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Impurity flux and sputtering Shothydrogenoxygencarbontitaniumoxygencarbontitanium 16912 1.92E+19 3.06E+181.91E+1815.99.9 169196.07E+174.09E+171.39E+173.72.50.85.

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Presentation on theme: "Impurity flux and sputtering Shothydrogenoxygencarbontitaniumoxygencarbontitanium 16912 1.92E+19 3.06E+181.91E+1815.99.9 169196.07E+174.09E+171.39E+173.72.50.85."— Presentation transcript:

1 Impurity flux and sputtering Shothydrogenoxygencarbontitaniumoxygencarbontitanium 16912 1.92E+19 3.06E+181.91E+1815.99.9 169196.07E+174.09E+171.39E+173.72.50.85 169281.12E+181.18E+185.76.0 16928 _M 2.63E+183.32E+183.84.7 16928 _M 5.66E+183.89E+1812.08.3 169349.90E+171.23E+185.06.2 16934 _M 5.73E+185.13E+187.56.8 16935 1.63E+19 1.97E+19 7.00E+19 4.70E+19 2.00E+19 7.60E+19 2.00E+19 3.30E+172.79E+171.93E+171.71.40.97 SputteringFlux (part./s/m2)

2 Impurity flux and sputtering Shot hydrogenoxygencarbontitaniumOCTi 16912 1.92E+193.06E+181.91E+18 15.99.9 16919 1.63E+196.07E+174.09E+174.23E+17 3.72.52.6 16928 1.97E+191.12E+181.18E+18 5.76.0 16928_M7.00E+192.63E+183.32E+18 3.84.7 16928_M4.70E+195.66E+183.89E+18 12.08.3 16934 2.00E+199.90E+171.23E+18 5.06.2 16934_M7.60E+195.73E+185.13E+18 7.56.8 16935 2.00E+193.30E+172.79E+174.67E+17 1.71.42.3 SputteringFlux (part./s/m2)

3 Titanium flux Spectral lines 4533.24 A y 3 D o - a 3 F (ground) 3958.21 A y 5 F o - a 5 F (metastable) For Te=30 eV and ne=5 10 18 part./m 3 (S/XB) 4533 =1.65 (S/XB) 3958 =13

4 S/XB Titanium

5 Titanium flux

6 Plot of Impurity Flux

7

8 Plot of Impurity Sputtering

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