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T h e Y i e l d M a n a g e m e n t C o m p a n y C O N F I D E N T I A L iPartner Support Offerings... Partnering for reduced cost and higher uptime.

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Presentation on theme: "T h e Y i e l d M a n a g e m e n t C o m p a n y C O N F I D E N T I A L iPartner Support Offerings... Partnering for reduced cost and higher uptime."— Presentation transcript:

1 T h e Y i e l d M a n a g e m e n t C o m p a n y C O N F I D E N T I A L iPartner Support Offerings... Partnering for reduced cost and higher uptime

2 Rev · C O N F I D E N T I A L iPartner KLA-Tencor, the premier company in yield management, introduces a breakthrough in semiconductor customer support

3 Rev · C O N F I D E N T I A L iPartner iPartner …... A unique relationship between customers and KLA-Tencor onsite and online resources.... A partnership that allows our customers to tailor their support level to match their specific manufacturing requirements.

4 Rev · C O N F I D E N T I A L iPartner New service offerings from KLA-Tencor for your iSupport-compatible systems With KLA-Tencor as your support partner, youll cut your costs and improve tool uptime.

5 Rev · C O N F I D E N T I A L iPartner: Advantages Whats in it for you? Reduced cost, higher uptime A choice of online/onsite support solutions Pick the one that matches your requirements Go online 7x24 for fast response and rapid resolution Get faster onsite resolution for more complex issues Realize immediate savings

6 Rev · C O N F I D E N T I A L iPartner Support Offerings Balances Cost and Performance Reduces Cost and Increases Uptime iPerformance Optimizes Tool Performance Less Critical Applications Complex Tools/Critical Applications 7 x 24 Online Support i724 iValue iShare Saves More through Shared Responsibility Highest Performance Lowest Cost

7 Rev · C O N F I D E N T I A L iPartner: How it Works 7x24 round-the-clock online service iPartner offerings are based on a unique partnership among KLA-Tencor Online Support Center (OSC) engineers, K-Ts customer support engineers and your engineers Increased coverage, faster response Common issues are quickly resolved (e.g. lockups, alignment errors, calibrations, etc.), reducing the need for onsite dispatch Complex issues are assisted via online diagnostics and parts ordering, reducing onsite MTTR Fast resolution, shared savings Reduced downtime

8 Rev · C O N F I D E N T I A L Comparison to Conventional Support FeatureFulli724 Onsite Support Coverage 5x8 Off-shift Support Coverage Uplift7x24 Online < 2 hrs Online 4 covered hrs Onsite Online Parts Diagnosis & Ordering No7x24 Cost Savings NoYes Remote Operation, Data Transfer, E-10 Reporting NoYes Price Standard Standard Minus Saver Awards 4 covered hrs Onsite Response Time i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster

9 Rev · C O N F I D E N T I A L iPartner: Cost Saving Benefits Using 24x7 online support reduces onsite costs We share the savings with you Savings depends upon the following Number of compatible tools OSC utilization Whether or not you have an iDM server

10 Rev · C O N F I D E N T I A L iPartner Saver Awards For example, your fab with $XM service entitlement: KLA-Tencor will pay for installing, licensing and maintaining the iDM We will pay for the license fees of connected tools We will provide 7x24 online support We share savings after paying for the license and maintaining the server if you meet the online usage target Expected annual saving up to $XXXXX iPartner Offering OSC Usage Targets Savings Apply Toward iPartner Offerings 85 to 89%Neutral 90 to 94%$YYYYY 95% or More$ZZZZZ iPerformance i724 iValue

11 Rev · C O N F I D E N T I A L iPartner: Longer-term Benefits iPartner support offerings are extremely flexible Support is scaled to match your specific requirements How complex are your KLA-Tencor tools? How critical are your applications? Where are you in the production cycle? What is your level of maintenance expertise? Over time, your requirements may change Transition to lower-cost iPartner offering No more one-cost fits all support solution

12 Rev · C O N F I D E N T I A L iPartner: Longer-term Benefits Tool health monitoring System optimization service Intra-fab remote tool operation Future features will further reduce downtime and improve productivity

13 Rev · C O N F I D E N T I A L iPartner Support Offerings at a Glance

14 Rev · C O N F I D E N T I A L iPartner - Availability iPartner Service Offerings Availability iDM Compatible tools iPerformance i724 iValue iShare 2350 AIT2,3 ASET F5X Archer 10 SP1 5XXX XP Available Q3CY02 Available Q4CY02 213X NT

15 Rev · C O N F I D E N T I A L iPartner: Current Customers Beta tested at major semiconductor manufacturers in North America iSupport technology widely accepted … 20+ customer sites with iDM servers in US, Europe, Taiwan, Japan and Korea More than 200 tools connected to online support

16 Rev · C O N F I D E N T I A L iPartner Make KLA-Tencor your support partner Cut your costs and improve tool uptime Its simply a better way of doing business

17 Rev · C O N F I D E N T I A L Back up

18 Rev · C O N F I D E N T I A L iPartner: Beta Results SP1_TBI Systems Maintainability Metrics Jul-01Sep-01Nov-01Jan-02Mar-02May-02 Hours MTTR Beta Engagement 97% Availability – Customer data Demonstrated MTTR Reduction From 10 to 6 hours Increased Uptime and Reduced Onsite Repair

19 Rev · C O N F I D E N T I A L Price Comparison Example (US) Tool Type# of ToolsBasiciValue $111 AIT II with ADC10$105 SP1-TBI2$36 Archer 102$42 iPartner Saver Awards Discount* NANone-$40 Total Discounted Price24$1,985$1,945 iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster

20 Rev · C O N F I D E N T I A L iPartner Comprehensive Offerings 7 x 8 onsite support 4 covered hour onsite response 7 x 24 online support Remote support Parts diagnosis & ordering 1 hour priority online response All parts and labor for PM and repair Priority escalation Hardware and software revisions Optional onsite off-shift support iPerformance (Q4CY02) Optimizes Tool Performance

21 Rev · C O N F I D E N T I A L iPartner Comprehensive Offerings 5 x 8 onsite support (7 x 8 at select hubs) Onsite response (after working online) 4 covered hours on average for tool-down cases 4 or 8 covered hours for non-tool down cases 7 x 24 online support Remote support Parts diagnosis & ordering 2 hour online response All parts and labor for PM and repair Hardware and software revisions Optional onsite off-shift support available i724 Reduces Cost and Increases Uptime

22 Rev · C O N F I D E N T I A L iPartner Value Offerings 5 x 8 onsite coverage (7 x 8 at select hubs) Onsite response (after working online) 4 covered hours on average for tool-down cases 4 or 8 covered hours for non-tool down cases 7 x 24 online support Remote support Parts diagnosis & ordering 4 hour online response All parts and labor for PM and repair Hardware and software revisions Optional onsite off-shift support available iValue Balances Cost and Performance

23 Rev · C O N F I D E N T I A L iPartner Value Offerings Your engineers perform PMs, calibrations and first level diagnostics 8 K-T onsite visits annually (including one PM visit) 5 x 8 onsite coverage (7 x 8 at select hubs) Onsite response (after working online) 4 or 4 covered hours on average for tool downcases 8 covered hours for non-tool down cases 7 x 24 online support Remote support Parts diagnosis & ordering 4 hour online response All parts for PM and repair; you order authorized parts through OSC On-going skill and PM verification Service bulletins & special purchasable tooling Hardware and software revisions iShare Saves More Through Shared Responsibility

24 Rev · C O N F I D E N T I A L iPartner Saver Awards Example For example, a fab with $2M service entitlement: KLA-Tencor will pay for installing, licensing and maintaining the iDM We will pay for the license fees of connected tools We will provide 7x24 online support We share savings after paying for the license and maintaining the server Expected annual saving up to $40,000 iPartner Offering OSC Utilization Targets Savings Apply Toward iPartner Offerings 85 to 89%Neutral 90 to 94%$15,000 95% or More$40,000 iPerformance i724 iValue

25 Rev · C O N F I D E N T I A L Utilization Metric - iPartner Clarify Data Case History Summary Report Onsite CSE Date / Time minus Case Open Date / Time Percentage Cases Opened prior to CSE onsite plus remote resolution, over all cases Chart Product Family Performance. Chart Overall Performance Chart 3 month rolling average Targets 3 month rolling average over either: 85%, 90% or 95%

26 Rev · C O N F I D E N T I A L Price Comparison Example (US) $121 AIT II with ADC10$116 SP1-TBI2$39 Archer 102$47 iPartner Saver Awards Discount* NANone-$40 Total Discounted Price24$2,177$2,137 i724 Reduces Costs, Provides More Coverage, and Resolves Problems Faster Tool Type# of ToolsFulli724

27 Rev · C O N F I D E N T I A L Price Comparison Example (US) Tool Type# of ToolsBasiciValue $111 AIT II with ADC10$105 SP1-TBI2$36 Archer 102$42 iPartner Saver Awards Discount* NANone-$40 Total Discounted Price24$1,985$1,945 iValue Reduces Costs, Provides More Coverage, and Resolves Problems Faster

28 Rev · C O N F I D E N T I A L iPartner Roadmap V 2.0 (July 02) V 2.7 (2H02) V 3.0 (Q2CY03) Supported Tools iPartner Offerings and Features iDM Features 2350 (V8.0.66) AIT III(V5.0.15SP4) SP1-TBI (V ) ADC (2.0.17NT)** 8X00 (4.0P2 NT) F5x (V2.6) Archer 10 (V1.1*4) 5xxxXP (V14.6) i724, iValue and iShare 7x24 Online Support 7x24 Parts Diagnosis & Ordering Worldwide VPN Service Request from iDM Browser Remote Operation, data transfer E-10 Reporting Previous Tools Plus Next Generation: 2370 SP1-DLS & Next Generation AIT XP Remote Support Only 2401/Viper eS20XP TeraStar ADC Manager iPerformance Tool Health Monitoring and Reporting System Optimization Service Multi-Language Translation Support Unix OS Support Intra-fab Remote Operation (on selected products) Data Table Viewer and export ** = Remote Support Only Previous Tools Plus: CRS 3000 Quantox Others TBD Expanded architecture to connect 75 tools Configurable reporting engine Simplified User Administration Improved Metric reporting with SPC VoIP


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