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Optical setup & MEMS simulations Jayan Ozhikandathil Supervisor: Prof. Yves-Alain Peter Laboratary for Micro and Nanosystems Département de génie physique.

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Presentation on theme: "Optical setup & MEMS simulations Jayan Ozhikandathil Supervisor: Prof. Yves-Alain Peter Laboratary for Micro and Nanosystems Département de génie physique."— Presentation transcript:

1 Optical setup & MEMS simulations Jayan Ozhikandathil Supervisor: Prof. Yves-Alain Peter Laboratary for Micro and Nanosystems Département de génie physique - Polytechnique Montréal

2 Introduction Measurements: Reflection and transmission spectra with normal incidence of white light Reflection and transmission spectra analysis as a function of angle of incidence Optical setup includes: –A broad band source –Spectroscopy instrument High resolution –Optical components

3 Characterisation setup detector camera 2camera 1 source polariser iris flip mirror flip mirror beam splitter sample lens Measurements 1.Reflection 2.Transmission 3.Angular dependence

4 Rotation stage XYZ stage Single axis stage XYZ stage Metal (steel )block Microscope objective 562 xyz Newport UTR 120 Newport UMR Newport Microscope objective (58373)

5 Reflection spectrum as function of θs 2θs θiθi θrθr θsθs s D sample rotation

6 Optical setup: future tasks Realization of complete setup Measurements of transmission, reflection spectra and angular dependence on it. Studies on polarization dependence on spectra Behavior of QD emission on PhC Slab Behavior of QD emission with lateral and vertical tuning of double layer PhC Behavior of QD emission with vertical tuning of single layer PhC

7 MEMS for the tuning of Photonic crystal Tuning of optical properties of PhC slabs can be achieved in a double layer PhC arrangement SiN SiO 2 Si SiN SiO 2 Si + - ~ Lateral tuning Vertical tuning

8 MEMS actuator design using CoventorWare Undesirable effects due to levitation effects in fields in the vertical axis ~20nm upward movement noticed 1. Lateral Tuning Displacement vs. voltage

9 MEMS Lateral tuning… 2. Lateral tuning Negligible upward movement

10 Single slab Vertically tunable PhC

11 +Ve Single slab tunable PhC Process

12 Future tasks on MEMS design Integration of vertical and lateral tuning in a single design –Design of suitable flexures which supports the vertical and later actuation

13 Thank you!


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