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170 1500. 65 CGIA Power Switching Converters University of Arkansas.

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Presentation on theme: "170 1500. 65 CGIA Power Switching Converters University of Arkansas."— Presentation transcript:

1 170 1500

2 65 CGIA Power Switching Converters

3 University of Arkansas

4 Micro-Electro-Mechanical Devices Simon S. Ang Professor of Electrical Engineering University of Arkansas USA

5 What is Micro-Electromechanical Device or MEMs? Imagine machines so small they are imperceptible to the human eye. Imagine working machines with gears no bigger than a grain of pollen.

6 What is MEMS? Micro-Electro-Mechanical Systems (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common substrate using micro-fabrication technology.

7 MEMS Applications Air Bag Sensor - crash-bag deployment in automobile (accelerometer) Ink Jet Printer Bio-MEMS – Polymerase Chain Reactor (PCR) for DNA amplification and identification

8 MEMS Accelerometer Automotive -- Testing, Suspension, Air Bags Agricultural -- Harvesting shock & vibration, Production line monitoring Manufacturing -- Testing, Production line monitoring, Shipping monitoring Transportation -- Rail-car sensing, Shipping monitoring, Testing Down Hole Drilling -- Tilt/Attitude sensing, Machinery health NASA -- Vibration Monitoring, Testing (From Silicon Design Inc.,)

9 A Portable PCR Device Biological Detection Technology for Counter – Terrorism (Lawrence Livermore Laboratory)

10 Sandias Micro-Mirror

11 Spider Mite on a Sandias Micro- Mirror

12 Spider Mite Approaching a Sandias Micro-Gear Assembly

13 Micro Spacecrafts

14 Microthruster

15 Microcombustion testing

16 Microthruster Microthruster firing sequence

17 Basic Surface Micromachining Process Sequence I. Deposit Sacrificial Layer II. Pattern Sacrificial Layer III. Deposit Mechanical Layer IV. Pattern Mechanical Layer V. Release Mechanical Layer VI. Test Device +V

18 Microelectronic Fabrication Photomask Fabricated Devices

19 Processing Equipment







26 Aluminum Wire Bonder

27 Gold Wire Bonder

28 Wire Bond Pull Tester

29 Measurement Equipment

30 Microelectronic Cleanroom Operation






36 Wire Bonding

37 Microfluidic Devices Microfluidic devices are MEMS devices with micro-scale (10 -6 m) or nano-scale (10 -9 m) flow channels They come with valves, electrodes, heaters, and other features These microfluidic devices can be used as tiny chemical processing or reaction system, consuming only tiny amount of chemical – micro-TAS (micro total analysis system)

38 Post-type Filter

39 Comb-Type Filter

40 Weir-type Filter Glass cover Silicon plate InletOutlet 50µm

41 Weir-type Filter 50µm

42 Fluorescent Microscope Cell Fluorescent labeled antibody Labeled cell Labeling Detection In Chip Immunofluorescent Cell Detection Glass cover Silicon Plate

43 Beads in the Microchannels Deep channel (before filter chamber) Shallow channel (After filter chamber)

44 Confocal Images of Microchannel Shallow channel Deep Channel

45 Fluent Simulations of Microfilter Chip 1 μ m weir gap Flow rate=2 mm/s 3 μ m weir gap Flow rate=2mm/s 6 μ m weir gap Flow rate=2mm/s 9 μ m weir gap Flow rate=2mm/s

46 Fluent Simulations of Microfilter Chip 50µm 1 μ m weir gap Depth=30 μ m Depth=10 μ m Depth=50 μ m Flow rate=1mm/s Flow rate=0.5mm/s

47 Labeling efficiency along the weir

48 Trapping Efficiency

49 Comparison with the conventional detection on slides On slides –9 steps –Takes more than 1 h –Consumes 20µl cells solution and 25 µl labeling reagent Within filter chip –3 steps –Takes less than 0.5h –Consumes 2 µl cells solution and labeling reagent

50 Pillar-Type Microfludic Filter Chip

51 Future work Next generation chip: –Comb-type chip –Multiplex Application in DNA array Application in ELISA Incorporate QD

52 Other Related Work Quantum dot labeling Bacteria sensors Brain probes Recording integrated circuitries Microelectronics Packaging

53 Quantum Dots Detection System

54 Quantum Dots Labeling of C. parvum (red) and G. Lamblia (Green) Quantum Dots as a Novel Immunofluorescent Detection System forCryptosporidium parvum and Giardia lamblia, L. Zhu, S. Ang, & Wen- Tso Liu, in Applied and Environmental Microbiology.

55 Interdigitated Electrode Sensor

56 What is a Bio-Sensor? Biologically sensitive Material –Antibodies –Enzymes –DNA Probes Transducing Element/System –Electrochemical –Optical –mass Interfacing –Fluorescent –Chemiluminescent –Enzymatic substrate Direct Indirect

57 E-coli Sensing Principle Au Electrode E. coli O157:H7 cells Fe[(CN) 6 ] 3-/4- Charge transfer is blocked Streptavidin Self Assembled Monolayer

58 E-coli cells on the surface of bio-sensor before washing away non-specific binding - 65 x 100 μm window size 1000 X Magnification Scanning Electron Micrograph of E-Coli on Bio-Sensor

59 Surface of Electrode (AFM)

60 Multi-site potential and chronoamperometry brain probes Brain Sensors Neural Signal Recording Electrodes Nano Interdigitated Array Electrochemical Recording Electrode Potential Electrode

61 A brain probe mounted and wire bonded on a circuit board carrier Brain Sensors

62 SEM Photo of a multi-site potential and chrono- amperometry brain probe Brain Sensors

63 SEM Photo of a multi-site potential and chrono- amperometry brain probe Brain Sensors

64 Silicon Microprobe Process Flow


66 Brain Probe Recording in Rats Brain

67 Extracellular Field Potentials in Olfactory Bulb of A Male Rat Stainless steel microwires - 100 µm diameter, enamel-insulated 16-site brain microprobe A) Match in evoked potential amplitude and waveform across the fourrecording sites when occupying the same position in the olfactory bulb B) Sharp reversal of polarity as each recording site across the mitral cell later,indicating that crosstalk between channels is minimal.

68 Recording Integrated Circuit

69 Microelectronic Packaging





74 Thank You Questions ?

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