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Wet etching Isotropic etching Aim Selective removal of material by chemical reaction between etchant and material Why? Remove material.

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Presentation on theme: "Wet etching Isotropic etching Aim Selective removal of material by chemical reaction between etchant and material Why? Remove material."— Presentation transcript:

1

2 Wet etching Isotropic etching

3 Aim Selective removal of material by chemical reaction between etchant and material Why? Remove material

4 Steps 1.Fotolitography 2.Etching 3.Stripping

5 1 Photo litografi (exposure+ develop) Material to be patterned Fotomask Fotoresist Light source

6 Material to be patterned Patterned Fotoresist 2 Wet Etching Etching solution

7 Stripping solution Patterned photoresist Etched material 3 Stripping

8 Compare mask and resulting structure Etched material Mask

9 Reflection What is the meaning of isotropy? What is the mechanism of wet etching? How can you influence the etching speed? What is the difference between dissolve and etch?


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