Presentation on theme: "Semiconductor Equipment Fire Suppression Compliance"— Presentation transcript:
1 Semiconductor Equipment Fire Suppression Compliance forSESHA North Texas ChapterbyMatt WymanSemiconductor Division ManagerKOETTER FIRE PROTECTIONMarch 22, 2007
2 Koetter Fire Protection Specialize in Semiconductor Equipment Fire ProtectionGlobal Design & Install CO2 & FWSBulk Control Systems for CO2 & FWSCorrosive Applications (Combustible Plastics)SEMI Standards Fire Protection Task Force LeaderSpecialize in Equipment Design & IntegrationCode Review & Compliance ConsultingNFPA/FM StandardsSEMI StandardsSemiconductor Fire Protection Training SeminarsKFP Test & Training BenchIndustry FormsIndustry White PapersIndustry Presentations (SESHA)7 Texas Locations & International
3 OverviewAre my new and/or existing fire suppression systems compliant?“Quick” CO2 Design ReviewLocal Application NozzlesFire DetectorsNFPA ChangesBulk SystemsHatsuta Cabinex EquipmentFine Water SprayFire Suppression Submittals
4 Fire Codes IFC2006 FM DS 7-7 “Semiconductor Fabrication Facilities” Combustible Tool >4ft. WideSprinkler Head Inside or Gaseous Fire SuppressionFM DS 7-7 “Semiconductor Fabrication Facilities”CO2 or FWS (Fine Water Spray)CO2 is most widely utilizedExtinguish 13kW FireNFPA 12 “Carbon Dioxide”SEMI S14 “Safety Guidelines for Fire Risk Assessment & Mitigation for Semiconductor Manufacturing Equipment”SEMI S2 “Environmental, Health, & Safety Guideline for Semiconductor Manufacturing Equipment”Chapter 14 “Fire Protection”
5 CO2 Design Total Flood (TF) Enclosed Compartments Mini-EnvironmentsPlenums, Head Cases, Chemical Cabinets50% CO2 Concentration60 Second DischargeCompensate CO2 Demand for:Process Exhaust VentilationDamper Violates SEMI S2Unclosable Openings
6 CO2 Design Local Application (LA) Open Compartments Rate by Volume Working SurfacesRate by Volume“Assumed” 3D Volume30 Second DischargeNo Compensation for Exhaust Ventilation & OpeningsCombination System (TF & LA)Typically 30 Second Discharge
7 Existing CO2 Systems “Quick CO2 Review” Typical “Wet Bench” No CalculationsCheck that Supply = DemandTypical “Wet Bench”Exhaust Rates = ~125cfm/linear foot (typical)“Quick” Demand CalcsTF Demand = 11.5% of Volume (60sec)Volume = Dimension + Exhaust (60sec)LA Demand = Average(8ft = 50lbs, 6ft = 35lbs, 4ft = 20lbs)
8 Quick CO2 ReviewExample – 8’L x 4’D x 6’H Enclosed Plastic Bench-100lbs. CO2Total Volume (TF) = 192cuft x 11.5% = 22.1 lbs.Exhaust Volume (TF) = 125cfm/ft x 8ft x 11.5% = 115 lbs.Total Demand (TF) = 137 lbs. CO2CO2 Supply = NOT ADEQUATEExample – 6’L x 4’D x 5’H Open Solvent Bench-100lbs CO2Working Surface (LA) = 35 lbs. (Typical)Plenum Volume (TF) = 6ft x 4ft x 3ft = 72cuft x 11.5% = 8.3 lbs.Plenum Exhaust (TF) = 125cfm/ft x 6ft x 11.5%/2 = 43.1 lbsTotal Demand = 86.4 lbs.CO2 System = ADEQUATE
9 Nozzle Comparisons LA Nozzles TF Nozzles All have “cone” to absorb discharge pressureReflected discharge from orificeLess exit velocity (same flow rate)Nozzle absorbs most 600psi discharge pressureTF Nozzles“V” Nozzle is “Vent” nozzle (TF)Straight discharge from orificeFull effects of 600+psi discharge pressure on tool (especially baths)Much higher velocity
10 Local Application Nozzles Working Surface Areas (Wet)Cone shaped for “Soft” dischargeCone shape provides larger 2D coverage areaNozzles pointed downward towards back wallProvides “rolling” effect across Working SurfaceSide ViewFront View
11 LA Nozzle Listings/Approvals All Local Application Nozzles Must Have Coverage Chart2D Coverage of LA NozzleAnsul CR D NozzleAnsul D NozzleIdentical NozzlesFM Listing = FM testing
12 LA Nozzle Coverage Does this apply to other manufacturers and models? AnsulHas Other LA NozzlesNot for Wet Bench (different coverage chart)Hatsuta Cabinex-EWTHas FM Approved LA Nozzle for Wet BenchHas Own Coverage ChartChemetronHas FM Approved LA Nozzle(s)KiddeNot for Wet Bench - (different coverage chart)What about Kidde “V” Nozzle for LA?
13 Kidde “V” Nozzle Kidde “V” Nozzle from Compliance review 1st - Listed & Approved by UL/FM as TF Nozzle ONLYNo LA Coverage Chart in Design ManualNOT LISTED/APPROVED FOR USE AS LA NOZZLE“V”=“Vent” type is designed for “high velocity” discharge to overcome exhaust ventilation.2nd - CAN CREATE A SEVERE SPLASH HAZARDMany documented cases where discharge splashed acid bathsDangerous Exposure to Personnel3rd - Kidde began manufacturing and listing of Stainless Steel “V” nozzle in June 2005.Previously only available in brass.Previous SS installations were not listed/approved components4th - Not supported by Kidde for LA Coverage
14 Kidde “V” NozzleCopy of Letter from Kidde regarding use of “V” Nozzle for LA CoverageDated May 26, 2006
15 SS Corrosion Protection Halar Coating for Stainless Steel Nozzles, Fittings, & Tubing in Corrosive AreasCO2 TubingCO2 FittingsCO2 Nozzles
17 Flame Detectors Infrared (IR) & Ultraviolet (UV) Sensors UV IR Quartz WindowCan be “Masked” byGases, Smoke, FumesIRNear Band (4.3µ)Hydrocarbon FireWide Band ( µ)Visible ( µ)Sierra DCR1(S)UV/IRCheapestLeakage ProblemsHF
18 Flame Detectors Cabinex SX-7000 Det-Tronics PM-5MP Fire Sentry FS7 Triple Band IR (Near)Reliability?Chemical Compatibility?Det-Tronics PM-5MPDual Band IR (Near)Really FastFalse Alarm IssuesFire Sentry FS7Near Band, Wide Band™, & Visible IRHydrocarbon & Non-hydrocarbonAlarm & Pre-Alarm Outputs5-sec Alarm Verification (Flash Fires)FirePic HistoryMost Reliable Flame Detector!
19 Flame Detector Reliability False Alarm ImmunityKFP TESTCompare Reliability of FS7 vs. PM-5MP to “Steam”Blackbody IR RadiationAlarm Signal (False Alarm)300ºF - 600ºF6” – 36” DistanceDet-Tronics Technical NoteAlarm from Mini 2” w/o windowAlarm from 1-3” with & w/o windowAlarm from Quartz Halogen 3ft.
20 Spot Smoke Detectors 2 Types 120VAC “First Alert” Spot Smoke DetectorUL Listed as RESIDENTIAL detector24VDC Fire Alarm System Spot Smoke DetectorUL Listed for use with compatible “cross-listed” FACPSEMI S2 Section Fire Detection, Alarm, & Controls&2 All detectors, alarms, and controls be accepted and listed by an accredited laboratory (example UL or FM) and installed in accordance with the terms of that acceptance and appropriate national or international standards (ex. NFPA 72)Spot Detectors are NOT Compliant (NFPA/SEMI/UL)Without connection to Fire Control PanelSpot Detectors require ~2.5% obs./ft. concentrationNot effective in Exhausted or “Open” Compartments
21 NFPA 12 2005 NEW Changes to NFPA 12 2005 Edition Retroactive upon AHJLabels must meet ANSI Z535Orange “Warning” Color“Warning” Triangle SymbolAspiration SymbolOutside Protected SpaceAt Manual ActivationSEMI S1 Compliant
22 NFPA 12 2005 Lockout Valves (Not Required) Required except where personnel can’t enter space ( )Where CO2 can migrate to expose personnel ( )System should “Lockout” during maintenance or testing ( )“Lockout” Valve should be supervisedPressure Switch installed between Supply and Lockout Valves ( )Disable/By-Pass Switch (Required)Electrically operated systems should have service disconnect switch ( )Switch should be supervised (keyed)
23 Bulk Systems High Pressure or Low Pressure CO2 or FWS Benefits Large Supply of Agent to Protect Multiple SystemsMain & ReserveControlled Release of CO2BenefitsFloor SpaceControlsTool UptimeLife Cycle CostNegativeHigher Install CostMajor Retrofit or New Fab Project
24 Bulk CO2 Compliance What is wrong with this design? 40 Tools on 1 HP Manifold System1st - Largest FACP has maximum approval of 10 independent releasing hazardsSolution – Minimum of 4 releasing panels
25 Bulk CO2 Design FACP Approval/Listings Limited to maximum of 10 independent releasing hazards10 Tools
26 Bulk CO2 Compliance Anything else? 2nd - Location of Selector Valves AT EACH TOOL?Where does CO2 go?What about phase change in pipe?How do you Calc this?CAN’T!!
27 Bulk CO2 Design Selector Valves Must Be @ CO2 Supply Location Minimize CO2 LossPer Listed Hydraulic Calculation Programs
29 HATSUTA CABINEX-EWT FM Approved for Semiconductor Tools September 2004Manufactured in Osaka, JapanSpecifically designed for SemiconductorTotal Flood & Local ApplicationExcellent OEM product!Packaged cabinet for cylinder(s) & panelWorldwide Compliance!CABINEX-EN = NOT COMPLIANT IN USA
30 Cabinex-EWT Control Cabinet Up to 2, 100lb. Cylinders Integrated Panel 50 & 100-lbs.1.8’ x 1.7’ x 7.0’ CabinetIntegrated PanelUp to 32 “Addressable” InputsCross-Zoning CapableSingle Release ZoneSolenoid & Gas Cartridge ActuatorsPopular with OEMsTEL, DNS, AMAT
31 Fine Water Spray (FWS) Securiplex Extinguishing Agent Low Pressure Wet Bench ApplicationFM ApprovedExtinguishing AgentFab DI Water (DIW)Fab Nitrogen (N2)Mixed at nozzleDual pipingUnlimited SupplyLow PressurePVDF or PFA Nozzles & Tubing
32 Submittal Documentation Stamped Drawings of CO2 Mechanical & Electrical Systems including IsometricFPE or NICET Level 3CO2 Hazard Design Demand CalculationsCO2 Hydraulic Flow CalculationsPower Supply & Battery Backup CalculationsBill of Material ListEquipment Data Sheet SubmittalsSequence of EventsAcceptance Test & Certification Form
34 Questions Any Questions? Matt Wyman Semiconductor Division Manager KOETTER FIRE PROTECTIONDallas, Texas– cell
35 Discharge Tests Demonstration Various Discharges VIDEO Mock of Open Wet Bench8’W x 1.6’W x 2.5’HRecessed bathsExhaust VentilationVarious DischargesVarious ConfigurationsVIDEO
36 Test Results CO2 Concentrations Analysis See Table All Extinguish Fire SourceIPA/PP Pan FireMeasure CO2 concentrations at various pointsVent type nozzles had significant splashing resultsNot recommended over open bathsFront LeftFront MiddleRear Lower MiddleTest #136%48%51%Test #228%52%39%Test #329%44%24%
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