Fully Depleted (FD) SOI This is what you expect. FDSOI MOSFET Depleted channel. http://www.soisic.com/SOI_keys_benefits.htm
Partially Depleted (PD) SOI What if active Si layer is thick ? Body in channel floating Floating body effect. http://www.soisic.com/SOI_keys_benefits.htm
Is SOI just in the textbooks ? 1987IBIS’s commercial SIMOX wafers (3’’ – 6’’) 1988HP’s 2GHz CMOS circuit 1989TI’s commercial 64k SRAM March 2004Apple’s Xserve G5 End 2004AMD 90nm processor
Novel SOI Devices Dual gate SOI. SOI Single electron transistors.
Double-Gate SOI MOSFET ITRS roadmap – dual gate SOI at 15nm. Thick gate oxide to ensure equal thickness on both sides. IEEE Tran on Elec. Dev. 50,3,March 2003,Ultimately Thin Double-Gate SOI MOSFETs Thomas Ernst et al.
Issues – Negative resist for EBL PMMA resist is a good positive resist for EBL. Do we have a good negative EBL resist high resolution. NO alternate techniques.
Negative Resist – SOI ? EBL. Plasma oxidation. Etching of amorphous silicon. BOX removal.
Negative resist – silicon ? EBL Plasma oxidation Electron cyclotron resonance chlorine etching of silicon.
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