guiding principle is to fund operating costs (including maintenance/repairs) from user fees. Keeping the Microfab ‘ready for use’ requires dedicated and highly trained personnel – which is financed by a combination of other contributions. Responsive, transparent management structure. User driven Regular user meetings to dessiminate information, obtain feedback, decide on new/obsolete equipment.

25 4. Usage 60% increase in 2 years
50% of evaluation weight: Accessibility: usage, benefits, integration, development plan. Source: annual McGill Nanotools Microfab reports

26 4. Usage 40% of PIs hired since 2005
45% increase in processing tool capital investment: 3M$ new equipment in 2009/10 (ebeam, DRIE, spray coater, PECVD, evaporator, sputtering) 60% increase in 2 years Expect 75% increase in total hours per year: Expect to be able to offer better and more services to outside users (both academic and non-academic). Need to run longer hours. Expect to increase access by bio and med. researchers. 50% of evaluation weight: Accessibility: usage, benefits, integration, development plan.

27 NanoQuebec funding 1. Increase capacity of McGill Nanotools Microfab
Requests by users for extended hours. This is a result of 50 new faculty since inception and hands-on component of NSERC CREATE programs. Customer services for the life sciences: large number of untapped biomed users (2 CREATE, 1 CIHR Systems Biology Training grant). 2. Develop active industrial outreach ‘From academia to industry’. Coordinate disperse academic know-how that solves real-world problems for industry and facilitate the creation of start-ups. Complimentary to NQ outreach coordinator. 3. Enable sustainable funding model

28 5. Benefits to Quebec Empirical observation: most companies access microfabs through collaboration with academic research groups. They value the expertise and access to world class facilities of academic researchers; very few companies have the need or interest to directly access the fab. In 2010, direct, funded collaborations with more than 10 companies from Quebec in key economic sectors (see p.29 of 34 for list). In 2010 NEW contracts/grants worth 2.7M$ p.a. were obtained (2009: 1.3M$). These grants are often multi-year and fund HQP, R&D as well as fab access. 50% of evaluation weight

29 6. Integration and Promotion within the QNI
Integration & Leadership: Founding member of NQ (2000) NSERC CREATE ISS (2009) NSERC MRS QNI (to be submitted 2011) Increased international visibility: In 2010 McGill nano researchers have signed MOUs and started exchanging researchers with: RIKEN (Japan): green chemistry, nanoelectronics IIT Mumbai (India): micro and nanofabrication training IoP CAS (Beijing): nanoelectronics and photonic Google ‘microfab’: ranks nr. 2 !!! 50% of evaluation weight

30 7. Development plan for the facility
Development and upgrade plans for the McGill Nanotools Microfab are driven by its users and coordinated with other facilities. In upcoming CFI call VII the McGill Nanotools Microfab facility will replace, upgrade and expand equipment necessary for: Fabrication, including material deposition and growth Packaging and assembly Characterization In particular we are planning to establish a rapid prototyping facility suitable for bio/medical applications 50% of evaluation weight

31 Summary Unique R&D and training ecosystem: from fundamental to applied, across all disciplines. Broad user base and efficient management – NanoQuebec and partners finance ‘ready for business’ status; users pay for operation. Close interactions of Science & Eng. with biomed R&D unique among all NanoQuebec supported fabs. By increasing fab manpower we will capitalize on this opportunity. New outreach and industrial coordinator to facilitate knowledge transfer and the creation of start-ups. NanoQuebec funding to partially replace unsustainable current bridge funding from MIAM. 50% of evaluation weight

32 What will 300k$ from NanoQuebec enable?
Extended operation hours needed due to usage increase. Incorporation of unique R&D ecosphere within NQ – from fundamental to applications. Grow and nurture emerging applications in bio med. In-reach coordinator to take advantage of academic know-how and facilitate transfer to industry.

33 Budget details: Expenses
(see p 14 of 34 for overview)

34 Budget details: Expenses
Future:

35 Budget details: Revenues
(*) CREATE: cash from McGill support of ISS, Neuroeng. and Nanobiomachines for help with facilitating internships as a result of Business Development person. Users are covering a bit more than operating expenses ($142,000, projected $240,000) (see p. 14 of 34 for overview)

36 Budget details: Revenues
Current (past): (partial) FTE to bridge funding shortfall and establish well functioning infrastructure. Future: Equivalent in cash, frees up the previously used manpower to support intensified R&D and training at CMP. Note: Increased MIAM funds will directly benefit fab – training, networking, characterization facility support (e.g. SEM, TEM). 100k$ of university funding unsecured right now. Conditioned on successful NQ funding. Reallocation of 200k$ to some of the other 8M$ MDEIE funded recent investments to get them up and running and organized as competitive facilities. (3 years ago our facility was not funded by NQ). The 300k$ of past McGill contribution was a stop-gap measure. The question you have to ask yourselves too is what would NQ loose if this facility would have to shut down or strongly reduce operational capabilities due to a lack of funding and thus not be able to capitalize on its capabilities and investmens.

37 Complementarity with other microfabs
Toolset (in particular spray coater, wafer bonder) Processing know-how (SiC, nitrides, microfluidic systems) Leadership Training

38 Statistiques d'utilisation des QNI
User fee / total budget = 31% (this proposal) Source: RQMP annual report (2011)


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