1. Preshower PRR July 5-6 20011 NCSR DEMOKRITOS Production Center : Institute of Microelectronics (IMEL) Regional Center : Institute of Nuclear Physics (INP) Si Detector development for the Preshower in DEMOKRITOS is a joint activity between the two institutes initiated in 1997 Design by INP Fabrication by IMEL Module construction, quality control and test by INP

2. Preshower PRR July 5-6 20012 NCSR DEMOKRITOS short review Three versions tested 60 mm x 60mm preshower detector Ten wafers (4-inch) processed (1997) Good test structures but problematic preshower detectors

3. Preshower PRR July 5-6 20013 NCSR DEMOKRITOS short review 60mm x 60mm preshower detectors with n+ guard ring Fifteen wafers processed (1999) Good test structures, problematic preshower detectors

4. Preshower PRR July 5-6 20014 NCSR DEMOKRITOS short review Detectors from the 1999 batch Detector from the 1997 batch Both fabricated with a 3-inch mask aligner

5. Preshower PRR July 5-6 20015 NCSR DEMOKRITOS short review 63 mm x 63 mm detectors fabricated with a new 4-inch aligner (2000) Two batches (V,Z) of 10 detectors each one were processed Yield 50% A new batch of 15 detectors is currently in progress (june - july 2001)

6. Preshower PRR July 5-6 20016 NCSR DEMOKRITOS 2000 processing Sum of 32 strips 32 individual strips Detector on wafer without passivation

7. Preshower PRR July 5-6 20017 NCSR DEMOKRITOS 2000 processing Total leakage current for seven detectors : batch V, detectors on wafer without passivation (10 μA, 300 V) Detectors : V2,V3,V5, V8,V9,V10,V11

8. Preshower PRR July 5-6 20018 NCSR DEMOKRITOS 2000 processing Passivation: Low Temperature Oxidation ~ 0.3 μm SiO 2 Measurements for 5 detectors after passivation (4 detectors from batch V, 1 from batch Z) 3 detectors on wafer 2 off wafer One strip with irregular behavior excluded Detectors V1,V3,V9 V11, Z2

9. Preshower PRR July 5-6 20019 NCSR DEMOKRITOS 2000 processing

10. Preshower PRR July 5-6 200110 NCSR DEMOKRITOS 2000 processing Plasma etching during passivation poses problems

11. Preshower PRR July 5-6 200111 NCSR DEMOKRITOS 2000 processing

12. Preshower PRR July 5-6 200112 NCSR DEMOKRITOS 2000 processing

13. Preshower PRR July 5-6 200113 NCSR DEMOKRITOS: IMEL detector dicing Wafer saw machine : Micro Automation 602M Y1 Y2 X1X2 Dimensions measured with ~5 μm accuracy

14. Preshower PRR July 5-6 200114 1160μm to the p+ of the first strip 63000 μm to the other end of the detector Center of scribing line is 5 μm from detector edge Normally, during scribing, the center of the scribing saw will be placed here. The scribing tool is 50 μm thick. So, in average, an estimated detector width of 62960 μm is expected after dicing Eye NCSR DEMOKRITOS : IMEL detector dicing

15. Preshower PRR July 5-6 200115 NCSR DEMOKRITOS detector production plans

16. Preshower PRR July 5-6 200116 NCSR DEMOKRITOS :IMEL equipment Wet bench (3) cleaning of Si wafers Medium current ion implanter EATON NV-3206 (20-200 keV) Low Pressure Chemical Vapor Deposition TEMPRESS 6-inch double side mask aligner (Carl Suss) Thermal processing equipment TEMPRESS

17. Preshower PRR July 5-6 200117 NCSR DEMOKRITOS :INP available space & equipment Space : 80 m 2 Temperature & humidity control (COMPTROL 4000: SULTZ) Prober : Carl Suss PA 150 enclosed on a light tight box CV : HP4092A IV : Keihley 6517 current meter & voltage source Pick and place system : FRITSCH

18. Preshower PRR July 5-6 200118 NCSR DEMOKRITOS :INP Preshower specific equipment 32 Switch board Probe card CRISTAL software installed and tested

19. Preshower PRR July 5-6 200119 NCSR DEMOKRITOS :INP μ-module assembly Work on μ-module assembly goes in parallel and in close collaboration with Dubna

20. Preshower PRR July 5-6 200120 NCSR DEMOKRITOS :INP μ-module assembly

21. Preshower PRR July 5-6 200121 NCSR DEMOKRITOS :INP μ-module assembly

22. Preshower PRR July 5-6 200122 NCSR DEMOKRITOS :INP CRISTAL data base CRISTAL initially installed in March 2000 Two machines running Win2K One machine with CRISTAL (Orbix, Objetivity and CRISTAL LC) acting as data base server and operator workstatio A second machine runs Labview and communicates with physical instruments VI’s modified for the local instruments ( Keithley 6517 and HP 4192A LF) Now the system runs with PRESHOWER_Config_v31.DB Barcode reader purchased in April 2001 Dummy barcodes printed by using a shareware program (Label Magic v1.1) and registered by CRISTAL Latest upgrade in CRISTAL (April 2001) permitted successful duplication of dummy data to the Central Storage at CERN

23. Preshower PRR July 5-6 200123 NCSR DEMOKRITOS :INP Conclusions Time per module for construction, quality control and testing : ~ 3 hours Man power for construction, quality control and testing : -two technicians for μ-module assembly -one person for μ-module testing Detectors : 1000 to be provided by the Greek groups and preferably fabricated in Greece (Institute of Microelectronics) alternative providers identified : ELMA Construction, QC and testing of 500 modules by the Preshower group of the INP