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June 1, 2014 Multipole for uniformity control of ribbon ion beam Nick White.

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Presentation on theme: "June 1, 2014 Multipole for uniformity control of ribbon ion beam Nick White."— Presentation transcript:

1 June 1, 2014 Multipole for uniformity control of ribbon ion beam Nick White

2 June 1, 2014 Uniformity Control Concept Steel Coils Ion Beam travel US Patent 7,078,713

3 June 1, 2014 Operation of Multipole The following pictures show the effect of adjusting a single pair of coils Note how the beam that passes between these coils is compressed in one direction and expanded in the other The current density in the rest of the beam is unaffected –But there is a slight correctable change in beam overall width

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21 Operation (cont) The following sequence shows the effect of this adjustment on the beam current profile along the longer beam dimension The beam is shown with its density profile overlaid. Note that the profile scale changes. It is linked to the highest density present –The current density at the sides of the beam is not changing The process is entirely linear (unlike the VIISta-80)

22 June 1, 2014 Beam is initially non-uniform

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34 Beam is tuned for best uniformity


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