1. © 2013 FEI

2. A BRIEF OVERVIEW OF MICROSCOPY Origins of microscopy Historical figures in microscopy Three basic classifications of microscopes Comparing light microscopy to electron microscopy PART 1:

3. © 2013 FEI History of Microscopy Skopeo (look at) Greek Origin Mikros (small)+

4. © 2013 FEI Historic Figures in Microscopy Robert Hooke (1635-1703) Ernst Ruska (1906-1988) Ernst Abbe (1840-1905) Richard Feynman (1918-1988) Antony van Leeuwenhoek (1632-1723)

5. Scanning probe microscope © 2013 FEI Basic Microscope Classifications Charged particle microscope Optical (light) microscope Scanning probe microscope Charged particle microscope

6. © 2013 FEI Comparing Microscopes LIGHT MICROSCOPEELECTRON MICROSCOPE Use of vacuumNo vacuum Entire electron path from gun to camera must be under vacuum The source of illumination The ambient light source is light for the microscope Electrons are used to “see” – light is replaced by an electron gun built into the column The lens typeGlass lensesElectromagnetic lenses Magnification method Magnification is changed by moving the lens Focal length is charged by changing the current through the lens coil Viewing the sample Eyepiece (ocular) Fluorescent screen or digital camera

7. © 2013 FEI UNDERSTANDING KEY CONCEPTS & CORE TECHNOLOGIES IN MICROSCOPY What is resolution and resolving power? What is an electron? The electron gun Electromagnetic lenses The importance of vacuum technology PART 2:

8. © 2013 FEI KEY CONCEPT: Resolution Resolution is defined as the act, process, or capability of distinguishing between two separate, but adjacent objects or sources of light, or between two nearly equal wavelengths. Resolving Power is the ability to make points or lines which are closely adjacent in an object distinguishable in an image.

9. © 2013 FEI Resolving Power of the Human Eye What can we see?

10. © 2013 FEI Resolution & Magnification scale

11. © 2013 FEI How is Resolution Affected by Wavelength?

12. © 2013 FEI KEY CONCEPT: The Electron An atom is made up of: Protons Neutrons Electron

13. © 2013 FEI CORE TECHNOLOGY: The Electron Gun Three main sources of electrons: Tungsten LaB6 (lanthanum hexaboride) Field Emission Gun (FEG) Different costs and benefits of each Each selected primarily for their brightness

14. © 2013 FEI CORE TECHNOLOGY: Electromagnetic Lenses electron beam soft iron pole piece electrical coil

15. © 2013 FEI CORE TECHNOLOGY: The Vacuum A vacuum is a region of reduced gas pressure. Electron microscopes use a vacuum to make electrons behave like light.

16. © 2013 FEI UNDERSTANDING ADVANCED MICROSCOPES Transmission Electron Microscopes (TEM) Scanning Electron Microscopes (SEM) Focused Ion Beam Microscopes (FIB) FEI DualBeam™ Systems (FIB/SEM) PART 3:

17. © 2013 FEI What is a Transmission Electron Microscope? projector lens electron source condenser system specimen (thin) objective lens

18. © 2013 FEI TEM Aberration Correction Chromatic aberration is distortion that occurs when there is a failure of a lens to focus all colors (wavelengths) to the same convergence point. Correcting the aberration is necessary, otherwise the resulting image would be blurry and delocalized, a form of aberration where periodic structures appear to extend beyond their physical boundaries. Recent improvements in aberration correction have resulted in significantly- improved image quality and sample information. Spherical aberration occurs when parallel light rays that pass through the central region of the lens focus farther away than the light rays that pass through the edges of the lens. Result is multiple focal points and a blurred image. Chromatic AberrationSpherical Aberration

19. © 2013 FEI TEM Enables 3D Imaging 3D Imaging

20. © 2013 FEI Environmental Microscopy with TEM FEI Titan ETEM

21. © 2013 FEI What is Scanning Transmission Electron Microscopy? STEM image of a 32nm semiconductor device Elemental map of a 45 nm PMOS transistor structure EDX map of semiconductor device

22. © 2013 FEI What is a Scanning Electron Microscope? vacuum electron beam impact area electron source

23. © 2013 FEI Comparing SEM and TEM TEMSEM Imaging Electrons must pass through and be transmitted by the specimen Information needed is collected near the surface of the specimen Electron BeamBroad, static beams Beam focused to fine point; sample is scanned line by line Voltages Needed TEM voltage ranges from 60-300,000 volts Accelerating voltage much lower; not necessary to penetrate the specimen Image Rendering Transmitted electrons are collectively focused by the objective lens and magnified to create a real image Beam is scanned along the surface of the sample to build up the image Interaction of the beam electrons Specimen must be very thin Wide range of specimens allowed; simplifies sample preparation

24. FEI V400ACE Focused Ion Beam © 2013 FEI What is a Focused Ion Beam? (FIB) Cross-section of a semiconductor wafer imaged with a plasma FIB Physical Failure Analysis Platinum Nano-Wire FIB-cut in steel v2a EE by 1nA to 1B milling-002 steel

25. © 2013 FEI What is a DualBeam™ System?

26. © 2013 FEI HOW ARE ELECTRON AND ION MICROSCOPES USED TODAY? Industrial applications Life sciences Natural resources and energy Scientific research PART 4:

27. © 2013 FEI Applications of Microscopy

28. © 2013 FEI Industrial Applications

29. © 2013 FEI Life Science Applications Breast cancer cells Sperm tails tangled up in a seminiferous tubule

30. © 2013 FEI Natural Resources & Energy

31. © 2013 FEI Scientific Research

32. © 2013 FEI THE FUTURE OF MICROSCOPY AND NANOTECHNOLOGY PART 5: Nanotechnology: the future of science What is nanotechnology? Nanotechnology applications Student and teacher resources

33. © 2013 FEI Nanotechnology: The Future of Science is Now

34. © 2013 FEI What is Nanotechnology? na·no·tech·no·lo·gy noun \ na-nō-tek-nä-l ə -jē\ : the science of manipulating materials on an atomic or molecular scale especially to build microscopic devices (as robots)

35. © 2013 FEI Nanotechnology Applications

36. © 2013 FEI Student and Teacher Resources Learn more about FEI, our products, technologies, and innovations at fei.comfei.com Download or read online the complete “Introduction to Electron Microscopy” booklet at http://www.fei.com/introduction-to-electron- microscopy/

37. © 2013 FEI FEI is the world leader in transmission, scanning electron, and ion beam microscopy. FEI is responsible for numerous innovations in technology and the integration of electron and ion optics, fine mechanics, microelectronics, computer sciences, and vacuum engineering. FEI is at the forefront of electron and ion beam microscopy, the innovation leader since 1935. Learn more about us at fei.comfei.com